KR960005785A - Tios processing equipment - Google Patents

Tios processing equipment Download PDF

Info

Publication number
KR960005785A
KR960005785A KR1019940016355A KR19940016355A KR960005785A KR 960005785 A KR960005785 A KR 960005785A KR 1019940016355 A KR1019940016355 A KR 1019940016355A KR 19940016355 A KR19940016355 A KR 19940016355A KR 960005785 A KR960005785 A KR 960005785A
Authority
KR
South Korea
Prior art keywords
teos
process tube
tube
maintain
ring
Prior art date
Application number
KR1019940016355A
Other languages
Korean (ko)
Other versions
KR0147425B1 (en
Inventor
조국현
이민혁
구본귀
Original Assignee
김주용
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김주용, 현대전자산업 주식회사 filed Critical 김주용
Priority to KR1019940016355A priority Critical patent/KR0147425B1/en
Publication of KR960005785A publication Critical patent/KR960005785A/en
Application granted granted Critical
Publication of KR0147425B1 publication Critical patent/KR0147425B1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles

Abstract

본 발명은TEOS(Tetra Otho Silicate) 가스를 사용하여 웨이퍼상에TEOS 막을 증착하는 공정을 수행하는TEOS 증착장치에 관한 것으로서, 공정 듀브(2); 상기 공정 듀브(2)의 하부에 설치되어 상기 공정듀브(2)를 지지하고 실링을 유지하는 매니폴드부(4); 상기 공정튜브(2)의 외주에 설치되어 상기 공정 튜브(2)를 가열하는 히터(8); 상기 공정튜브(2)와 매니폴드부(4)의 접합지점에 진공을 유지하기 위하여 설치되는 오-링(12); 상기 공정튜브(2)내에TEOS 가스를 주입하는TEOS 가스 주입수단(10); 및 상기 오-링(12)을 보호하기 위하여 소정의 냉각수를 투입하는 냉각수 주입관(14)을 포함하여 구성되는 것을 특징으로 한다.The present invention relates to a TEOS deposition apparatus for performing a process of depositing a TEOS film on a wafer using a Tetra Otho Silicate (TEOS) gas; A manifold portion (4) installed at a lower portion of the process pipe (2) to support the process pipe (2) and to maintain a seal; A heater 8 installed at an outer circumference of the process tube 2 to heat the process tube 2; An o-ring (12) installed to maintain a vacuum at a junction between the process tube (2) and the manifold portion (4); TEOS gas injection means (10) for injecting the TEOS gas into the process tube (2); And a coolant injection pipe 14 for introducing a predetermined coolant to protect the o-ring 12.

Description

티이오에스(TEOS)공정장치Tios processing equipment

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발명에 의한 TEOS증착 공정장치의 바닥부를 나타내는 부분 확대 단면도이다.2 is a partially enlarged cross-sectional view showing the bottom of the TEOS deposition process apparatus according to the present invention.

Claims (1)

TEOS 공정 장치에 있어서,공정 듀브(2); 상기 공정 듀브(2)의 하부에 설치되어 상기 공정튜브(2)를 지지하고 실링을 유지하는 매니폴드부(4); 상기 공정튜브(2)의 외주에 설치되어 상기 공정 튜브(2)를 가열하는 히터(8); 상기 공정튜브(2)와 매니폴드부(4)의 접합지점에 진공을 유지하기 위하여 설치되는 오-링(12); 상기 공정튜브(2)내에TEOS 가스를 주입하는TEOS 가스 주입수단(10); 및 상기 오-링(12)을 보호하기 위하여 소정의 냉각수를 투입하는 냉각수 주입관(14)을 포함하여 구성되는 것을 특징으로 하는 TEOS 공정 장치.A TEOS process apparatus, comprising: process duve 2; A manifold part 4 installed at a lower portion of the process tube 2 to support the process tube 2 and to maintain a sealing; A heater 8 installed at an outer circumference of the process tube 2 to heat the process tube 2; An o-ring (12) installed to maintain a vacuum at a junction between the process tube (2) and the manifold portion (4); TEOS gas injection means (10) for injecting the TEOS gas into the process tube (2); And a coolant injection tube (14) for introducing predetermined coolant to protect the o-ring (12). ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940016355A 1994-07-07 1994-07-07 Tetra ethyl otho silicate process equipment KR0147425B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940016355A KR0147425B1 (en) 1994-07-07 1994-07-07 Tetra ethyl otho silicate process equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940016355A KR0147425B1 (en) 1994-07-07 1994-07-07 Tetra ethyl otho silicate process equipment

