KR970003787B1 - 가연성 감속제의 스푸터링코팅 - Google Patents

가연성 감속제의 스푸터링코팅 Download PDF

Info

Publication number
KR970003787B1
KR970003787B1 KR1019930005252A KR930005252A KR970003787B1 KR 970003787 B1 KR970003787 B1 KR 970003787B1 KR 1019930005252 A KR1019930005252 A KR 1019930005252A KR 930005252 A KR930005252 A KR 930005252A KR 970003787 B1 KR970003787 B1 KR 970003787B1
Authority
KR
South Korea
Prior art keywords
tube
coating
cladding
combustible
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1019930005252A
Other languages
English (en)
Korean (ko)
Other versions
KR940004658A (ko
Inventor
제이. 브라이언 윌리암
에이. 페로티 패트릭
Original Assignee
컴버스쳔 엔지니어링 인코포레이티드
로버트 에스. 벨 2세
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 컴버스쳔 엔지니어링 인코포레이티드, 로버트 에스. 벨 2세 filed Critical 컴버스쳔 엔지니어링 인코포레이티드
Publication of KR940004658A publication Critical patent/KR940004658A/ko
Application granted granted Critical
Publication of KR970003787B1 publication Critical patent/KR970003787B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21C—NUCLEAR REACTORS
    • G21C3/00—Reactor fuel elements and their assemblies; Selection of substances for use as reactor fuel elements
    • G21C3/02—Fuel elements
    • G21C3/04—Constructional details
    • G21C3/16—Details of the construction within the casing
    • G21C3/20—Details of the construction within the casing with coating on fuel or on inside of casing; with non-active interlayer between casing and active material with multiple casings or multiple active layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels
    • H01J2237/162—Open vessel, i.e. one end sealed by object or workpiece
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/30—Nuclear fission reactors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
KR1019930005252A 1992-08-03 1993-03-31 가연성 감속제의 스푸터링코팅 Expired - Lifetime KR970003787B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/924,731 US5272735A (en) 1992-08-03 1992-08-03 Sputtering process burnable poison coating
US924,731 1992-08-03

Publications (2)

Publication Number Publication Date
KR940004658A KR940004658A (ko) 1994-03-15
KR970003787B1 true KR970003787B1 (ko) 1997-03-21

Family

ID=25450632

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930005252A Expired - Lifetime KR970003787B1 (ko) 1992-08-03 1993-03-31 가연성 감속제의 스푸터링코팅

Country Status (3)

Country Link
US (1) US5272735A (enExample)
KR (1) KR970003787B1 (enExample)
TW (1) TW227057B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101497893B1 (ko) * 2013-12-26 2015-03-05 한국과학기술원 가연성흡수체를 포함하는 제어봉 안내관

