KR970006680B1 - Method for manufacturing mirror for projection type of image display - Google Patents

Abstract

A method for making a mirror used in a projection type of image display system. First, a groove(23) is made at one side of a mirror plate and a projecting part is formed with same size of the mirror pattern. And then, a separation layer(27) is made at the surface of the projecting part. Thereafter, a first, a second and a third metal layers(29,31,33) to be served as the body of the mirror are formed at the surface of the separation layer. Adhesives is pasted at the tower surface of actuated array and the third metal layer is sticked. And then, the separation layer is removed and the glass plate is separated from the first metal layer. A fourth metal layer(39) to be served as a reflection surface is formed at the surface of the first layer.

Description

Manufacturing method of mirror for projection image display device

1A to 1D are manufacturing process diagrams of a mirror for a projection type image display device according to the prior art.

2A to 2C are manufacturing process diagrams of a mirror for a projection type image display device according to the present invention.

* Explanation of symbols for main parts of the drawings

21: glass substrate 23: groove

25: protrusion 27: separation layer

29, 31, 33; First, second and third metal layers

35: tower 37: actuator array

39: fourth metal layer

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a mirror for a projection type image display device, and more particularly, to a method of simply manufacturing a mirror using a glass substrate on which mirror patterns are formed without photolithography processing.

An image display apparatus is classified into a direct view type image display apparatus and a projection type image display apparatus according to a display method. The direct view type image display device includes a CRT (Cathod Ray Tube), but such a CRT image display device has good image quality, but there are problems such as an increase in weight and thickness as the screen is enlarged and a high price. have. Projection type image display apparatuses include a large screen liquid crystal display (hereinafter, referred to as an LCD). Such a large screen LCD can be thinned to reduce weight. However, such an LCD has a high light loss due to a polarizing plate and a thin film transistor for driving the LCD is formed for each pixel, so that there is a limit in increasing the aperture ratio (light transmission area).

Accordingly, a projection type image display apparatus using Actuated Mirror Arrays (hereinafter referred to as AMA) has been developed by Aura, USA. The AMA adjusts the amount of light that is incident from the lamp and reflected through each mirror to pass through the slit gap, as disclosed in US Pat. Nos. 429,987 and 448,748. The mirror controls the paths of light in relation to the gap in the slit, which is driven by an actuator that changes in proportion to the voltage applied. Since the mirrors must totally reflect the red, green, and blue light separated by the white light, each mirror should be installed one by one on the top of each actuator, and the surface should be very flat. It should be small and light.

1A to 1D are manufacturing process diagrams of a mirror for a projection type image display device according to the prior art.

Referring to FIG. 1A, the separation layer 3, the first metal layer 5, the second metal layer 6, and the third metal layer 7 are sequentially formed on the surface of the organic substrate 1. The separation layer 3 is formed of a photoresist or the like and facilitates separation of the glass substrate 1 and the first metal layer 5.

The first metal layer 50 serves as a reflecting surface of the mirror and is formed by sputtering or vacuum evaporation with aluminum (A1) having a high reflectance, etc. The second and third metal layers 6 and 7 are formed of, It is formed by the same method as the first metal layer 5. In the above, the second metal layer 6 is made of copper (Cu) or the like to improve the bonding force between the first metal layer 5 and the third metal layer 7. The third metal layer 7 is made of nickel (Ni) or the like.

Referring to FIG. 1B, the size of the mirror is limited by exposing the separation layer 3 of a predetermined portion by a conventional photolithography method, and the photoresist is formed on a portion except the upper portion of the third metal layer 7. The pattern 11 is formed. The photoresist pattern 11 is formed of the same material as that of the separation layer 3 so that predetermined moisture on the surface of the third metal layer 7 overlaps.

Referring to FIG. 1C, the fourth metal layer 13 is formed on the exposed surface of the third metal layer 7 using the photoresist pattern 11 as a mask, and an actuator (above the upper portion of the fourth metal layer 13). 15) Attach. In the above, the fourth metal layer 13 is for controlling the thickness of the mirror, and is formed by electroplating with the same material as the third metal layer 7. The fourth metal layer 13 and the actuator 15 are attached by an adhesive.

Referring to FIG. 1D, the substrate 1 and the first metal layer 3 are separated by removing the photoresist pattern 11 and the separation layer 3. The photoresist pattern 11 and the separation layer 3 are formed of the same material and removed by the same organic solvent.

As described above, the conventional mirror for a projection type image display device applies a separation layer on the surface of a glass substrate, and sequentially stacks the first, second and third metal layers on top of the separation layer, and applies the photolithography method. By exposing a predetermined portion of the separation layer, a fourth metal layer is formed on the third metal layer, an actuator is attached to the upper surface of the fourth metal layer, and the separation layer is removed to remove the organic substrate from the first metal layer. It is manufactured separately.

However, the above-described conventional mirrors for projection type image display apparatuses are formed by patterning a plurality of deposited metal layers by photolithography, and thus, the manufacturing process is complicated, and the parts forming the mirrors are damaged when being eaten. .

Accordingly, it is an object of the present invention to provide a method for producing a mirror simply without patterning a plurality of deposited metal layers by a photolithography process.

It is still another object of the present invention to provide a method of manufacturing mirrors for a projection type image display device which can prevent the metals of the portions constituting the mirrors from being damaged.

