KR960029730U - 웨이퍼 증착기의 압력 및 온도 조절장치 - Google Patents

웨이퍼 증착기의 압력 및 온도 조절장치

Info

Publication number
KR960029730U
KR960029730U KR2019950002661U KR19950002661U KR960029730U KR 960029730 U KR960029730 U KR 960029730U KR 2019950002661 U KR2019950002661 U KR 2019950002661U KR 19950002661 U KR19950002661 U KR 19950002661U KR 960029730 U KR960029730 U KR 960029730U
Authority
KR
South Korea
Prior art keywords
pressure
control device
temperature control
deposition machine
wafer deposition
Prior art date
Application number
KR2019950002661U
Other languages
English (en)
Other versions
KR0122309Y1 (ko
Inventor
이득주
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950002661U priority Critical patent/KR0122309Y1/ko
Publication of KR960029730U publication Critical patent/KR960029730U/ko
Application granted granted Critical
Publication of KR0122309Y1 publication Critical patent/KR0122309Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
KR2019950002661U 1995-02-18 1995-02-18 웨이퍼 증착기의 압력 및 온도 조절장치 KR0122309Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950002661U KR0122309Y1 (ko) 1995-02-18 1995-02-18 웨이퍼 증착기의 압력 및 온도 조절장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950002661U KR0122309Y1 (ko) 1995-02-18 1995-02-18 웨이퍼 증착기의 압력 및 온도 조절장치

Publications (2)

Publication Number Publication Date
KR960029730U true KR960029730U (ko) 1996-09-17
KR0122309Y1 KR0122309Y1 (ko) 1998-08-17

Family

ID=19408079

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950002661U KR0122309Y1 (ko) 1995-02-18 1995-02-18 웨이퍼 증착기의 압력 및 온도 조절장치

Country Status (1)

Country Link
KR (1) KR0122309Y1 (ko)

Also Published As

Publication number Publication date
KR0122309Y1 (ko) 1998-08-17

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Legal Events

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Payment date: 20090323

Year of fee payment: 12

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