KR970054261A - 투명도전막 형성방법 - Google Patents

투명도전막 형성방법 Download PDF

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Publication number
KR970054261A
KR970054261A KR1019950050659A KR19950050659A KR970054261A KR 970054261 A KR970054261 A KR 970054261A KR 1019950050659 A KR1019950050659 A KR 1019950050659A KR 19950050659 A KR19950050659 A KR 19950050659A KR 970054261 A KR970054261 A KR 970054261A
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KR
South Korea
Prior art keywords
conductive film
transparent conductive
drying
paste
firing
Prior art date
Application number
KR1019950050659A
Other languages
English (en)
Inventor
박필남
Original Assignee
윤종용
삼성전관 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 윤종용, 삼성전관 주식회사 filed Critical 윤종용
Priority to KR1019950050659A priority Critical patent/KR970054261A/ko
Priority to GB9625448A priority patent/GB2308080B/en
Priority to JP8329906A priority patent/JPH09198927A/ja
Priority to DE19652048A priority patent/DE19652048A1/de
Priority to CN96121328A priority patent/CN1159063A/zh
Publication of KR970054261A publication Critical patent/KR970054261A/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • C03C17/253—Coating containing SnO2
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
    • H01L31/1864—Annealing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C03C2217/231—In2O3/SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/118—Deposition methods from solutions or suspensions by roller-coating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Non-Insulated Conductors (AREA)
  • Conductive Materials (AREA)

Abstract

본 발명은 유리기판을 세정한 후 건조하는 단계; 로울 코터를 사용하여 투명도전막 형성용 페이스트를 도포하는 단계; 레벨링기를 사용하여 기판상에 도포된 투명도전막을 균일화시키는 단계; 상기 투명도전막을 건조하는 단계; 상기 투명도전막을 입식소성로에서 소성하는 단계를 포함하는 것을 특징으로 하는 투명도전막 형성방법을 제공한다. 본 발명에 의하면, 투명도전막 형성용 페이스트의 도포 수율이 높아지고 그 페이스트의 손실이 감소됨으로써 생산성이 향상된다.

Description

투명도전막 형성방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 본 발명의 투명도전막 형성시 사용되는 설비 구성도이다.

Claims (3)

  1. 유리기판을 세정한 후 건조하는 단계; 로울 코터를 사용하여 투명도전막 형성용 페이스트를 도포하는 단계; 레벨링기를 사용하여 기판상에 도포된 투명도전막을 균일화시키는 단계; 상기 투명도전막을 건조하는 단계; 상기 투명도전막을 입식소성로에서 소성하는 단계는 포함하는 것을 특징으로 하는 투명도전막 형성방법.
  2. 제1항에 있어서, 상기 투명도전막 건조단계에서 건조온도가 150∼200℃인 것을 특징으로 하는 투명도전막 형성방법.
  3. 제1항에 있어서, 상기 투명도전막의 소성단계에서 소성온도가 400∼600℃인 것을 특징으로 하는 투명도전막 형성방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950050659A 1995-12-15 1995-12-15 투명도전막 형성방법 KR970054261A (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1019950050659A KR970054261A (ko) 1995-12-15 1995-12-15 투명도전막 형성방법
GB9625448A GB2308080B (en) 1995-12-15 1996-12-06 Method for forming transparent conductive layer
JP8329906A JPH09198927A (ja) 1995-12-15 1996-12-10 透明導電膜の形成方法
DE19652048A DE19652048A1 (de) 1995-12-15 1996-12-13 Verfahren zur Ausbildung einer transparenten leitfähigen Schicht
CN96121328A CN1159063A (zh) 1995-12-15 1996-12-14 形成透明导电层的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950050659A KR970054261A (ko) 1995-12-15 1995-12-15 투명도전막 형성방법

Publications (1)

Publication Number Publication Date
KR970054261A true KR970054261A (ko) 1997-07-31

Family

ID=19440569

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950050659A KR970054261A (ko) 1995-12-15 1995-12-15 투명도전막 형성방법

Country Status (5)

Country Link
JP (1) JPH09198927A (ko)
KR (1) KR970054261A (ko)
CN (1) CN1159063A (ko)
DE (1) DE19652048A1 (ko)
GB (1) GB2308080B (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5207728B2 (ja) * 2006-12-21 2013-06-12 富士フイルム株式会社 導電膜およびその製造方法
JP5551450B2 (ja) * 2010-01-07 2014-07-16 シャープ株式会社 透明電極層の形成装置および形成方法
CN102319661B (zh) * 2011-07-25 2013-08-21 云梦县德邦实业有限责任公司 导电膜的涂布方法
CN102354574B (zh) * 2011-07-25 2013-02-20 云梦县德邦实业有限责任公司 导电膜的涂布水洗风干系统
CN103803809A (zh) * 2014-02-22 2014-05-21 蚌埠玻璃工业设计研究院 一种生产氧化锌基透明导电膜玻璃的方法
CN103803808A (zh) * 2014-02-22 2014-05-21 蚌埠玻璃工业设计研究院 一种大面积制备透明导电膜玻璃的方法
WO2018125015A1 (en) * 2016-12-30 2018-07-05 Turkiye Sise Ve Cam Fabrikalari Anonim Sirketi A technique for the production of a transparent conductive oxide film by a roller coating technique

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5510141A (en) * 1995-01-26 1996-04-23 Central Glass Company, Limited Coating composition and method for forming thin film on substrate using same

Also Published As

Publication number Publication date
GB2308080B (en) 1999-07-28
GB9625448D0 (en) 1997-01-22
JPH09198927A (ja) 1997-07-31
GB2308080A (en) 1997-06-18
DE19652048A1 (de) 1997-06-19
CN1159063A (zh) 1997-09-10

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