KR970019736U - 스테퍼장비의 이물질 검출장치 - Google Patents

스테퍼장비의 이물질 검출장치

Info

Publication number
KR970019736U
KR970019736U KR2019950029983U KR19950029983U KR970019736U KR 970019736 U KR970019736 U KR 970019736U KR 2019950029983 U KR2019950029983 U KR 2019950029983U KR 19950029983 U KR19950029983 U KR 19950029983U KR 970019736 U KR970019736 U KR 970019736U
Authority
KR
South Korea
Prior art keywords
detection device
foreign material
material detection
stepper equipment
stepper
Prior art date
Application number
KR2019950029983U
Other languages
English (en)
Other versions
KR200231853Y1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950029983U priority Critical patent/KR200231853Y1/ko
Publication of KR970019736U publication Critical patent/KR970019736U/ko
Application granted granted Critical
Publication of KR200231853Y1 publication Critical patent/KR200231853Y1/ko

Links

KR2019950029983U 1995-10-24 1995-10-24 스테퍼장비의이물질검출장치 KR200231853Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950029983U KR200231853Y1 (ko) 1995-10-24 1995-10-24 스테퍼장비의이물질검출장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950029983U KR200231853Y1 (ko) 1995-10-24 1995-10-24 스테퍼장비의이물질검출장치

Publications (2)

Publication Number Publication Date
KR970019736U true KR970019736U (ko) 1997-05-26
KR200231853Y1 KR200231853Y1 (ko) 2001-10-25

Family

ID=60902888

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950029983U KR200231853Y1 (ko) 1995-10-24 1995-10-24 스테퍼장비의이물질검출장치

Country Status (1)

Country Link
KR (1) KR200231853Y1 (ko)

Also Published As

Publication number Publication date
KR200231853Y1 (ko) 2001-10-25

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