KR970017987A - Gas supply of semiconductor manufacturing equipment - Google Patents
Gas supply of semiconductor manufacturing equipment Download PDFInfo
- Publication number
- KR970017987A KR970017987A KR1019950032968A KR19950032968A KR970017987A KR 970017987 A KR970017987 A KR 970017987A KR 1019950032968 A KR1019950032968 A KR 1019950032968A KR 19950032968 A KR19950032968 A KR 19950032968A KR 970017987 A KR970017987 A KR 970017987A
- Authority
- KR
- South Korea
- Prior art keywords
- gas
- semiconductor manufacturing
- manufacturing equipment
- gas supply
- gas cylinder
- Prior art date
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- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Pipeline Systems (AREA)
Abstract
반도체 제조 장비에 가스 봄베로부터 공정용 가스를 공급하는 가스 공급 장치에 관하여 개시한다. 본 발명은 밸브를 이용하여 하나의 상기 가스 봄베를 교환하는 동안에도 다른 가스 봄베로부터 반도체 장비에 계속적으로 공정용 가스를 공급할 수 있는 것을 특징으로 하는 가스 공급 장치를 제공한다. 본 발명에 의하여 가스 봄베를 교환하는 경우 가스 라인 내의 잔류 가스를 퍼지하는 시간 동안만 반도체 제조 장비를 정지하고, 나머지 시간동안에는 계속 장비를 가동하여 생산성 향상에 크게 기여한다.The gas supply apparatus which supplies a process gas from a gas cylinder to a semiconductor manufacturing equipment is disclosed. The present invention provides a gas supply device, characterized in that the process gas can be continuously supplied from the other gas cylinder to the semiconductor equipment during the exchange of one of the gas cylinder using a valve. In the case of replacing the gas cylinder according to the present invention, the semiconductor manufacturing equipment is stopped only for the time for purging the residual gas in the gas line, and the equipment is continuously operated for the remaining time, thereby greatly contributing to the productivity improvement.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 본 발명에 따라 가스 봄베 교환시 가스 라인 내에 남아 있는 잔류 가스를 공정 튜브를 통하여 퍼지하는 경우의 가스 공급 장치이다.2 is a gas supply apparatus in the case of purging the residual gas remaining in the gas line during the gas cylinder exchange according to the present invention through the process tube.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950032968A KR970017987A (en) | 1995-09-29 | 1995-09-29 | Gas supply of semiconductor manufacturing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950032968A KR970017987A (en) | 1995-09-29 | 1995-09-29 | Gas supply of semiconductor manufacturing equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970017987A true KR970017987A (en) | 1997-04-30 |
Family
ID=66615421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950032968A KR970017987A (en) | 1995-09-29 | 1995-09-29 | Gas supply of semiconductor manufacturing equipment |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970017987A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100517806B1 (en) * | 2001-08-14 | 2005-09-29 | 주식회사 우일하이테크 | Apparatus for automatic supply chemical of semiconductor equipment |
-
1995
- 1995-09-29 KR KR1019950032968A patent/KR970017987A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100517806B1 (en) * | 2001-08-14 | 2005-09-29 | 주식회사 우일하이테크 | Apparatus for automatic supply chemical of semiconductor equipment |
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Legal Events
Date | Code | Title | Description |
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WITN | Withdrawal due to no request for examination |