KR960019121U - 기판 세정장치 - Google Patents

기판 세정장치

Info

Publication number
KR960019121U
KR960019121U KR2019940029220U KR19940029220U KR960019121U KR 960019121 U KR960019121 U KR 960019121U KR 2019940029220 U KR2019940029220 U KR 2019940029220U KR 19940029220 U KR19940029220 U KR 19940029220U KR 960019121 U KR960019121 U KR 960019121U
Authority
KR
South Korea
Prior art keywords
cleaning equipment
substrate cleaning
substrate
equipment
cleaning
Prior art date
Application number
KR2019940029220U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940029220U priority Critical patent/KR960019121U/ko
Publication of KR960019121U publication Critical patent/KR960019121U/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/12—Brushes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
KR2019940029220U 1994-11-04 1994-11-04 기판 세정장치 KR960019121U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940029220U KR960019121U (ko) 1994-11-04 1994-11-04 기판 세정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940029220U KR960019121U (ko) 1994-11-04 1994-11-04 기판 세정장치

Publications (1)

Publication Number Publication Date
KR960019121U true KR960019121U (ko) 1996-06-19

Family

ID=60846802

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940029220U KR960019121U (ko) 1994-11-04 1994-11-04 기판 세정장치

Country Status (1)

Country Link
KR (1) KR960019121U (ko)

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Legal Events

Date Code Title Description
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid