KR970004001A - 실리콘-온-인슐레이터(soi) 구조를 이용한 캐패시터 및 그 제조방법 - Google Patents
실리콘-온-인슐레이터(soi) 구조를 이용한 캐패시터 및 그 제조방법 Download PDFInfo
- Publication number
- KR970004001A KR970004001A KR1019950019035A KR19950019035A KR970004001A KR 970004001 A KR970004001 A KR 970004001A KR 1019950019035 A KR1019950019035 A KR 1019950019035A KR 19950019035 A KR19950019035 A KR 19950019035A KR 970004001 A KR970004001 A KR 970004001A
- Authority
- KR
- South Korea
- Prior art keywords
- soi
- insulator
- capacitor
- silicon
- manufacturing
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title 1
- 239000012212 insulator Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
- H10B12/373—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate the capacitor extending under or around the transistor
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950019035A KR0151070B1 (ko) | 1995-06-30 | 1995-06-30 | 실리콘-온-인슐레이터 구조를 이용한 캐패시터 및 그 제조방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950019035A KR0151070B1 (ko) | 1995-06-30 | 1995-06-30 | 실리콘-온-인슐레이터 구조를 이용한 캐패시터 및 그 제조방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR970004001A true KR970004001A (ko) | 1997-01-29 |
| KR0151070B1 KR0151070B1 (ko) | 1998-10-01 |
Family
ID=19419432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019950019035A KR0151070B1 (ko) | 1995-06-30 | 1995-06-30 | 실리콘-온-인슐레이터 구조를 이용한 캐패시터 및 그 제조방법 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR0151070B1 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200097433A (ko) | 2019-02-08 | 2020-08-19 | 현대자동차주식회사 | 차량의 클러스터 검사 장치 및 그 방법 |
-
1995
- 1995-06-30 KR KR1019950019035A patent/KR0151070B1/ko not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200097433A (ko) | 2019-02-08 | 2020-08-19 | 현대자동차주식회사 | 차량의 클러스터 검사 장치 및 그 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR0151070B1 (ko) | 1998-10-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| FPAY | Annual fee payment |
Payment date: 20090615 Year of fee payment: 12 |
|
| LAPS | Lapse due to unpaid annual fee |