Method of manufacturing a mirror for a projection image display device according to the present invention for achieving the above object is a method for manufacturing a mirror in the towers of the actuator array, by digging grooves on one surface of the organic substrate of the same size as the mirror pattern Forming protrusions, depositing a separation layer on the surfaces of the protrusions, and sequentially forming first, second and third metal layers when used as a mirror body on the surface of the separation layer; Applying an adhesive to the tower surface of the actuator array and attaching a third metal layer; removing the separation layer to separate the organic substrate from the first metal layer; and using a reflective surface on the exposed surface of the first metal layer. And forming a fourth metal layer to be formed.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

2A to 2B are manufacturing process diagrams of a mirror for a projection type image display device according to an embodiment of the present invention.

Referring to FIG. 2A, one surface of the optical organic substrate 21 having good flatness is about 7 to 12 μm in width by a laser cutting method or a photolithography method using wet etching. Grooves 23 having a thickness of about 17 μm are formed. At this time, the remaining portion in which the grooves 23 are formed becomes a protrusion 25, and the protrusion 25 has the same size as the mirror pattern and is formed to have a width of about 150 to 200 μm. Although the process of forming the protrusions 25 by digging the grooves 23 on one surface of the organic substrate 21 is shown, since the glass substrate 21 processed as described above can be used several times, the protrusions 25 are formed. The process of making it can be skipped.

Referring to FIG. 2B, the separation layers 27, the first, second and third metal collisions 29, 31, and 33 may be formed on the surfaces of the protrusions 25 by an electron beam, vacuum deposition, or sputtering. ) Are formed sequentially. The separation layer 27 is formed of a material that is dissolved in water such as NaCl and has a thickness of about 2000 to about 4000 kPa. In addition, the first metal layer 29 is gold (Au) or platinum (Pt) platinum stable to the salt (Cl) component of the NaCl forming the separation layer 27, the thickness of about 2000 to 4000 kPa, the second metal layer 31 is It has a thickness of the mirrors to be formed and is inexpensive and has a high bonding strength of silver (Ag), copper (Cu), or chromium (Cr) with gold or platinum forming the first metal layer 29. Is formed. The third metal layer 330 is formed of a material forming the first metal layer 29 to prevent stress of the second metal layer 31. The third metal layer 330 has a thickness of about 1500 to 3000 kPa. When the third metal layers 29, 31, and 33 are formed, the grooves 23 are deep enough so that those formed in the grooves 23 do not fill all of the grooves 23 so that the protrusions 25 may be formed. It is not in contact with those formed on top.

Referring to FIG. 2C, a non-conductive adhesive is applied to the upper surface of the towers 35 of the actuator array 37 formed by a conventional method, such as by dipping. Next, the towers 35 and the third metal layers 33 are attached to each other, and then the adhesive is solidified. Then, the glass substrate 21 is separated by melting the separation layer 27 between the first metal layers 27 and the protrusions 25 with deionized water. In the above, the first, second and third metal layers 29, 31, 33 are the body of the mirror. Next, a metal having good reflective properties such as A1 is deposited on the exposed surface of the first metal layer 29 in the same manner as the first, second and third metal layers 29, 31, and 33. The fourth metal layer 39 is formed to a thickness of about 1500Å to about 1500Å to complete the mirrors.

The fourth metal layer 39 is used as the reflecting surface because it has better reflection characteristics than the first metal layer 29.

Separation layer, first, second and third metal layers are formed on the surface of the projections of the glass substrate which has been processed and used as described above, or forming the projections having the sizes of the grooved mirror patterns in the organic substrate as described above. After depositing the third metal layers by adhesive to the towers of the actuator array and then attaching the third metal layer by adhesive to the towers of the actuator array. Then, the separation layer is removed by deionized water to separate the first metal layer and the glass substrate, and then, on the exposed surface of the first metal layer, a fourth metal layer to be used as a reflection surface with Al having good reflection characteristics is deposited.

Accordingly, the present invention is formed by the deposition of protrusions of the glass substrate having the size of the mirror pattern without photolithography of the bodies of the mirrors made of a plurality of metal layers, the manufacturing is simple and can prevent damage to the parts of the body There is an advantage to that.

As described above, the present invention has been described and illustrated with reference to preferred embodiments, but it will be apparent to those skilled in the art that various modifications may be made without departing from the spirit and scope of the invention.

Claims (6)

A method of manufacturing mirrors in towers of an actuator array, the method comprising: digging grooves in one surface of a glass engine to form protrusions having the same size as mirror patterns, depositing a separation layer on the surfaces of the protrusions; Sequentially forming first, second and third metal layers to be used as a mirror body on the surface of the separation layer, applying an adhesive to the tower surface of the actuator array and attaching a third metal layer to the separation layer; Removing the layer to separate the organic substrate from the first metal layer, and forming a fourth metal layer to be used as a reflective surface on the exposed surface of the first metal layer. The method of manufacturing a mirror for a projection image display device according to claim 1, wherein the flaws of the glass substrate are formed by a photolithography method using cutting or wet etching with a laser. The method of manufacturing a mirror for a projection type image display device according to claim 1, wherein the first metal layer is formed of gold or platinum. The method of manufacturing a mirror for a projection image display device according to claim 4, wherein the second metal layer is formed of silver, copper, or chromium. 5. A method according to claim 4, wherein the third metal layer is formed of the same material as the first metal layer. The method of manufacturing a mirror for a projection type image display device according to claim 1, wherein the fourth metal layer is formed of aluminum or the like having good reflection characteristics.