KR970007495A - Coating device used for manufacturing semiconductor device - Google Patents

Coating device used for manufacturing semiconductor device Download PDF

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Publication number
KR970007495A
KR970007495A KR1019950023160A KR19950023160A KR970007495A KR 970007495 A KR970007495 A KR 970007495A KR 1019950023160 A KR1019950023160 A KR 1019950023160A KR 19950023160 A KR19950023160 A KR 19950023160A KR 970007495 A KR970007495 A KR 970007495A
Authority
KR
South Korea
Prior art keywords
wafer
coating apparatus
photosensitive liquid
manufacturing semiconductor
organic material
Prior art date
Application number
KR1019950023160A
Other languages
Korean (ko)
Inventor
오석환
남정림
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950023160A priority Critical patent/KR970007495A/en
Publication of KR970007495A publication Critical patent/KR970007495A/en

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  • Coating Apparatus (AREA)

Abstract

복수개의 토출부를 갖는 도포장치에 관하여 개시한다. 본 발명은 웨이퍼가 놓이는 진공척과 감광액 또는 유기물을 토출하는 토출부로 구성된 도포장치에 있어서, 상기 토출부는 복수개 마련되어 있다. 본 발명의 도포장치는 넓어진 웨이퍼 면적에 대해 많은 양의 감광액 또는 유기물을 도포하기 위하여 종래의 1개의 토출부(nowwle) 대신에 다수개의 토출부를 설치하기 때문에 충분한 양의 감광액 또는 유기물을 웨이퍼 위에 고루 덮어 주어 도포 균일도를 확보할 수 있다.A coating apparatus having a plurality of discharge portions is disclosed. The present invention is a coating apparatus comprising a vacuum chuck on which a wafer is placed and a discharge portion for discharging a photosensitive liquid or organic material, wherein the plurality of discharge portions is provided. The coating apparatus of the present invention covers a sufficient amount of the photosensitive liquid or organic material on the wafer because a plurality of the ejecting portions are provided instead of a conventional one for the application of a large amount of the photosensitive liquid or organic substance over a wider wafer area. The application uniformity can be ensured.

Description

반도체 소자의 제조에 사용되는 도포장치Coating device used for manufacturing semiconductor device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도는 본 발명에 의한 도포장치이다.2 is a coating apparatus according to the present invention.

Claims (2)

웨이퍼가 놓이는 진공척과 감광액 또는 유기물을 토출하는 토출부로 구성된 도포장치에 있어서, 상기 토출부는 복수개 마련되어 있는 것을 특징으로 하는 도포장치.A coating device comprising a vacuum chuck on which a wafer is placed and a discharge part for discharging a photosensitive liquid or organic material, wherein the plurality of discharge parts are provided. 제1항에에 있어서, 상기 웨이퍼는 직경이 10인치 이상인 것을 특징으로 하는 도포장치.The coating apparatus according to claim 1, wherein the wafer has a diameter of 10 inches or more. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950023160A 1995-07-31 1995-07-31 Coating device used for manufacturing semiconductor device KR970007495A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950023160A KR970007495A (en) 1995-07-31 1995-07-31 Coating device used for manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950023160A KR970007495A (en) 1995-07-31 1995-07-31 Coating device used for manufacturing semiconductor device

Publications (1)

Publication Number Publication Date
KR970007495A true KR970007495A (en) 1997-02-21

Family

ID=66541756

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950023160A KR970007495A (en) 1995-07-31 1995-07-31 Coating device used for manufacturing semiconductor device

Country Status (1)

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KR (1) KR970007495A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190080029A (en) 2017-12-28 2019-07-08 손태창 Apparatus for generating multicolor flame

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190080029A (en) 2017-12-28 2019-07-08 손태창 Apparatus for generating multicolor flame

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