KR970030247A - Gas supply device for semiconductor device manufacturing process - Google Patents
Gas supply device for semiconductor device manufacturing process Download PDFInfo
- Publication number
- KR970030247A KR970030247A KR1019950043658A KR19950043658A KR970030247A KR 970030247 A KR970030247 A KR 970030247A KR 1019950043658 A KR1019950043658 A KR 1019950043658A KR 19950043658 A KR19950043658 A KR 19950043658A KR 970030247 A KR970030247 A KR 970030247A
- Authority
- KR
- South Korea
- Prior art keywords
- manufacturing process
- semiconductor device
- closing
- device manufacturing
- opening
- Prior art date
Links
Abstract
가스를 공급하는 정극박스와 공정챔버 사이의 공급라인에 개폐용 밸브를 설치한 반도체장치 제조 공정수행을 위한 가스 공급 장치에 관한 것이다.The present invention relates to a gas supply device for performing a semiconductor device manufacturing process in which a valve for opening and closing is installed in a supply line between a positive electrode box supplying gas and a process chamber.
본 발명은 반도체장치 제조 공정에 필요한 가스를 선택 및 혼합하여 공급하는 정글박스(Jungle box)로부터 복수의 라인으로 공정이 수행되는 공정챔버에 공급하도록 구성된 반도체장치 제조 공정수행을 위한 가스 공급장치에 있어서, 선택적 개폐에 따라 누설 부분 진단을 수행할 수 있도록 상기 복수의 라인에 개폐용 밸브가 구성됨을 특징으로 한다.The present invention provides a gas supply apparatus for performing a semiconductor device manufacturing process configured to supply a process chamber in which a process is performed in a plurality of lines from a jungle box for selecting, mixing, and supplying a gas required for a semiconductor device manufacturing process. According to the selective opening and closing, the opening and closing valve is configured in the plurality of lines so as to perform the partial leakage diagnosis.
따라서, 진공장치의 누설 발생시 개폐용 벨브를 닫아 정글박스와 공정챔버를 분리하여 누설지점 검사를 용이하게 할 수 있는 효과가 있다.Therefore, when the leakage of the vacuum device occurs, closing the opening and closing valve to separate the jungle box and the process chamber has an effect that can facilitate the leak point inspection.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2도는 본 발명에 의한 가스 공급장치의 실시예를 나타내는 블럭도이다.2 is a block diagram showing an embodiment of a gas supply device according to the present invention.
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950043658A KR970030247A (en) | 1995-11-24 | 1995-11-24 | Gas supply device for semiconductor device manufacturing process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950043658A KR970030247A (en) | 1995-11-24 | 1995-11-24 | Gas supply device for semiconductor device manufacturing process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970030247A true KR970030247A (en) | 1997-06-26 |
Family
ID=66588202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019950043658A KR970030247A (en) | 1995-11-24 | 1995-11-24 | Gas supply device for semiconductor device manufacturing process |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR970030247A (en) |
-
1995
- 1995-11-24 KR KR1019950043658A patent/KR970030247A/en not_active Application Discontinuation
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WITN | Withdrawal due to no request for examination |