KR970046679U - 개선된 엔드스테이션부를 갖는 이온주입장치 - Google Patents

개선된 엔드스테이션부를 갖는 이온주입장치

Info

Publication number
KR970046679U
KR970046679U KR2019950048860U KR19950048860U KR970046679U KR 970046679 U KR970046679 U KR 970046679U KR 2019950048860 U KR2019950048860 U KR 2019950048860U KR 19950048860 U KR19950048860 U KR 19950048860U KR 970046679 U KR970046679 U KR 970046679U
Authority
KR
South Korea
Prior art keywords
end station
ion implanter
improved end
improved
implanter
Prior art date
Application number
KR2019950048860U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950048860U priority Critical patent/KR970046679U/ko
Publication of KR970046679U publication Critical patent/KR970046679U/ko

Links

KR2019950048860U 1995-12-27 1995-12-27 개선된 엔드스테이션부를 갖는 이온주입장치 KR970046679U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950048860U KR970046679U (ko) 1995-12-27 1995-12-27 개선된 엔드스테이션부를 갖는 이온주입장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950048860U KR970046679U (ko) 1995-12-27 1995-12-27 개선된 엔드스테이션부를 갖는 이온주입장치

Publications (1)

Publication Number Publication Date
KR970046679U true KR970046679U (ko) 1997-07-31

Family

ID=60878363

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950048860U KR970046679U (ko) 1995-12-27 1995-12-27 개선된 엔드스테이션부를 갖는 이온주입장치

Country Status (1)

Country Link
KR (1) KR970046679U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990042212A (ko) * 1997-11-26 1999-06-15 윤종용 여과기를 구비하는 가스 공급 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990042212A (ko) * 1997-11-26 1999-06-15 윤종용 여과기를 구비하는 가스 공급 장치

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Legal Events

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