KR970045361U - 펠리클을 구비한 마스크 - Google Patents

펠리클을 구비한 마스크

Info

Publication number
KR970045361U
KR970045361U KR2019950040227U KR19950040227U KR970045361U KR 970045361 U KR970045361 U KR 970045361U KR 2019950040227 U KR2019950040227 U KR 2019950040227U KR 19950040227 U KR19950040227 U KR 19950040227U KR 970045361 U KR970045361 U KR 970045361U
Authority
KR
South Korea
Prior art keywords
pellicle
mask
Prior art date
Application number
KR2019950040227U
Other languages
English (en)
Other versions
KR200149834Y1 (ko
Inventor
송영수
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950040227U priority Critical patent/KR200149834Y1/ko
Publication of KR970045361U publication Critical patent/KR970045361U/ko
Application granted granted Critical
Publication of KR200149834Y1 publication Critical patent/KR200149834Y1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
KR2019950040227U 1995-12-12 1995-12-12 펠리클을 구비한 마스크 KR200149834Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950040227U KR200149834Y1 (ko) 1995-12-12 1995-12-12 펠리클을 구비한 마스크

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950040227U KR200149834Y1 (ko) 1995-12-12 1995-12-12 펠리클을 구비한 마스크

Publications (2)

Publication Number Publication Date
KR970045361U true KR970045361U (ko) 1997-07-31
KR200149834Y1 KR200149834Y1 (ko) 1999-06-15

Family

ID=19433348

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950040227U KR200149834Y1 (ko) 1995-12-12 1995-12-12 펠리클을 구비한 마스크

Country Status (1)

Country Link
KR (1) KR200149834Y1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7723704B2 (en) 2006-11-10 2010-05-25 Globalfoundries Inc. EUV pellicle with increased EUV light transmittance
KR101280676B1 (ko) * 2009-07-16 2013-07-01 미쓰이 가가쿠 가부시키가이샤 펠리클 프레임 및 그것을 포함하는 펠리클

Also Published As

Publication number Publication date
KR200149834Y1 (ko) 1999-06-15

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