KR970017987A - Gas supply of semiconductor manufacturing equipment - Google Patents

Gas supply of semiconductor manufacturing equipment Download PDF

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Publication number
KR970017987A
KR970017987A KR1019950032968A KR19950032968A KR970017987A KR 970017987 A KR970017987 A KR 970017987A KR 1019950032968 A KR1019950032968 A KR 1019950032968A KR 19950032968 A KR19950032968 A KR 19950032968A KR 970017987 A KR970017987 A KR 970017987A
Authority
KR
South Korea
Prior art keywords
gas
semiconductor manufacturing
manufacturing equipment
gas supply
gas cylinder
Prior art date
Application number
KR1019950032968A
Other languages
Korean (ko)
Inventor
황인철
설동열
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950032968A priority Critical patent/KR970017987A/en
Publication of KR970017987A publication Critical patent/KR970017987A/en

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  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Pipeline Systems (AREA)

Abstract

반도체 제조 장비에 가스 봄베로부터 공정용 가스를 공급하는 가스 공급 장치에 관하여 개시한다. 본 발명은 밸브를 이용하여 하나의 상기 가스 봄베를 교환하는 동안에도 다른 가스 봄베로부터 반도체 장비에 계속적으로 공정용 가스를 공급할 수 있는 것을 특징으로 하는 가스 공급 장치를 제공한다. 본 발명에 의하여 가스 봄베를 교환하는 경우 가스 라인 내의 잔류 가스를 퍼지하는 시간 동안만 반도체 제조 장비를 정지하고, 나머지 시간동안에는 계속 장비를 가동하여 생산성 향상에 크게 기여한다.The gas supply apparatus which supplies a process gas from a gas cylinder to a semiconductor manufacturing equipment is disclosed. The present invention provides a gas supply device, characterized in that the process gas can be continuously supplied from the other gas cylinder to the semiconductor equipment during the exchange of one of the gas cylinder using a valve. In the case of replacing the gas cylinder according to the present invention, the semiconductor manufacturing equipment is stopped only for the time for purging the residual gas in the gas line, and the equipment is continuously operated for the remaining time, thereby greatly contributing to the productivity improvement.

Description

반도체 제조 장비의 가스 공급 장치Gas supply of semiconductor manufacturing equipment

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도는 본 발명에 따라 가스 봄베 교환시 가스 라인 내에 남아 있는 잔류 가스를 공정 튜브를 통하여 퍼지하는 경우의 가스 공급 장치이다.2 is a gas supply apparatus in the case of purging the residual gas remaining in the gas line during the gas cylinder exchange according to the present invention through the process tube.

Claims (2)

반도체 제조 장비에 가스 봄베로부터 공정용 가스를 공급하는 가스 공급 장치에 있어서, 밸브를 이용하여 하나의 상기 가스 봄베를 교환하는 동안에도 다른 가스 봄베로부터 반도체 장비에 계속적으로 공정용 가스를 공급할 수 있는 것을 특징으로 하는 가스 공급 장치.In the gas supply device for supplying the process gas from the gas cylinder to the semiconductor manufacturing equipment, it is possible to continuously supply the process gas from the other gas cylinder to the semiconductor equipment during the exchange of one of the gas cylinder using a valve Characterized in that the gas supply device. 제1항에 있어서, 상기 가스 봄베 교환시 상기 반도체 제조 장비의 정지 시간을 단축할 목적으로 가연배기 라인 또는 스크러버로 잔류 가스를 퍼지하는 것을 특징으로 하는 가스 공급 장치.The gas supply apparatus according to claim 1, wherein the residual gas is purged with a combustible exhaust line or a scrubber for the purpose of shortening the down time of the semiconductor manufacturing equipment during the gas cylinder replacement. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950032968A 1995-09-29 1995-09-29 Gas supply of semiconductor manufacturing equipment KR970017987A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950032968A KR970017987A (en) 1995-09-29 1995-09-29 Gas supply of semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950032968A KR970017987A (en) 1995-09-29 1995-09-29 Gas supply of semiconductor manufacturing equipment

Publications (1)

Publication Number Publication Date
KR970017987A true KR970017987A (en) 1997-04-30

Family

ID=66615421

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950032968A KR970017987A (en) 1995-09-29 1995-09-29 Gas supply of semiconductor manufacturing equipment

Country Status (1)

Country Link
KR (1) KR970017987A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100517806B1 (en) * 2001-08-14 2005-09-29 주식회사 우일하이테크 Apparatus for automatic supply chemical of semiconductor equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100517806B1 (en) * 2001-08-14 2005-09-29 주식회사 우일하이테크 Apparatus for automatic supply chemical of semiconductor equipment

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