KR970002480A - 투영 노광 장치 및 회로 기판의 노광 방법 - Google Patents
투영 노광 장치 및 회로 기판의 노광 방법 Download PDFInfo
- Publication number
- KR970002480A KR970002480A KR1019960011833A KR19960011833A KR970002480A KR 970002480 A KR970002480 A KR 970002480A KR 1019960011833 A KR1019960011833 A KR 1019960011833A KR 19960011833 A KR19960011833 A KR 19960011833A KR 970002480 A KR970002480 A KR 970002480A
- Authority
- KR
- South Korea
- Prior art keywords
- circuit board
- exposure apparatus
- projection
- exposure
- exposure method
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
- G03F9/7026—Focusing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
- G03F9/7034—Leveling
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16333595A JP3460131B2 (ja) | 1995-06-29 | 1995-06-29 | 投影露光装置 |
JP95-163335 | 1995-06-29 | ||
JP16672895A JP3520881B2 (ja) | 1995-07-03 | 1995-07-03 | 露光装置 |
JP95-166728 | 1995-07-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970002480A true KR970002480A (ko) | 1997-01-24 |
KR100206631B1 KR100206631B1 (ko) | 1999-07-01 |
Family
ID=26488799
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960011833A KR100206631B1 (ko) | 1995-06-29 | 1996-04-19 | 투영 노광 장치 및 회로 기판의 노광 방법 |
Country Status (2)
Country | Link |
---|---|
US (1) | USH1774H (ko) |
KR (1) | KR100206631B1 (ko) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6455214B1 (en) | 1997-03-24 | 2002-09-24 | Nikon Corporation | Scanning exposure method detecting focus during relative movement between energy beam and substrate |
WO1999039374A1 (fr) | 1998-01-29 | 1999-08-05 | Nikon Corporation | Procede d'exposition et dispositif associe |
WO2000001001A1 (fr) | 1998-06-29 | 2000-01-06 | Nikon Corporation | Procede d'exposition a un balayage, appareil d'exposition a un balayage et procede de production de ce dernier, et dispositif et procede de fabrication de ce dernier |
JP2000082651A (ja) * | 1998-09-04 | 2000-03-21 | Nec Corp | 走査露光装置及び走査露光方法 |
US7023521B2 (en) * | 1999-04-13 | 2006-04-04 | Nikon Corporation | Exposure apparatus, exposure method and process for producing device |
JP2001015420A (ja) * | 1999-06-30 | 2001-01-19 | Toshiba Corp | 半導体ウエハのパターン露光方法およびパターン露光装置 |
US7561270B2 (en) | 2000-08-24 | 2009-07-14 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and device manufactured thereby |
TW527526B (en) * | 2000-08-24 | 2003-04-11 | Asml Netherlands Bv | Lithographic apparatus, device manufacturing method, and device manufactured thereby |
US6278515B1 (en) | 2000-08-29 | 2001-08-21 | International Business Machines Corporation | Method and apparatus for adjusting a tilt of a lithography tool |
JP3652329B2 (ja) * | 2002-06-28 | 2005-05-25 | キヤノン株式会社 | 走査露光装置、走査露光方法、デバイス製造方法およびデバイス |
JP4474108B2 (ja) * | 2002-09-02 | 2010-06-02 | 株式会社 日立ディスプレイズ | 表示装置とその製造方法および製造装置 |
JP5197198B2 (ja) | 2008-07-04 | 2013-05-15 | キヤノン株式会社 | 結像光学系、露光装置、及びデバイス製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0727857B2 (ja) * | 1985-09-09 | 1995-03-29 | 株式会社ニコン | 投影光学装置 |
US4999699A (en) * | 1990-03-14 | 1991-03-12 | International Business Machines Corporation | Solder interconnection structure and process for making |
JP3271348B2 (ja) * | 1993-01-14 | 2002-04-02 | 株式会社ニコン | レベリング合わせ面計測方法及び露光装置 |
US5461237A (en) * | 1993-03-26 | 1995-10-24 | Nikon Corporation | Surface-position setting apparatus |
-
1996
- 1996-03-25 US US08/621,486 patent/USH1774H/en not_active Abandoned
- 1996-04-19 KR KR1019960011833A patent/KR100206631B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
USH1774H (en) | 1999-01-05 |
KR100206631B1 (ko) | 1999-07-01 |
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E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20070404 Year of fee payment: 9 |
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LAPS | Lapse due to unpaid annual fee |