KR970046645U - 고순도 케미칼 이송용 호스의 자동연결장치 - Google Patents

고순도 케미칼 이송용 호스의 자동연결장치

Info

Publication number
KR970046645U
KR970046645U KR2019950047786U KR19950047786U KR970046645U KR 970046645 U KR970046645 U KR 970046645U KR 2019950047786 U KR2019950047786 U KR 2019950047786U KR 19950047786 U KR19950047786 U KR 19950047786U KR 970046645 U KR970046645 U KR 970046645U
Authority
KR
South Korea
Prior art keywords
high purity
connection device
automatic connection
transfer hose
purity chemical
Prior art date
Application number
KR2019950047786U
Other languages
English (en)
Other versions
KR0140819Y1 (ko
Inventor
김철원
Original Assignee
김철원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김철원 filed Critical 김철원
Priority to KR2019950047786U priority Critical patent/KR0140819Y1/ko
Publication of KR970046645U publication Critical patent/KR970046645U/ko
Application granted granted Critical
Publication of KR0140819Y1 publication Critical patent/KR0140819Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
KR2019950047786U 1995-12-26 1995-12-26 고순도 케미칼 이송용 호스의 자동연결장치 KR0140819Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950047786U KR0140819Y1 (ko) 1995-12-26 1995-12-26 고순도 케미칼 이송용 호스의 자동연결장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950047786U KR0140819Y1 (ko) 1995-12-26 1995-12-26 고순도 케미칼 이송용 호스의 자동연결장치

Publications (2)

Publication Number Publication Date
KR970046645U true KR970046645U (ko) 1997-07-31
KR0140819Y1 KR0140819Y1 (ko) 1999-04-15

Family

ID=19438554

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950047786U KR0140819Y1 (ko) 1995-12-26 1995-12-26 고순도 케미칼 이송용 호스의 자동연결장치

Country Status (1)

Country Link
KR (1) KR0140819Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100519542B1 (ko) * 1998-07-24 2005-12-21 삼성전자주식회사 유체단속용 커플러

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102328783B1 (ko) * 2020-06-02 2021-11-22 주식회사 케이씨 케미컬 공급장치의 커플러 세정 장치 및 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100519542B1 (ko) * 1998-07-24 2005-12-21 삼성전자주식회사 유체단속용 커플러

Also Published As

Publication number Publication date
KR0140819Y1 (ko) 1999-04-15

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Legal Events

Date Code Title Description
A201 Request for examination
N231 Notification of change of applicant
E701 Decision to grant or registration of patent right
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Payment date: 20091229

Year of fee payment: 12

EXPY Expiration of term