KR960035606U - Cam plotter for semiconductor manufacturing equipment - Google Patents

Cam plotter for semiconductor manufacturing equipment

Info

Publication number
KR960035606U
KR960035606U KR2019950007507U KR19950007507U KR960035606U KR 960035606 U KR960035606 U KR 960035606U KR 2019950007507 U KR2019950007507 U KR 2019950007507U KR 19950007507 U KR19950007507 U KR 19950007507U KR 960035606 U KR960035606 U KR 960035606U
Authority
KR
South Korea
Prior art keywords
plotter
cam
semiconductor manufacturing
manufacturing equipment
equipment
Prior art date
Application number
KR2019950007507U
Other languages
Korean (ko)
Other versions
KR0121878Y1 (en
Inventor
이두규
정명국
Original Assignee
아남산업주식회사
아남정공주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아남산업주식회사, 아남정공주식회사 filed Critical 아남산업주식회사
Priority to KR2019950007507U priority Critical patent/KR0121878Y1/en
Publication of KR960035606U publication Critical patent/KR960035606U/en
Application granted granted Critical
Publication of KR0121878Y1 publication Critical patent/KR0121878Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67121—Apparatus for making assemblies not otherwise provided for, e.g. package constructions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Lead Frames For Integrated Circuits (AREA)
KR2019950007507U 1995-04-14 1995-04-14 Cam floater of a semiconductor manufacturing equipment KR0121878Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950007507U KR0121878Y1 (en) 1995-04-14 1995-04-14 Cam floater of a semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950007507U KR0121878Y1 (en) 1995-04-14 1995-04-14 Cam floater of a semiconductor manufacturing equipment

Publications (2)

Publication Number Publication Date
KR960035606U true KR960035606U (en) 1996-11-21
KR0121878Y1 KR0121878Y1 (en) 1998-08-17

Family

ID=19411287

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950007507U KR0121878Y1 (en) 1995-04-14 1995-04-14 Cam floater of a semiconductor manufacturing equipment

Country Status (1)

Country Link
KR (1) KR0121878Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100453691B1 (en) * 1997-12-30 2005-02-24 앰코 테크놀로지 코리아 주식회사 Floater apparatus of trim form system for semiconductor package to vertically transfer floater

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100453691B1 (en) * 1997-12-30 2005-02-24 앰코 테크놀로지 코리아 주식회사 Floater apparatus of trim form system for semiconductor package to vertically transfer floater

Also Published As

Publication number Publication date
KR0121878Y1 (en) 1998-08-17

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20010407

Year of fee payment: 4

LAPS Lapse due to unpaid annual fee