KR960013737B1 - Mirror manufacturing method of projector-typed image display apparatus - Google Patents

Abstract

forming a separating layer(3) on the surface of a glass substrate(1); forming a first, a second and a third metal layer(5,6,7) on top of the separating layer(3) by separating each other; forming a photoresist pattern(11) on the interval(9) of the metal layers; forming a forth metal layer(13) on the revealed third metal layer(7); and attaching an actuator(15) on top of the forth metal layer(13) and separating the glass substrate(1) from the first metal layer(5).

Description

Mirror manufacturing method of projection image display device

1 (a) to (d) are manufacturing process diagrams of a mirror of a projection image display apparatus according to the present invention.

* Explanation of symbols for main parts of the drawings

1: glass substrate 3: separation layer

5: first metal layer 6: second metal layer

7: third metal layer 9: spacing

11: photoresist pattern 13: fourth metal layer

15: actuator

The present invention relates to a method of manufacturing a mirror of a projection type image display device having an actuated mirror array.

An image display apparatus is classified into a direct view type image display apparatus and a projection type image display apparatus according to a display method. The direct view type image display apparatus includes a CRT (Cathod Ray Tube), but such a CRT image display apparatus has good image quality but has a problem such as an increase in weight and thickness as the screen is enlarged, and a price is expensive. There is. Projection type image display apparatuses include a large screen liquid crystal display (hereinafter referred to as an LCD), and such large screen LCDs can be thinned to reduce weight. However, the LCD has a high light loss due to the polarizing plate, and a thin film transistor for driving the LCD is formed for each pixel, so that there is a limit in increasing the aperture ratio (light transmission area).

Accordingly, a projection type image display apparatus using Actuated Mirror Arrays (hereinafter referred to as AMA) has been developed by Aura, USA. The AMA adjusts the amount of light that is incident from the lamp to be reflected from each mirror and passes through the slit gap, as disclosed in US Pat. Nos. 429,987 and 448,748. It controls the paths of the associated Harl light, driven by an actuator that changes in proportion to the voltage applied.

Since the mirror must totally reflect red, green, and blue light separated from the white light, it should be installed at the top of each actuator, and should be very flat. For the miniaturization of AMA, the size of the mirror attached to each actuator should be very small and light. do.

However, in order to display a screen, a plurality of actuators corresponding to pixels are required, and it is difficult to form one mirror with a flat surface on each of the plurality of actuators.

Accordingly, an object of the present invention is to provide a mirror manufacturing method of a projection type image display apparatus which can form mirrors on a plurality of actuators at the same time by a simple method.

In order to achieve the above object, the present invention provides a method of manufacturing a mirror of a projection type image display apparatus having an actuated mirror array, the process of forming a separation layer on the surface of the glass substrate, and spaced apart by an interval on the separation layer Forming a first, second, and third metal layer to be formed; forming a photoresist pattern on the inner surface of the gap; forming a fourth metal layer on the exposed third metal layer; And attaching an actuator to the upper portion of the fourth metal layer and separating the glass substrate from the first metal layer.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 (a) to (d) are manufacturing process diagrams of the mirror of the projection image display apparatus according to the present invention.

Referring to FIG. 1 (a), the separation layer 3 is formed on the surface of the glass substrate 1 by photoresist. The glass substrate 1 must have a flat surface to prevent diffuse reflection of the mirror, which is completed by the surface contacting the surface of the reflector, and also have high chemical resistance in order to be reused for manufacturing the mirror several times.

The separation layer 3 is intended to facilitate separation from the glass substrate 1 after completion of the mirror, and is formed thin and flat by the spincoating method. Then, the first metal layer 5 is formed on the separation layer 3 by sputtering or the like. The first metal layer 5 serves as a reflecting surface of the mirror, and forms platinum (Pt) having a high reflectance and low corrosiveness by an oxidation reaction or the like to a thickness of about 0.05 to 0.2 μm. Subsequently, second and third metal layers 6 and 7 are formed on the first metal layer 5. In the above, the second and third metal layers 6 and 7 are formed by sputtering and electroplating, respectively, and are formed of nickel (Ni) or the like which is easy to form a thickness during electroplating. In the above, the second metal layer 6 improves the bonding force between the first metal layer 5 and the third metal layer 7, and the third metal layer 7 grows correctly to form a desired thickness. In the above, the second metal layer 6 is formed to a thickness of about 0.05 to 0.02 μm, and the third metal layer 7 is formed to a thickness of about 3 to 7 μm.

Referring to FIG. 1 (b), the gap 9 is formed by a conventional photolitography method. The gap 9 is formed such that the separation layer 3 is exposed and defines the size of the mirror. In order to increase the light efficiency in the above, the size of the gap 9 should be reduced, and the size of about 3-7 μm is formed. Next, a photo resist pattern 11 is formed on the inner surface of the gap 9. The photoresist pattern 11 is formed by a general photo process, and is formed in the same manner as the separation layer 3 and overlaps with the width of the thickness of the two layers on the third metal layer 7.

Referring to FIG. 1C, the fourth metal layer 13 is formed by electroplating the exposed surface of the third metal layer 7 using the photoresist pattern 11 as a mask. The fourth metal layer 13 is formed of the same metal as the third metal layer 7 to a thickness of about 15 to 25 μm, and is not formed on the photoresist pattern 11. Next, an actuator 15 having a piezoelectric material or an electro-distorted material is attached to the fourth metal layer 13 using an adhesive.

Referring to FIG. 1 (d), the first metal 5 and the glass substrate 1 are separated. The first metal layer 5 and the glass substrate 1 may be separated by removing the separation layer 3 with an organic solvent. The first metal layer 5 attached to the glass substrate 1 via the separation layer 3 serves as a reflecting surface of the mirror, and the surface characteristics depend on the surface state of the glass substrate 1. When the isolation layer 3 is removed, the photoresist pattern 11 is also removed.

After forming the separation layer, the first, the second and the third metal layer on the glass substrate as described above, by etching a predetermined portion in a conventional manner to form a gap, after forming a photoresist pattern on the inner surface of the gap A mirror is formed by forming a fourth metal layer on the exposed third metal layer, attaching an actuator to the top of the fourth metal layer, and then removing the glass substrate.

Thus, the present invention can simultaneously form a mirror in each actuator in a simple manner.

Claims (7)

A method of manufacturing a mirror of a projection type image display device having an actuated mirror array, the method comprising: forming a separation layer on a surface of a glass substrate; first, second, and first spaced apart intervals on the separation layer. Forming a third metal layer, forming a photoresist pattern on the inner surface of the gap, forming a fourth metal layer on the exposed surface of the third metal layer, and an actuator on top of the fourth metal layer. Attaching and separating a glass substrate from the first metal layer. The manufacturing method of a projection type image display device according to claim 1, wherein the separation layer is formed by rotating coating with a photoresist. The manufacturing method of a projection type image display device according to claim 1, wherein the first metal layer is formed by sputtering platinum or the like. The manufacturing method of a projection type image display device according to claim 1, wherein the second metal layer is formed by sputtering nickel or the like. The method of claim 1, wherein the third metal layer is formed by electroplating the same material as the second metal layer. The method of claim 1, wherein the fourth metal layer is formed by electroplating the same material as the second metal layer. The method of claim 1, wherein the separation layer is removed to separate a glass substrate from the first metal layer.