KR970053807A - Junction Capacitor Using Bipolar Transistor Structure and Its Manufacturing Method - Google Patents
Junction Capacitor Using Bipolar Transistor Structure and Its Manufacturing Method Download PDFInfo
- Publication number
- KR970053807A KR970053807A KR1019950047988A KR19950047988A KR970053807A KR 970053807 A KR970053807 A KR 970053807A KR 1019950047988 A KR1019950047988 A KR 1019950047988A KR 19950047988 A KR19950047988 A KR 19950047988A KR 970053807 A KR970053807 A KR 970053807A
- Authority
- KR
- South Korea
- Prior art keywords
- region
- conductive
- conductivity type
- type region
- isolation
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title claims abstract description 4
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000002955 isolation Methods 0.000 claims abstract 11
- 239000004065 semiconductor Substances 0.000 claims abstract 7
- 239000000758 substrate Substances 0.000 claims abstract 6
- 238000000034 method Methods 0.000 claims abstract 2
- 238000000059 patterning Methods 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000012212 insulator Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0641—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region without components of the field effect type
- H01L27/0647—Bipolar transistors in combination with diodes, or capacitors, or resistors, e.g. vertical bipolar transistor and bipolar lateral transistor and resistor
- H01L27/0652—Vertical bipolar transistor in combination with diodes, or capacitors, or resistors
- H01L27/0658—Vertical bipolar transistor in combination with resistors or capacitors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Bipolar Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
본 발명은 트랜지스터의 접합 정전 용량값을 향상 시키기위한 제조공정에 관한것 으로서 반도체 기판 위에 매몰층을 형성하고, 상기 매몰층 위에 에피층을 형성하고, 상기 에피층에 격리 영역을 형성한 다음 상기 에피층에 상기 격리 영역과 중첩하도록 제1 도전형 영역을 형성하고, 상기 제1 도전형 영역과 일부만 중첩하도록 제2 도전형 영역을 형성하는 접합 축전기의 제조 방법으로서, 이때 제1 도전형 영역이 P형 절연체와 연결되고 제1 도전형 영역 안에 형성되는 제2 도전형 영역의 일부가 제1 도전형 영역을 벗어나 N형의 에피 영역과 접속되게 하는 구조로서 이미터-베이스, 콜렉터-베이스, 콜렉터-기판 사이에 형성되는 접합 용량이 병렬로 형성 되게함으로서 동일한 면적에서 더 큰 정전 용량값을 얻는 효과가 있다.The present invention relates to a fabrication process for improving a junction capacitance value of a transistor, wherein the buried layer is formed on a semiconductor substrate, an epitaxial layer is formed on the buried layer, and an isolation region is formed on the epitaxial layer. A method of manufacturing a junction capacitor in which a first conductivity type region is formed in a layer so as to overlap with the isolation region, and a second conductivity type region is formed so as to partially overlap the first conductivity type region, wherein the first conductivity type region is P. A part of the second conductive type region which is connected to the type insulator and is formed in the first conductive type region to leave the first conductive type region and is connected to the N type epi region. By allowing the junction capacitances formed between the substrates to be formed in parallel, there is an effect of obtaining a larger capacitance value in the same area.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제4도는 본 발명의 실시예에 따른 접합 축전기의 단면도이고,4 is a cross-sectional view of a junction capacitor according to an embodiment of the present invention,
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950047988A KR100247281B1 (en) | 1995-12-08 | 1995-12-08 | Junction capacitor using bipolar transistor structure and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950047988A KR100247281B1 (en) | 1995-12-08 | 1995-12-08 | Junction capacitor using bipolar transistor structure and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970053807A true KR970053807A (en) | 1997-07-31 |
KR100247281B1 KR100247281B1 (en) | 2000-03-15 |
Family
ID=19438752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950047988A KR100247281B1 (en) | 1995-12-08 | 1995-12-08 | Junction capacitor using bipolar transistor structure and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100247281B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100852576B1 (en) * | 2006-04-24 | 2008-08-18 | 산요덴키가부시키가이샤 | Semiconductor device and method for manufacturing the same |
-
1995
- 1995-12-08 KR KR1019950047988A patent/KR100247281B1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100852576B1 (en) * | 2006-04-24 | 2008-08-18 | 산요덴키가부시키가이샤 | Semiconductor device and method for manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
KR100247281B1 (en) | 2000-03-15 |
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