Publications (2)

Publication Number Publication Date
KR960005785A true KR960005785A (en) 1996-02-23
KR0147425B1 KR0147425B1 (en) 1998-11-02

Family

ID=19387530

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940016355A KR0147425B1 (en) 1994-07-07 1994-07-07 Tetra ethyl otho silicate process equipment

Country Status (1)

Country Link
KR (1) KR0147425B1 (en)

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9216610B2 (en) 2008-12-19 2015-12-22 Flooring Industries Limited, Sarl Coated panel and method for manufacturing such panel
US9605436B2 (en) 2003-12-02 2017-03-28 Valinge Innovation Ab Floorboard, system and method for forming a flooring, and a flooring formed thereof
US9695601B2 (en) 2010-01-11 2017-07-04 Valinge Innovation Ab Floor covering with interlocking design
US9714515B2 (en) 2011-08-29 2017-07-25 Ceraloc Innovation Ab Mechanical locking system for floor panels
US9765530B2 (en) 2006-01-12 2017-09-19 Valinge Innovation Ab Floorboards comprising a decorative edge part in a resilient surface layer
US9777487B2 (en) 2007-11-07 2017-10-03 Valinge Innovation Ab Mechanical locking of floor panels with vertical snap folding
US10100533B2 (en) 2010-05-10 2018-10-16 Flooring Industries Limited, Sarl Floor panel
US10407919B2 (en) 2013-03-25 2019-09-10 Valinge Innovation Ab Floorboards provided with a mechanical locking system
US10486399B2 (en) 1999-12-14 2019-11-26 Valinge Innovation Ab Thermoplastic planks and methods for making the same
US10493731B2 (en) 2014-07-16 2019-12-03 Valinge Innovation Ab Method to produce a thermoplastic wear resistant foil
US10526793B2 (en) 2009-09-04 2020-01-07 Valinge Innovation Ab Resilient floor
US10801213B2 (en) 2018-01-10 2020-10-13 Valinge Innovation Ab Subfloor joint
US10808410B2 (en) 2018-01-09 2020-10-20 Valinge Innovation Ab Set of panels
US10837181B2 (en) 2015-12-17 2020-11-17 Valinge Innovation Ab Method for producing a mechanical locking system for panels
US10851549B2 (en) 2016-09-30 2020-12-01 Valinge Innovation Ab Set of panels
US10865571B2 (en) 2014-08-29 2020-12-15 Valinge Innovation Ab Vertical joint system for a surface covering panel
US10870994B2 (en) 2010-05-10 2020-12-22 Flooring Industries Limited Sarl Floor panel
US10975580B2 (en) 2001-07-27 2021-04-13 Valinge Innovation Ab Floor panel with sealing means
US11578495B2 (en) 2018-12-05 2023-02-14 Valinge Innovation Ab Subfloor joint
US11668099B2 (en) 2009-12-22 2023-06-06 Flooring Industries Limited, Sarl Panel, covering and method for installing such panels
US11680414B2 (en) 2006-06-02 2023-06-20 Flooring Industries Limited, Sarl Floor covering, floor element and method for manufacturing floor elements
US11725395B2 (en) 2009-09-04 2023-08-15 Välinge Innovation AB Resilient floor
US11794460B2 (en) 2018-01-04 2023-10-24 Flooring Industries Limited, Sarl Methods for manufacturing panels

