KR970059306A - 측면 섬광 증착기 - Google Patents

측면 섬광 증착기 Download PDF

Info

Publication number
KR970059306A
KR970059306A KR1019970001121A KR19970001121A KR970059306A KR 970059306 A KR970059306 A KR 970059306A KR 1019970001121 A KR1019970001121 A KR 1019970001121A KR 19970001121 A KR19970001121 A KR 19970001121A KR 970059306 A KR970059306 A KR 970059306A
Authority
KR
South Korea
Prior art keywords
open
evaporator
opposing
metal
cavity
Prior art date
Application number
KR1019970001121A
Other languages
English (en)
Other versions
KR100315982B1 (ko
Inventor
엘. 피니클 로버트
Original Assignee
찰스 펠란느
어드밴스드 세라믹스 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 찰스 펠란느, 어드밴스드 세라믹스 코포레이션 filed Critical 찰스 펠란느
Publication of KR970059306A publication Critical patent/KR970059306A/ko
Application granted granted Critical
Publication of KR100315982B1 publication Critical patent/KR100315982B1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

본 발명의 내열된 섬광 증착기는 두개의 마주보는 열려진 면을 갖는 임의 구조의 몸체, 공동의 마주보는 면을 통해 금속을 증착시키기 위해 각각 두개의 마주보는 면과 열려진 대역에 면하는 적어도 하나의 금속 증착 표면으로부터 확장되는 연속적인 열려진 대역을 형성하는 공동을 포함한다. 몸체는 그라파이트로 구성되는 것이 바람직하고, 몸체의 실질적인 부위 위로 그리고 공동에 의해 형성된 금속 증착 표면 위로 확장되는 피롤리틱 보론 나이트리드의 코팅층을 갖는다.

Description

측면 섬광 증착기
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명에 따른 섬광 증착기 용기의 등축도이다.

Claims (6)

  1. 마주보는 열려진 면을 갖는 몸체와 상기 마주보는 열려진 면들 사이에 연속적으로 열려진 대역을 형성하기 위해 상기 마주보는 열려진 면의 각각으로부터 확장된 공동으로 이루어지고, 상기 몸체는 금속을 상기 열려진 대역으로 그리고 상기 모체의 상기 마주보는 열려진 면을 통해 증착하도록 상기 열려진 대역에 면하는 상기 공동에 의해 형성된 금속 증착 표면을 갖는 섬광 증착기.
  2. 제1항에 있어서, 상기 몸체는 직사각형 또는 실린더형의 구조를 갖는 내열된 섬광 증착기.
  3. 제2항에 있어서, 상기 증착기의 몸체는 그라파이트로 구성되어 있고, 상기 증착기는 상기 몸체의 실질적인 부위 위로 그리고 상기 열려진 대역에 면하는 적어도 상기 금속 증착 표면 위로 확장된느 피롤리틱 보론 나이트리드의 코팅층으로 추가로 이루어지는 내열된 섬광 증착기.
  4. 제3항에 있어서, 상기 몸체의 각각의 상기 마주보는 면은 상기 연속적으로 열려진 대역이 확장되는 사이에 실질적으로 평면의 표면을 갖는 내열된 섬광 증착기.
  5. 제4항에 있어서, 상기 몸체의 상기 할로우 공동은 상기 할로우 공동의 상기 마주보는 면을 통해 측면적으로 금속을 증착하기 위해 PBN 코팅을 각각 갖는 두개의 보충 표면을 형성하는 내열된 섬광 증착기.
  6. 제5항에 있어서, 상기 보충 표면의 적어도 하나는 금속이 위치될 수 있는 오목한 면을 갖는 내열된 섬광 증착기.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970001121A 1996-01-17 1997-01-16 측면 순간 증발기 KR100315982B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/586,326 US5671322A (en) 1996-01-17 1996-01-17 Lateral flash evaporator
US08/586,326 1996-01-17

Publications (2)

Publication Number Publication Date
KR970059306A true KR970059306A (ko) 1997-08-12
KR100315982B1 KR100315982B1 (ko) 2002-02-19

Family

ID=24345283

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970001121A KR100315982B1 (ko) 1996-01-17 1997-01-16 측면 순간 증발기

Country Status (6)

