KR960025388U - Cam plotter for semiconductor manufacturing equipment - Google Patents

Cam plotter for semiconductor manufacturing equipment

Info

Publication number
KR960025388U
KR960025388U KR2019940035247U KR19940035247U KR960025388U KR 960025388 U KR960025388 U KR 960025388U KR 2019940035247 U KR2019940035247 U KR 2019940035247U KR 19940035247 U KR19940035247 U KR 19940035247U KR 960025388 U KR960025388 U KR 960025388U
Authority
KR
South Korea
Prior art keywords
plotter
cam
semiconductor manufacturing
manufacturing equipment
equipment
Prior art date
Application number
KR2019940035247U
Other languages
Korean (ko)
Other versions
KR0117627Y1 (en
Inventor
이규호
최원호
Original Assignee
아남산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아남산업 주식회사 filed Critical 아남산업 주식회사
Priority to KR2019940035247U priority Critical patent/KR0117627Y1/en
Publication of KR960025388U publication Critical patent/KR960025388U/en
Application granted granted Critical
Publication of KR0117627Y1 publication Critical patent/KR0117627Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
KR2019940035247U 1994-12-28 1994-12-28 Cam floater for fabricating semiconductor equipment KR0117627Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940035247U KR0117627Y1 (en) 1994-12-28 1994-12-28 Cam floater for fabricating semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940035247U KR0117627Y1 (en) 1994-12-28 1994-12-28 Cam floater for fabricating semiconductor equipment

Publications (2)

Publication Number Publication Date
KR960025388U true KR960025388U (en) 1996-07-22
KR0117627Y1 KR0117627Y1 (en) 1998-06-01

Family

ID=19402362

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940035247U KR0117627Y1 (en) 1994-12-28 1994-12-28 Cam floater for fabricating semiconductor equipment

Country Status (1)

Country Link
KR (1) KR0117627Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100453691B1 (en) * 1997-12-30 2005-02-24 앰코 테크놀로지 코리아 주식회사 Floater apparatus of trim form system for semiconductor package to vertically transfer floater

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100453691B1 (en) * 1997-12-30 2005-02-24 앰코 테크놀로지 코리아 주식회사 Floater apparatus of trim form system for semiconductor package to vertically transfer floater

Also Published As

Publication number Publication date
KR0117627Y1 (en) 1998-06-01

Similar Documents

Publication Publication Date Title
KR960012575A (en) Semiconductor device manufacturing method
DE69522195T2 (en) Manufacturing process for semiconductor devices
KR960012574A (en) Semiconductor device manufacturing method
FI954241A (en) Semiconductor device manufacturing method
KR960025388U (en) Cam plotter for semiconductor manufacturing equipment
DE69529386D1 (en) Improvements for semiconductor devices
KR960019164U (en) Socket for semiconductor devices
KR960035606U (en) Cam plotter for semiconductor manufacturing equipment
KR970052833U (en) Semiconductor manufacturing equipment
KR950007353U (en) Semiconductor manufacturing equipment
KR960006325U (en) Deposition equipment for semiconductor manufacturing
KR970025778U (en) Solution supply device for semiconductor manufacturing equipment
KR960015587U (en) Semiconductor device manufacturing equipment
KR970052816U (en) Semiconductor manufacturing equipment
KR970052819U (en) Semiconductor manufacturing equipment
KR970046695U (en) Chemical supply equipment for semiconductor manufacturing equipment
KR950028703U (en) Semiconductor devices
KR970011213U (en) Semiconductor manufacturing equipment
KR950024114U (en) Socket for semiconductor devices
KR960019111U (en) Reactor for Semiconductor Manufacturing
KR960019074U (en) Semiconductor device manufacturing equipment
KR960025284U (en) Semiconductor manufacturing device
KR970045359U (en) Masks for Semiconductor Manufacturing Equipment
KR960019066U (en) Stepper for Semiconductor Device Manufacturing Equipment
KR970064169U (en) Semiconductor manufacturing equipment

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
LAPS Lapse due to unpaid annual fee