TW227057B - - Google Patents
Info
- Publication number
- TW227057B TW227057B TW081109581A TW81109581A TW227057B TW 227057 B TW227057 B TW 227057B TW 081109581 A TW081109581 A TW 081109581A TW 81109581 A TW81109581 A TW 81109581A TW 227057 B TW227057 B TW 227057B
- Authority
- TW
- Taiwan
Links
Classifications
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21C—NUCLEAR REACTORS
- G21C3/00—Reactor fuel elements and their assemblies; Selection of substances for use as reactor fuel elements
- G21C3/02—Fuel elements
- G21C3/04—Constructional details
- G21C3/16—Details of the construction within the casing
- G21C3/20—Details of the construction within the casing with coating on fuel or on inside of casing; with non-active interlayer between casing and active material with multiple casings or multiple active layers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/16—Vessels
- H01J2237/162—Open vessel, i.e. one end sealed by object or workpiece
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/924,731 US5272735A (en) | 1992-08-03 | 1992-08-03 | Sputtering process burnable poison coating |
Publications (1)
Publication Number | Publication Date |
---|---|
TW227057B true TW227057B (zh) | 1994-07-21 |
Family
ID=25450632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW081109581A TW227057B (zh) | 1992-08-03 | 1992-11-30 |
Country Status (3)
Country | Link |
---|---|
US (1) | US5272735A (zh) |
KR (1) | KR970003787B1 (zh) |
TW (1) | TW227057B (zh) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2705823B1 (fr) * | 1993-05-26 | 1995-06-30 | Commissariat Energie Atomique | Matériau absorbant les neutrons et son procédé de fabrication. |
EP0665304B1 (en) * | 1994-01-31 | 1997-08-13 | Nissin Electric Company, Limited | Method of manufacturing a tube having a film on its inner peripheral surface and apparatus for manufacturing the same |
US5733418A (en) * | 1996-05-07 | 1998-03-31 | Pld Advanced Automation Systems, Inc. | Sputtering method and apparatus |
US7351480B2 (en) * | 2002-06-11 | 2008-04-01 | Southwest Research Institute | Tubular structures with coated interior surfaces |
US7052736B2 (en) * | 2002-06-11 | 2006-05-30 | Southwest Research Institute | Method for depositing coatings on the interior surfaces of tubular structures |
US20050281958A1 (en) * | 2004-06-22 | 2005-12-22 | Walton Scott G | Electron beam enhanced nitriding system (EBENS) |
US7520965B2 (en) * | 2004-10-12 | 2009-04-21 | Southwest Research Institute | Magnetron sputtering apparatus and method for depositing a coating using same |
US7790003B2 (en) * | 2004-10-12 | 2010-09-07 | Southwest Research Institute | Method for magnetron sputter deposition |
US7592051B2 (en) * | 2005-02-09 | 2009-09-22 | Southwest Research Institute | Nanostructured low-Cr Cu-Cr coatings for high temperature oxidation resistance |
US7815964B2 (en) * | 2007-03-29 | 2010-10-19 | Westinghouse Electric Co Llc | Method of applying a burnable poison onto the exterior of nuclear rod cladding |
KR20120042748A (ko) | 2009-05-13 | 2012-05-03 | 씨브이 홀딩스 엘엘씨 | 코팅된 표면 검사를 위한 가스제거 방법 |
US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
US20120312233A1 (en) * | 2011-06-10 | 2012-12-13 | Ge Yi | Magnetically Enhanced Thin Film Coating Method and Apparatus |
JP6095678B2 (ja) | 2011-11-11 | 2017-03-15 | エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド | 薬剤パッケージ用の不動態化、pH保護又は滑性皮膜、被覆プロセス及び装置 |
US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
EP2846755A1 (en) | 2012-05-09 | 2015-03-18 | SiO2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
CA2890066C (en) | 2012-11-01 | 2021-11-09 | Sio2 Medical Products, Inc. | Coating inspection method |
EP2920567B1 (en) | 2012-11-16 | 2020-08-19 | SiO2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
WO2014085346A1 (en) | 2012-11-30 | 2014-06-05 | Sio2 Medical Products, Inc. | Hollow body with inside coating |
US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
EP2961858B1 (en) | 2013-03-01 | 2022-09-07 | Si02 Medical Products, Inc. | Coated syringe. |
US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
CA2904611C (en) | 2013-03-11 | 2021-11-23 | Sio2 Medical Products, Inc. | Coated packaging |
EP2971227B1 (en) | 2013-03-15 | 2017-11-15 | Si02 Medical Products, Inc. | Coating method. |
KR101497893B1 (ko) * | 2013-12-26 | 2015-03-05 | 한국과학기술원 | 가연성흡수체를 포함하는 제어봉 안내관 |
US11066745B2 (en) | 2014-03-28 | 2021-07-20 | Sio2 Medical Products, Inc. | Antistatic coatings for plastic vessels |
US9765424B2 (en) | 2015-02-25 | 2017-09-19 | Engineering And Software System Solutions, Inc. | Method of refurbishing high value articles |
CA2995225C (en) | 2015-08-18 | 2023-08-29 | Sio2 Medical Products, Inc. | Pharmaceutical and other packaging with low oxygen transmission rate |
WO2019038811A1 (ja) * | 2017-08-21 | 2019-02-28 | 堺ディスプレイプロダクト株式会社 | 蒸着装置、蒸着方法及び有機el表示装置の製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE13561T1 (de) * | 1980-08-08 | 1985-06-15 | Battelle Development Corp | Zylindrische magnetron-zerstaeuberkathode. |
US4400256A (en) * | 1981-12-18 | 1983-08-23 | Riley Leon H | Method of making layered semiconductor laser |
US4376025A (en) * | 1982-06-14 | 1983-03-08 | Battelle Development Corporation | Cylindrical cathode for magnetically-enhanced sputtering |
US4541984A (en) * | 1982-09-29 | 1985-09-17 | Combustion Engineering, Inc. | Getter-lubricant coating for nuclear fuel elements |
US4683043A (en) * | 1986-01-21 | 1987-07-28 | Battelle Development Corporation | Cubic boron nitride preparation |
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1992
- 1992-08-03 US US07/924,731 patent/US5272735A/en not_active Expired - Fee Related
- 1992-11-30 TW TW081109581A patent/TW227057B/zh active
-
1993
- 1993-03-31 KR KR1019930005252A patent/KR970003787B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
US5272735A (en) | 1993-12-21 |
KR940004658A (ko) | 1994-03-15 |
KR970003787B1 (ko) | 1997-03-21 |