Country Link
US (1) US5671322A (ko)
EP (1) EP0785290B1 (ko)
JP (1) JPH111765A (ko)
KR (1) KR100315982B1 (ko)
DE (1) DE69700167T2 (ko)
TW (1) TW464151U (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19735814A1 (de) * 1997-08-18 1999-02-25 Kempten Elektroschmelz Gmbh Keramische Flash-TV-Verdampfer
ITTO20030347A1 (it) * 2003-05-13 2004-11-14 Fiat Ricerche Micro-attuatore a film sottile a memoria di forma, e procedimento per la sua produzione
US8080127B2 (en) * 2007-04-15 2011-12-20 Graftech International Holdings Inc. Carbon foam evaporator
CA2812933A1 (en) * 2010-09-29 2012-04-19 Zimmer, Inc. Pyrolytic carbon implants with porous fixation component and methods of making the same
EP2755729B1 (en) 2011-09-14 2018-09-05 Aquasource Technologies Corporation System and method for water treatment
US20160046408A1 (en) * 2015-10-27 2016-02-18 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Internally coated vessel for housing a metal halide
DE102019110950A1 (de) 2019-04-29 2020-10-29 Kennametal Inc. Hartmetallzusammensetzungen und deren Anwendungen

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3024761A (en) * 1958-07-01 1962-03-13 Ibm Vacuum evaporation apparatus
US3746502A (en) * 1971-12-20 1973-07-17 Xerox Corp Evaporation crucible
US3748090A (en) * 1971-12-20 1973-07-24 Xerox Corp Evaporation crucible
US4264893A (en) 1974-01-25 1981-04-28 Honeywell Inc. Data communication system
US4264803A (en) * 1978-01-10 1981-04-28 Union Carbide Corporation Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization
US4773852A (en) * 1985-06-11 1988-09-27 Denki Kagaku Kogyo Kabushiki Kaisha Pyrolytic boron nitride crucible and method for producing the same
US5158750A (en) * 1990-06-06 1992-10-27 Praxair S.T. Technology, Inc. Boron nitride crucible
US5167984A (en) * 1990-12-06 1992-12-01 Xerox Corporation Vacuum deposition process
US5239612A (en) * 1991-12-20 1993-08-24 Praxair S.T. Technology, Inc. Method for resistance heating of metal using a pyrolytic boron nitride coated graphite boat
US5395180A (en) * 1993-12-14 1995-03-07 Advanced Ceramics Corporation Boron nitride vaporization vessel

Also Published As

Publication number Publication date
US5671322A (en) 1997-09-23
KR100315982B1 (ko) 2002-02-19
DE69700167D1 (de) 1999-05-12
EP0785290B1 (en) 1999-04-07
EP0785290A1 (en) 1997-07-23
JPH111765A (ja) 1999-01-06
DE69700167T2 (de) 1999-07-29
TW464151U (en) 2001-11-11

Similar Documents

Publication Publication Date Title
DE60022495D1 (de) Keramischer heizer.
ES2088274T3 (es) Metodo para la produccion de polvo de nitruro de aluminio resistente a la humedad y polvo asi producido.
AR013398A1 (es) Un material de partida con superficies interior y exterior para la formacion de un contenedor y el contenedor asi obtenido.
KR970059306A (ko) 측면 섬광 증착기
FI95959C (fi) Kaasutiivis reunatiiviste ja menetelmä sen valmistamiseksi
DE60026063D1 (de) Pyrolytischer kohlenstoff und metall/metalloid carbidverbundwerkstoffe
DK0991500T3 (da) Fleksibelt slibelegeme
ATE325905T1 (de) Kolbenring mit einer pvd-beschichtung
KR850004990A (ko) 가스 침투 가능한 내화물질의 요소
KR970703214A (ko) 중심 나사 개구를 구비한 절삭 삽입체(Cutting Insert with a Threaded Central Aperture)
FR2427190A1 (fr) Article a reprise thermique et leur application a la protection des substrats
KR940000772A (ko) 시일링 부재
ECSP034593A (es) Un procedimiento u una instalacion de revestimiento de templado en caliente y continuo de una cinta metalica
JP2000507135A5 (ko)
FR2370251A1 (fr) Caloduc
DE59710964D1 (de) Urinanlage aus Keramik, Glas oder Metall
FR2707732B1 (fr) Chambre de vaporisation munie d'une couche anti-caléfaction.
FR2696427B1 (fr) Chambre et combinaison de chambres pour une installation sous vide, et procede pour transferer au moins une piece.
JPS56129044A (en) Thermal shock resistant ceramic honeycomb structure
ATE204406T1 (de) Mikrowellenofen und bauteile hierfür
FR2703040B1 (fr) Procédé de préparation de poudre pour céramique en nitrure et/ou carbure métallique et/ou métalloïdique par pyrolyse-flash et la poudre ainsi obtenue.
FR2453120A1 (fr) Article manufacture comprenant un corps de ceramique d'alumine lie par un agent de scellement a une piece de ceramique ou de metal refractaire
WO2000006808A3 (en) Surface treatment of steel
KR900001295A (ko) 낚시바늘과 그 제조방법
KR900013606A (ko) 브레이징재

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
LAPS Lapse due to unpaid annual fee