KR960026455A - Transistor Manufacturing Method - Google Patents
Transistor Manufacturing Method Download PDFInfo
- Publication number
- KR960026455A KR960026455A KR1019940036943A KR19940036943A KR960026455A KR 960026455 A KR960026455 A KR 960026455A KR 1019940036943 A KR1019940036943 A KR 1019940036943A KR 19940036943 A KR19940036943 A KR 19940036943A KR 960026455 A KR960026455 A KR 960026455A
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- transistor manufacturing
- spacers
- gate electrode
- selective oxidation
- Prior art date
Links
Landscapes
- Insulated Gate Type Field-Effect Transistor (AREA)
- Thin Film Transistor (AREA)
Abstract
본 발명은 절연층(2), 게이트 전극(3)을 포함하는 소정 층이나 패턴이 형성된 반도체 기판(1) 전체구조 표면에 선택적 산화가 가능한 층(5)을 형성하는 제1단계 ; 상기 선택적 산화가 가능한 층(5)의 소정 부위를 제거하는 제2단계 ; 및 산화공정을 실시하는 제3단계를 포함하는 것을 특징으로 하여, 고속동작에 유리하여, 고부가가치의 제품을 생산할 수 있는 효과가 있는 트랜지스터 제조방법에 관한 것이다.The present invention provides a first step of forming a layer (5) capable of selective oxidation on the surface of an entire structure of a semiconductor substrate (1) having a predetermined layer or pattern including an insulating layer (2) and a gate electrode (3); A second step of removing a predetermined portion of the selective oxidation layer (5); And a third step of performing an oxidation process, which is advantageous for high-speed operation and has an effect of producing a high value-added product.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1D도는 본 발명에 따른 트랜지스터 제조과정을 도시한 공정 단면도.1D is a process cross-sectional view showing a transistor manufacturing process according to the present invention.
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940036943A KR100278282B1 (en) | 1994-12-26 | 1994-12-26 | Transistor Manufacturing Method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940036943A KR100278282B1 (en) | 1994-12-26 | 1994-12-26 | Transistor Manufacturing Method |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960026455A true KR960026455A (en) | 1996-07-22 |
KR100278282B1 KR100278282B1 (en) | 2001-03-02 |
Family
ID=66769181
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940036943A KR100278282B1 (en) | 1994-12-26 | 1994-12-26 | Transistor Manufacturing Method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100278282B1 (en) |
-
1994
- 1994-12-26 KR KR1019940036943A patent/KR100278282B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR100278282B1 (en) | 2001-03-02 |
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