KR970009102B1 - Capacitor manufacturing method for mosfet - Google Patents
Capacitor manufacturing method for mosfet Download PDFInfo
- Publication number
- KR970009102B1 KR970009102B1 KR93015802A KR930015802A KR970009102B1 KR 970009102 B1 KR970009102 B1 KR 970009102B1 KR 93015802 A KR93015802 A KR 93015802A KR 930015802 A KR930015802 A KR 930015802A KR 970009102 B1 KR970009102 B1 KR 970009102B1
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- storage node
- forming
- sog
- mosfet
- Prior art date
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- Semiconductor Integrated Circuits (AREA)
Abstract
A fabrication method of capacitor suitable for high density MOSFET using multi-layer capacitor is disclosed. The method comprises the steps of: forming a first polysilicon storage node(15a) and depositing SOG(spin on glass) layer(20) for flattening; forming a second polysilicon storage node(15b) on the semi-finished structure; forming multi-layer storage node(15) by etching the second storage node(15b), the SOG layer(20) and the first storage node(15a) and removing the exposed SOG layer(20); and forming a dielectric layer(17) of N-O or O-N-O structure and forming plate polysilicon electrode(18). Thereby, it is possible to increase the capacitance using the multi-layer storage node pattern.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR93015802A KR970009102B1 (en) | 1993-08-16 | 1993-08-16 | Capacitor manufacturing method for mosfet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR93015802A KR970009102B1 (en) | 1993-08-16 | 1993-08-16 | Capacitor manufacturing method for mosfet |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970009102B1 true KR970009102B1 (en) | 1997-06-05 |
Family
ID=19361310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR93015802A KR970009102B1 (en) | 1993-08-16 | 1993-08-16 | Capacitor manufacturing method for mosfet |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970009102B1 (en) |
-
1993
- 1993-08-16 KR KR93015802A patent/KR970009102B1/en not_active IP Right Cessation
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