KR960009691A - Light Path Control - Google Patents

Light Path Control Download PDF

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Publication number
KR960009691A
KR960009691A KR1019940020845A KR19940020845A KR960009691A KR 960009691 A KR960009691 A KR 960009691A KR 1019940020845 A KR1019940020845 A KR 1019940020845A KR 19940020845 A KR19940020845 A KR 19940020845A KR 960009691 A KR960009691 A KR 960009691A
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KR
South Korea
Prior art keywords
support part
path control
pad
parts
signal electrode
Prior art date
Application number
KR1019940020845A
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Korean (ko)
Other versions
KR100229809B1 (en
Inventor
지정범
Original Assignee
배순훈
대우전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 배순훈, 대우전자 주식회사 filed Critical 배순훈
Priority to KR1019940020845A priority Critical patent/KR100229809B1/en
Publication of KR960009691A publication Critical patent/KR960009691A/en
Application granted granted Critical
Publication of KR100229809B1 publication Critical patent/KR100229809B1/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102—Constructional details, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/02—Function characteristic reflective

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

본 발명은 광로조절장치에 관한 것으로서, 트랜지스터들이 매트릭스 형태로 내장되어 표면의 상부에 상기 트랜지스터와 상응하는 패드가 형성된 구동기판과; 상기 패드를 덮도록 형성된 지지부와, 상기 지지부를 관통하여 상기 패드와 신호전극을 전기적으로 연결하는 플러그와, 상기 지지부의 상부에 일측단이 접촉되어 실장된 제1 및 제2변형부들과, 상기 플러그와 전기적으로 연결되도록 제1 및 제2변형부들 사이에 개재된 신호전극과, 상기 제1변형부 하부와 제2변형부 상부에 형성된 제1 및 제2바이러스 전극으로 이루어진 액츄에이터를 구비한다. 따라서, 상기 제1 및 제2변형부를 이력 특성이 양호한 비대칭성 결정구조를 갖는 산화아연 또는 질화알루미늄 등의 낮은 온도에서 형성할 수 있는 재료를 사용하여 이력특성을 향상시킬 수 있으며, 멤브레인을 형성할 필요가 없고 신호전극을 백금계 물질로 형성할 필요가 없어 제조비용을 절감시킬 수 있다.The present invention relates to an optical path control apparatus, comprising: a driving substrate having transistors embedded in a matrix form and having a pad corresponding to the transistor on an upper surface thereof; A support part formed to cover the pad, a plug penetrating the support part to electrically connect the pad and a signal electrode, first and second deformation parts mounted at one end of the support part in contact with the upper part of the support part, and the plug And an actuator including a signal electrode interposed between the first and second deformable parts so as to be electrically connected to the first and second deformable parts, and a first and second virus electrode formed under the first deformed part and the upper part of the second deformed part. Accordingly, the hysteresis characteristics can be improved by using a material capable of forming the first and second deformation parts at a low temperature such as zinc oxide or aluminum nitride having an asymmetric crystal structure with good hysteresis characteristics. There is no need and the signal electrode does not need to be formed of a platinum-based material can reduce the manufacturing cost.

Description

광로조절장치Light Path Control

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 종래의 광로조절장치의 단면도.1 is a cross-sectional view of a conventional optical path control device.

제2도는 본 발명에 따른 광로조절장치의 단면도.2 is a cross-sectional view of the optical path control apparatus according to the present invention.

Claims (4)

트랜지스터들의 매트릭스 형태로 내장되어 표면의 상부에 상기 트랜지스터와 상응하는 패드가 형성된 구동기판과; 상기 패드를 덮도록 형성된 지지부와, 상기 지지부를 관통하여 상기 패드와 신호전극을 전기적으로 연결하는 플러그와, 상기 지지부의 상부에 일측단이 접촉되어 실장된 제1 및 제2변형부들과, 상기 플러그와 전기적으로 연결되도록 제1 및 제2변형부들 사이에 개재된 신호전극과, 상기 제1변형부 하부와 제2변형부 상부에 형성된 제1 및 제2바이러스 전극으로 이루어진 액츄에이터를 구비하는 광로조절장치.A driving substrate embedded in a matrix form of transistors and having a pad corresponding to the transistor on an upper surface of the transistor; A support part formed to cover the pad, a plug penetrating the support part to electrically connect the pad and a signal electrode, first and second deformation parts mounted at one end of the support part in contact with the upper part of the support part, and the plug And an optical path control device including an actuator including a signal electrode interposed between the first and second deformable parts so as to be electrically connected to the first and second deformable parts, and an actuator formed on the lower part of the first and second deformed parts. . 제1항에 있어서, 상기 제1 및 제2변형부는 c-축을 따라 증착되어 비대칭결정구조를 갖는 압전세라믹으로 형성된 광로조절장치.The optical path control device of claim 1, wherein the first and second deformation parts are formed along a c-axis to be formed of a piezoelectric ceramic having an asymmetric crystal structure. 제2항에 있어서, 상기 압전 세라믹이 산화아연 또는 질화알루미늄으로 형성된 광로조절장치.The optical path control device according to claim 2, wherein the piezoelectric ceramic is formed of zinc oxide or aluminum nitride. 제2항에 있어서, 상기 제1 및 제2변형부들이 200-300℃정도의 저온으로 형성된 광로조절장치.The optical path control device of claim 2, wherein the first and second deformation parts are formed at a low temperature of about 200 to 300 ° C. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940020845A 1994-08-24 1994-08-24 Lightpath modulation device KR100229809B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940020845A KR100229809B1 (en) 1994-08-24 1994-08-24 Lightpath modulation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940020845A KR100229809B1 (en) 1994-08-24 1994-08-24 Lightpath modulation device

Publications (2)

Publication Number Publication Date
KR960009691A true KR960009691A (en) 1996-03-22
KR100229809B1 KR100229809B1 (en) 1999-11-15

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940020845A KR100229809B1 (en) 1994-08-24 1994-08-24 Lightpath modulation device

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Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4793699A (en) * 1985-04-19 1988-12-27 Canon Kabushiki Kaisha Projection apparatus provided with an electro-mechanical transducer element
US5209119A (en) * 1990-12-12 1993-05-11 Regents Of The University Of Minnesota Microdevice for sensing a force

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Publication number Publication date
KR100229809B1 (en) 1999-11-15

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