KR960012306A - 집적회로의 제조에서 알루미늄을 포함한 층의 스퍼터링 증착을 평탄화 하기위한 방법 - Google Patents

집적회로의 제조에서 알루미늄을 포함한 층의 스퍼터링 증착을 평탄화 하기위한 방법 Download PDF

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Publication number
KR960012306A
KR960012306A KR1019950030579A KR19950030579A KR960012306A KR 960012306 A KR960012306 A KR 960012306A KR 1019950030579 A KR1019950030579 A KR 1019950030579A KR 19950030579 A KR19950030579 A KR 19950030579A KR 960012306 A KR960012306 A KR 960012306A
Authority
KR
South Korea
Prior art keywords
planarizing
manufacture
integrated circuits
containing aluminum
layers containing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1019950030579A
Other languages
English (en)
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of KR960012306A publication Critical patent/KR960012306A/ko
Ceased legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/40—Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials
    • H10P14/412—Deposition of metallic or metal-silicide materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
KR1019950030579A 1994-09-19 1995-09-19 집적회로의 제조에서 알루미늄을 포함한 층의 스퍼터링 증착을 평탄화 하기위한 방법 Ceased KR960012306A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4433326A DE4433326A1 (de) 1994-09-19 1994-09-19 Verfahren zur planarisierenden Sputterabscheidung einer aluminiumhaltigen Schicht bei der Herstellung integrierter Schaltungen

Publications (1)

Publication Number Publication Date
KR960012306A true KR960012306A (ko) 1996-04-20

Family

ID=6528580

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950030579A Ceased KR960012306A (ko) 1994-09-19 1995-09-19 집적회로의 제조에서 알루미늄을 포함한 층의 스퍼터링 증착을 평탄화 하기위한 방법

Country Status (5)

Country Link
EP (1) EP0706205A3 (enExample)
JP (1) JPH0897148A (enExample)
KR (1) KR960012306A (enExample)
DE (1) DE4433326A1 (enExample)
TW (1) TW276351B (enExample)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5658828A (en) * 1989-11-30 1997-08-19 Sgs-Thomson Microelectronics, Inc. Method for forming an aluminum contact through an insulating layer
JPH04363024A (ja) * 1990-11-30 1992-12-15 Toshiba Corp 半導体装置の製造方法
KR920010620A (ko) * 1990-11-30 1992-06-26 원본미기재 다층 상호접속선을 위한 알루미늄 적층 접점/통로 형성방법
JPH07109030B2 (ja) * 1991-02-12 1995-11-22 アプライド マテリアルズ インコーポレイテッド 半導体ウェーハ上にアルミニウム層をスパッタする方法
DE69319993T2 (de) * 1992-09-22 1998-12-10 Sgs-Thomson Microelectronics, Inc., Carrollton, Tex. Methode zur Herstellung eines Metallkontaktes

Also Published As

Publication number Publication date
EP0706205A3 (de) 1997-10-22
JPH0897148A (ja) 1996-04-12
EP0706205A2 (de) 1996-04-10
DE4433326A1 (de) 1996-03-21
TW276351B (enExample) 1996-05-21

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St.27 status event code: A-1-2-D10-D21-exm-PE0902

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

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P22-X000 Classification modified

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