KR970007495A - Coating device used for manufacturing semiconductor device - Google Patents
Coating device used for manufacturing semiconductor device Download PDFInfo
- Publication number
- KR970007495A KR970007495A KR1019950023160A KR19950023160A KR970007495A KR 970007495 A KR970007495 A KR 970007495A KR 1019950023160 A KR1019950023160 A KR 1019950023160A KR 19950023160 A KR19950023160 A KR 19950023160A KR 970007495 A KR970007495 A KR 970007495A
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- coating apparatus
- photosensitive liquid
- manufacturing semiconductor
- organic material
- Prior art date
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- Coating Apparatus (AREA)
Abstract
복수개의 토출부를 갖는 도포장치에 관하여 개시한다. 본 발명은 웨이퍼가 놓이는 진공척과 감광액 또는 유기물을 토출하는 토출부로 구성된 도포장치에 있어서, 상기 토출부는 복수개 마련되어 있다. 본 발명의 도포장치는 넓어진 웨이퍼 면적에 대해 많은 양의 감광액 또는 유기물을 도포하기 위하여 종래의 1개의 토출부(nowwle) 대신에 다수개의 토출부를 설치하기 때문에 충분한 양의 감광액 또는 유기물을 웨이퍼 위에 고루 덮어 주어 도포 균일도를 확보할 수 있다.A coating apparatus having a plurality of discharge portions is disclosed. The present invention is a coating apparatus comprising a vacuum chuck on which a wafer is placed and a discharge portion for discharging a photosensitive liquid or organic material, wherein the plurality of discharge portions is provided. The coating apparatus of the present invention covers a sufficient amount of the photosensitive liquid or organic material on the wafer because a plurality of the ejecting portions are provided instead of a conventional one for the application of a large amount of the photosensitive liquid or organic substance over a wider wafer area. The application uniformity can be ensured.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 본 발명에 의한 도포장치이다.2 is a coating apparatus according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950023160A KR970007495A (en) | 1995-07-31 | 1995-07-31 | Coating device used for manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950023160A KR970007495A (en) | 1995-07-31 | 1995-07-31 | Coating device used for manufacturing semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970007495A true KR970007495A (en) | 1997-02-21 |
Family
ID=66541756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950023160A KR970007495A (en) | 1995-07-31 | 1995-07-31 | Coating device used for manufacturing semiconductor device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970007495A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190080029A (en) | 2017-12-28 | 2019-07-08 | 손태창 | Apparatus for generating multicolor flame |
-
1995
- 1995-07-31 KR KR1019950023160A patent/KR970007495A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190080029A (en) | 2017-12-28 | 2019-07-08 | 손태창 | Apparatus for generating multicolor flame |
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Legal Events
Date | Code | Title | Description |
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WITN | Withdrawal due to no request for examination |