KR960015340U - 노광마스크 - Google Patents

노광마스크

Info

Publication number
KR960015340U
KR960015340U KR2019940028304U KR19940028304U KR960015340U KR 960015340 U KR960015340 U KR 960015340U KR 2019940028304 U KR2019940028304 U KR 2019940028304U KR 19940028304 U KR19940028304 U KR 19940028304U KR 960015340 U KR960015340 U KR 960015340U
Authority
KR
South Korea
Prior art keywords
exposure mask
mask
exposure
Prior art date
Application number
KR2019940028304U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940028304U priority Critical patent/KR960015340U/ko
Publication of KR960015340U publication Critical patent/KR960015340U/ko

Links

KR2019940028304U 1994-10-28 1994-10-28 노광마스크 KR960015340U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940028304U KR960015340U (ko) 1994-10-28 1994-10-28 노광마스크

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940028304U KR960015340U (ko) 1994-10-28 1994-10-28 노광마스크

Publications (1)

Publication Number Publication Date
KR960015340U true KR960015340U (ko) 1996-05-17

Family

ID=60846616

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940028304U KR960015340U (ko) 1994-10-28 1994-10-28 노광마스크

Country Status (1)

Country Link
KR (1) KR960015340U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100389567B1 (ko) * 1999-08-19 2003-06-27 엔이씨 일렉트로닉스 코포레이션 전자선노광마스크, 전자선노광방법, 반도체장치 제조방법및 전자선노광장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100389567B1 (ko) * 1999-08-19 2003-06-27 엔이씨 일렉트로닉스 코포레이션 전자선노광마스크, 전자선노광방법, 반도체장치 제조방법및 전자선노광장치

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application