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2705823B1 (fr) * 1993-05-26 1995-06-30 Commissariat Energie Atomique Matériau absorbant les neutrons et son procédé de fabrication.
DE69500531T2 (de) * 1994-01-31 1998-02-26 Nissin Electric Co Ltd Verfahren zur Herstellung einer Röhre mit einem Filmbelag auf der inneren peripheren Oberfläche und Vorrichtung zu seiner Herstellung
US5733418A (en) * 1996-05-07 1998-03-31 Pld Advanced Automation Systems, Inc. Sputtering method and apparatus
US7052736B2 (en) * 2002-06-11 2006-05-30 Southwest Research Institute Method for depositing coatings on the interior surfaces of tubular structures
US7351480B2 (en) * 2002-06-11 2008-04-01 Southwest Research Institute Tubular structures with coated interior surfaces
US20050281958A1 (en) * 2004-06-22 2005-12-22 Walton Scott G Electron beam enhanced nitriding system (EBENS)
US7520965B2 (en) * 2004-10-12 2009-04-21 Southwest Research Institute Magnetron sputtering apparatus and method for depositing a coating using same
US7790003B2 (en) * 2004-10-12 2010-09-07 Southwest Research Institute Method for magnetron sputter deposition
US7592051B2 (en) * 2005-02-09 2009-09-22 Southwest Research Institute Nanostructured low-Cr Cu-Cr coatings for high temperature oxidation resistance
US7815964B2 (en) * 2007-03-29 2010-10-19 Westinghouse Electric Co Llc Method of applying a burnable poison onto the exterior of nuclear rod cladding
DK2251454T3 (da) 2009-05-13 2014-10-13 Sio2 Medical Products Inc Coating og inspektion af beholder
WO2013170052A1 (en) 2012-05-09 2013-11-14 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US20120312233A1 (en) * 2011-06-10 2012-12-13 Ge Yi Magnetically Enhanced Thin Film Coating Method and Apparatus
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
EP2776603B1 (en) 2011-11-11 2019-03-06 SiO2 Medical Products, Inc. PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS
US20150297800A1 (en) 2012-07-03 2015-10-22 Sio2 Medical Products, Inc. SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS
CA2890066C (en) 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Coating inspection method
EP2920567B1 (en) 2012-11-16 2020-08-19 SiO2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
WO2014085348A2 (en) 2012-11-30 2014-06-05 Sio2 Medical Products, Inc. Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
EP4234753A3 (en) 2013-03-11 2023-11-01 SiO2 Medical Products, Inc. Coated packaging
EP2971227B1 (en) 2013-03-15 2017-11-15 Si02 Medical Products, Inc. Coating method.
EP3122917B1 (en) 2014-03-28 2020-05-06 SiO2 Medical Products, Inc. Antistatic coatings for plastic vessels
US9765424B2 (en) 2015-02-25 2017-09-19 Engineering And Software System Solutions, Inc. Method of refurbishing high value articles
CA2995225C (en) 2015-08-18 2023-08-29 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
WO2019038811A1 (ja) * 2017-08-21 2019-02-28 堺ディスプレイプロダクト株式会社 蒸着装置、蒸着方法及び有機ｅｌ表示装置の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE13561T1 (de) * 1980-08-08 1985-06-15 Battelle Development Corp Zylindrische magnetron-zerstaeuberkathode.
US4400256A (en) * 1981-12-18 1983-08-23 Riley Leon H Method of making layered semiconductor laser
US4376025A (en) * 1982-06-14 1983-03-08 Battelle Development Corporation Cylindrical cathode for magnetically-enhanced sputtering
US4541984A (en) * 1982-09-29 1985-09-17 Combustion Engineering, Inc. Getter-lubricant coating for nuclear fuel elements
US4683043A (en) * 1986-01-21 1987-07-28 Battelle Development Corporation Cubic boron nitride preparation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101497893B1 (ko) * 2013-12-26 2015-03-05 한국과학기술원 가연성흡수체를 포함하는 제어봉 안내관

Also Published As

Publication number Publication date
TW227057B (enExample) 1994-07-21
KR940004658A (ko) 1994-03-15
US5272735A (en) 1993-12-21

Similar Documents

Publication Publication Date Title
KR970003787B1 (ko) 가연성 감속제의 스푸터링코팅
US4149931A (en) Divertor for use in fusion reactors
Bagryansky et al. Gas dynamic trap as high power 14 MeV neutron source
RU2280966C2 (ru) Устройство расщепления для создания нейтронов
US4065351A (en) Particle beam injection system
CN105575445B (zh) 用于产生医用同位素的装置和方法
US20230085966A1 (en) Method, apparatus, device and system for the generation of electricity
EP1642301A2 (en) Fusion apparatus and methods
Olson et al. Indirect-drive ICF target concepts for the X-1 z-pinch facility
WO2002027730A1 (en) Method and device for heating gas from a thin layer of nuclear fuel, and space engine using such method
US5301211A (en) Fuel assembly sputtering process
Blinnikov et al. A mini-supernova model for optical afterglows of gamma-ray bursts
KR910007922B1 (ko) 환상 가연성 흡수체봉
WO1995026426A1 (en) Method and apparatus for coating inside surface of nuclear fuel rod cladding tubes
Moir et al. Axisymmetric magnetic mirror fusion-fission hybrid
Harada et al. A honeycomb sandwich structure vacuum jacket for cryogenic targets
US20250322971A1 (en) Tailoring the Pushing Profile of an ICF Target with a Dense Propellant Region
Bock et al. 10 Inertial confinement fusion: heavy ions
Dahm et al. Electro-produced slow positrons
Bock et al. HIBALL-a conceptual design study on a commercial size heavy ion beam fusion electrical power plant
Delettrez et al. Time decay of electric fields probed by charged reaction products in six-beam symmetrical implosion experiments
CA2368547A1 (en) A neutron amplifier assembly
Andreani et al. Positron converter for the Frascati linear accelerator
Green et al. Accelerator & Fusion Research Division
Miley et al. An ICF Reactor Concept Using 3He-AFLINT Targets

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19930331

PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 19930331

Comment text: Request for Examination of Application

PG1501 Laying open of application
G160 Decision to publish patent application
PG1605 Publication of application before grant of patent

Comment text: Decision on Publication of Application

Patent event code: PG16051S01I

Patent event date: 19970220

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 19970605

NORF Unpaid initial registration fee
PC1904 Unpaid initial registration fee