KR960042995A - Scrubber Washer - Google Patents

Scrubber Washer

Info

Publication number
KR960042995A
KR960042995A KR1019960039938A KR19950039938A KR960042995A KR 960042995 A KR960042995 A KR 960042995A KR 1019960039938 A KR1019960039938 A KR 1019960039938A KR 19950039938 A KR19950039938 A KR 19950039938A KR 960042995 A KR960042995 A KR 960042995A
Authority
KR
South Korea
Prior art keywords
brush
arm
motor
attached
holding frame
Prior art date
Application number
KR1019960039938A
Other languages
Korean (ko)
Other versions
KR100221572B1 (en
Inventor
미치히사 사토
Original Assignee
료오죠오 엔야
카부시키가이샤 엔야 시스템
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 료오죠오 엔야, 카부시키가이샤 엔야 시스템 filed Critical 료오죠오 엔야
Publication of KR960042995A publication Critical patent/KR960042995A/en
Application granted granted Critical
Publication of KR100221572B1 publication Critical patent/KR100221572B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes

Abstract

스크래버세정장치에 있어서, 브러쉬를 자동적으로 교환한다.In the scrubber cleaning device, the brush is changed automatically.

브러쉬(5)를 선단에 착탈자재하게 부착한 아암(1)과, 모우터(3)에 의해 요동가능하게 설치함과 아울러, 유압실린더(7)에 의해 상하동할 수 있도록 한다. 상기 모우터(3)에 의해 아암(1)은 세정위치로 움직여지고, 그 위치에서 모우터(3)에 의새 상기 브러쉬(5)를 회전시켜서 웨이퍼를 스크래퍼 세정한다. 상기 모우터(3)에 의해 아암(1)을 세정위치로부터 후퇴한 위치에 이동한다. 이 후퇴위치에는 복수의 브러쉬(5)가 브러쉬 보전지지틀(25)에 지지되어서 대기하고 있다.The arm 1 which detachably attaches the brush 5 to the front-end | tip and the motor 3 are installed so that it can be swung, and can be moved up and down by the hydraulic cylinder 7. As shown in FIG. The arm 1 is moved to the cleaning position by the motor 3, and the brush 5 is rotated by the motor 3 at the position to clean the wafer. The arm 3 is moved to the position where the arm 1 has retreated from the cleaning position. At this retreat position, a plurality of brushes 5 are supported by the brush holding frame 25 and are waiting.

상기한 아암(1)에 부착한 브러쉬(5)는 보전지지를(25)의 보전지지홈(27)에 끼워져서 아암(1)에서 벗어난다.The brush 5 attached to the arm 1 is inserted into the holding groove 27 of the holding paper 25 and is out of the arm 1.

이 아암(1)에는 상기 보전지지틀에 지지되어 있는 별개의 브러쉬가 부착된다. 이와 같은 동작은 상기 모우터(3) 및 유체실린더(7)의 조작에 의하여 자동적으로 행해진다.The arm 1 is attached with a separate brush supported by the holding frame. This operation is automatically performed by the operation of the motor 3 and the fluid cylinder 7.

Description

스크래버 세정장치Scrubber Washer

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명의 일실시예를 표시하는 사시도, 제2도는 본 발명의 구성을 표시하는 설명도.1 is a perspective view showing an embodiment of the present invention, Figure 2 is an explanatory view showing the configuration of the present invention.

Claims (2)

세정위치에 피처리물을 스크래버 세정하도록 이동 가능하게 설치된 아암(1)의 선단에 브러쉬(5)를 착탈자재하게 부착하고, 그 아암(1)을 세정위치로부터 후퇴시킨위치에 복수의 브러쉬(5)를 지지하는 브러쉬 보전지틀(25)을 설치하고, 그 브러쉬 지지틀(25)에 상기아암(1)에 부착한 브러쉬(5)를 벗겨서 지지함과 아울러, 그 보전지지틀(25)에 지지되어 있는 다른 브러쉬(5)를 상기 아암(1)에 장착하도록 상기 아암(1) 또는 브러쉬(5)를 교환구동하는 수단을 구비한 것을 특징으로 하는 스크래버 세정장치The brush 5 is detachably attached to the distal end of the arm 1 which is movable so as to scrub the object to be cleaned at the cleaning position, and the plurality of brushes (at the position where the arm 1 is withdrawn from the cleaning position) 5) A brush holding frame 25 for supporting the support is provided, and the brush 5 attached to the arm 1 is peeled off and supported on the brush holding frame 25, and the support frame 25 is attached to the holding frame 25. And a means for exchanging and driving the arm 1 or the brush 5 so as to mount another supported brush 5 on the arm 1. 제1항에 있어서, 상기 아암(1)에 대응해서 교환하기 위한 브러쉬(5)를 소정위치에 정지시키도록 상기 브러쉬 보전지지틀(25)을 이동하는 수단을 포함하는 스크래버 세정장치.The apparatus of claim 1, comprising means for moving the brush retainer frame (25) to stop the brush (5) for replacement corresponding to the arm (1) at a predetermined position. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950039938A 1995-05-26 1995-11-06 A brush scrubber KR100221572B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7151178A JPH08318226A (en) 1995-05-26 1995-05-26 Scrubber cleaning device
JP95-151178 1995-05-26

Publications (2)

Publication Number Publication Date
KR960042995A true KR960042995A (en) 1996-12-21
KR100221572B1 KR100221572B1 (en) 1999-09-15

Family

ID=15513011

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950039938A KR100221572B1 (en) 1995-05-26 1995-11-06 A brush scrubber

Country Status (2)

Country Link
JP (1) JPH08318226A (en)
KR (1) KR100221572B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100372896B1 (en) * 2000-06-14 2003-02-19 (주)케이.씨.텍 Apparatus For Cleaning A Substrate

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3764228B2 (en) * 1996-12-17 2006-04-05 芝浦メカトロニクス株式会社 Brush cleaning device
JP3578193B2 (en) * 1997-02-07 2004-10-20 大日本スクリーン製造株式会社 Substrate cleaning equipment
JP3630524B2 (en) * 1997-05-08 2005-03-16 大日本スクリーン製造株式会社 Substrate cleaning device
US5966766A (en) * 1997-10-06 1999-10-19 Advanced Micro Devices, Inc. Apparatus and method for cleaning semiconductor wafer
JPH11285671A (en) * 1998-04-03 1999-10-19 Tokyo Electron Ltd Treating device and treating method
KR20130039882A (en) * 2011-10-13 2013-04-23 세메스 주식회사 Apparatus for cleaning substrate
KR101351412B1 (en) * 2013-04-12 2014-01-23 주식회사 로그테크놀러지 The combination method of disc brush for cleaning the glass and wapor and thereof device
KR101467369B1 (en) * 2013-10-04 2014-12-10 주식회사 로그테크놀러지 The combination method of disc brush for cleaning the glass and wapor and thereof device
JP6509652B2 (en) * 2015-07-02 2019-05-08 株式会社ディスコ Cleaning device
CN108885985B (en) * 2016-03-22 2023-07-07 东京毅力科创株式会社 Substrate cleaning device
JP2018049926A (en) * 2016-09-21 2018-03-29 株式会社Ｓｃｒｅｅｎホールディングス Brush storage container, brush storage container storing cleansing brush, and substrate processing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100372896B1 (en) * 2000-06-14 2003-02-19 (주)케이.씨.텍 Apparatus For Cleaning A Substrate

Also Published As

Publication number Publication date
KR100221572B1 (en) 1999-09-15
JPH08318226A (en) 1996-12-03

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