KR960027792U - Centering measurement device for semiconductor devices - Google Patents

Centering measurement device for semiconductor devices

Info

Publication number
KR960027792U
KR960027792U KR2019950000540U KR19950000540U KR960027792U KR 960027792 U KR960027792 U KR 960027792U KR 2019950000540 U KR2019950000540 U KR 2019950000540U KR 19950000540 U KR19950000540 U KR 19950000540U KR 960027792 U KR960027792 U KR 960027792U
Authority
KR
South Korea
Prior art keywords
semiconductor devices
measurement device
centering measurement
centering
semiconductor
Prior art date
Application number
KR2019950000540U
Other languages
Korean (ko)
Other versions
KR0121148Y1 (en
Inventor
김광철
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950000540U priority Critical patent/KR0121148Y1/en
Publication of KR960027792U publication Critical patent/KR960027792U/en
Application granted granted Critical
Publication of KR0121148Y1 publication Critical patent/KR0121148Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
KR2019950000540U 1995-01-14 1995-01-14 Centering measurement apparatus for semiconductor device KR0121148Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950000540U KR0121148Y1 (en) 1995-01-14 1995-01-14 Centering measurement apparatus for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950000540U KR0121148Y1 (en) 1995-01-14 1995-01-14 Centering measurement apparatus for semiconductor device

Publications (2)

Publication Number Publication Date
KR960027792U true KR960027792U (en) 1996-08-17
KR0121148Y1 KR0121148Y1 (en) 1998-08-01

Family

ID=19406720

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950000540U KR0121148Y1 (en) 1995-01-14 1995-01-14 Centering measurement apparatus for semiconductor device

Country Status (1)

Country Link
KR (1) KR0121148Y1 (en)

Also Published As

Publication number Publication date
KR0121148Y1 (en) 1998-08-01

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Legal Events

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E701 Decision to grant or registration of patent right
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Payment date: 20090327

Year of fee payment: 12

EXPY Expiration of term