KR970030421A

KR970030421A - Polishing device

Info

Publication number: KR970030421A
Application number: KR1019950042708A
Authority: KR
Inventors: 니시 도요미; 다까하시 다마미; 도가와 데쯔시
Original assignee: 후지무라 히로유끼; 가부시끼 가이샤 에바라 세사쿠쇼
Priority date: 1995-11-22
Filing date: 1995-11-22
Publication date: 1997-06-26

Abstract

가벼우며, 내변형력이 높은 카트리지포을 용이하게 상호변형할 수 있는 폴리싱장치가 제공되고 있다. 카트리지포는 두개의 상부와 저부 알루미늄 박판사이에 끼워질 수 있는 허니콤형 구조부재를 포함하는 카트리지부재에 연마포를 결합시켜 만들어진다. 시장에서 유용한 여러 셀의 크기 및 재료의 허니콤형 구조부재가 매우 효과적으로 사용될 수 있다. 알루미늄 재료로 만들어진 허니콤형 구조부재는 강성이며 내열성인 카트리지부재를 제공하게 된다. 허니콤형 구조부재의 셀 공간은 기대부재를 통해 적당한 유체를 통과시킴으로써 사용되는 연마 슬러리의 성질에 따라 냉각되거나 가열될 수 있다. 이것은 허니콤 셀을 분리시키는 셀 벽의 유출구멍을 제공하여 가능하게 된다. 이러한 접근방법은 카트리지포에 의해 최적의 연마성능을 생산되게 하는 데에 효과적이다. 열제어는 일반적으로 또는 염이 필요하거나 제거될 수 있는 곳에서 국부적으로 행해질 수 있다.There is provided a polishing apparatus that is light and can easily deform the cartridge fabric having high deformation resistance. The cartridge fabric is made by bonding an abrasive cloth to a cartridge member comprising a honeycomb structural member that can be sandwiched between two top and bottom aluminum sheets. Honeycomb structural members of various cell sizes and materials available on the market can be used very effectively. The honeycomb structural member made of aluminum material provides a cartridge member that is rigid and heat resistant. The cell space of the honeycomb structural member can be cooled or heated depending on the nature of the polishing slurry used by passing a suitable fluid through the base member. This is made possible by providing an outlet hole in the cell wall that separates the honeycomb cell. This approach is effective in producing optimum polishing performance by the cartridge cloth. Thermal control may be done locally or locally where salt may be needed or removed.

Description

Polishing device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 말명의 폴리싱장치의 단면도.1 is a cross-sectional view of the polishing apparatus of the present invention.

제2도는 본 말명의 폴리싱장치에 사용되는 허이콤혐 구조예의 사시도.2 is a perspective view of a structural example of a honeycomb used in the polishing apparatus of the present invention.

제3도는 본 발명의 폴리싱장치의 기본 부품의 구성을 나타내는 종단면도.3 is a longitudinal sectional view showing the configuration of the basic parts of the polishing apparatus of the present invention.

Claims

A polishing apparatus for performing flat mirror polishing on a polishing object, comprising: a turntable; A cartridge cloth detachably fixed to the turntable and having an abrasive cloth bonded to an upper surface of the cartridge member; Pressing means for pressing the polishing object against the polishing cloth; And a supply means for supplying a slurry onto the abrasive cloth, wherein the abrasive cloth comprises a composite structure consisting of a honeycomb structure and a thin plate.

The polishing apparatus according to claim 1, wherein the cartridge fabric is a composite structure in which the honeycomb structural member is sandwiched between the thin plates.

2. A polishing apparatus according to claim 1, wherein said honeycomb structural member comprises a cell wall having an outlet opening for flowing a flow medium for thermal control of a polishing operation.

4. A polishing apparatus according to claim 3, wherein said thermal control is cooling control.

4. A polishing apparatus according to claim 3, wherein said heat control is heating control.

4. A polishing apparatus according to claim 3, wherein said heat control is a mixture of cooling and heating control.

The polishing apparatus according to claim 1, wherein the polishing object is a semiconductor wafer.

2. A polishing apparatus according to claim 1, wherein said honeycomb structural member comprises a cell of polygonal cross section.

9. A polishing apparatus according to claim 8, wherein said honeycomb structural member is a cell of a hexagonal cross section.