Cited By (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10486399B2 (en) 1999-12-14 2019-11-26 Valinge Innovation Ab Thermoplastic planks and methods for making the same
US10975580B2 (en) 2001-07-27 2021-04-13 Valinge Innovation Ab Floor panel with sealing means
US9605436B2 (en) 2003-12-02 2017-03-28 Valinge Innovation Ab Floorboard, system and method for forming a flooring, and a flooring formed thereof
US10450760B2 (en) 2006-01-12 2019-10-22 Valinge Innovation Ab Floorboards comprising a decorative edge part in a resilient surface layer
US9765530B2 (en) 2006-01-12 2017-09-19 Valinge Innovation Ab Floorboards comprising a decorative edge part in a resilient surface layer
US11702847B2 (en) 2006-01-12 2023-07-18 Valinge Innovation Ab Floorboards comprising a decorative edge part in a resilient surface layer
US11066836B2 (en) 2006-01-12 2021-07-20 Valinge Innovation Ab Floorboards comprising a decorative edge part in a resilient surface layer
US11680414B2 (en) 2006-06-02 2023-06-20 Flooring Industries Limited, Sarl Floor covering, floor element and method for manufacturing floor elements
US11933055B2 (en) 2006-06-02 2024-03-19 Unilin, Bv Floor covering, floor element and method for manufacturing floor elements
US9777487B2 (en) 2007-11-07 2017-10-03 Valinge Innovation Ab Mechanical locking of floor panels with vertical snap folding
US11519183B2 (en) 2007-11-07 2022-12-06 Valinge Innovation Ab Mechanical locking of floor panels with vertical snap folding
US11654712B2 (en) 2008-12-19 2023-05-23 Flooring Industries Limited, Sarl Coated panel and method for manufacturing such panel
US9216610B2 (en) 2008-12-19 2015-12-22 Flooring Industries Limited, Sarl Coated panel and method for manufacturing such panel
US11059320B2 (en) 2008-12-19 2021-07-13 Flooring Industries Limited, Sarl Coated panel and method for manufacturing such panel
US10526793B2 (en) 2009-09-04 2020-01-07 Valinge Innovation Ab Resilient floor
US11725395B2 (en) 2009-09-04 2023-08-15 Välinge Innovation AB Resilient floor
US11306486B2 (en) 2009-09-04 2022-04-19 Valinge Innovation Ab Resilient floor
US11668099B2 (en) 2009-12-22 2023-06-06 Flooring Industries Limited, Sarl Panel, covering and method for installing such panels
US10704269B2 (en) 2010-01-11 2020-07-07 Valinge Innovation Ab Floor covering with interlocking design
US9695601B2 (en) 2010-01-11 2017-07-04 Valinge Innovation Ab Floor covering with interlocking design
US11795701B2 (en) 2010-01-11 2023-10-24 Välinge Innovation AB Floor covering with interlocking design
US11359387B2 (en) 2010-01-11 2022-06-14 Valinge Innovation Ab Floor covering with interlocking design
US10870994B2 (en) 2010-05-10 2020-12-22 Flooring Industries Limited Sarl Floor panel
US10100533B2 (en) 2010-05-10 2018-10-16 Flooring Industries Limited, Sarl Floor panel
US11634914B2 (en) 2010-05-10 2023-04-25 Flooring Industries Limited, Sarl Floor panel
US10597876B2 (en) 2010-05-10 2020-03-24 Flooring Industries Limited, Sarl Floor panel
US11634913B2 (en) 2010-05-10 2023-04-25 Flooring Industries Limited, Sarl Floor panel
US11566432B2 (en) 2010-05-10 2023-01-31 Flooring Industries Limited, Sarl Floor panel
US11795702B2 (en) 2010-05-10 2023-10-24 Flooring Industries Limited Sarl Floor panel
US11371249B2 (en) 2010-05-10 2022-06-28 Flooring Industries Limited, Sarl Floor panel
US9758972B2 (en) 2011-08-29 2017-09-12 Ceraloc Innovation Ab Mechanical locking system for floor panels
US9714515B2 (en) 2011-08-29 2017-07-25 Ceraloc Innovation Ab Mechanical locking system for floor panels
US11421426B2 (en) 2013-03-25 2022-08-23 Valinge Innovation Ab Floorboards provided with a mechanical locking system
US11898356B2 (en) 2013-03-25 2024-02-13 Välinge Innovation AB Floorboards provided with a mechanical locking system
US10407919B2 (en) 2013-03-25 2019-09-10 Valinge Innovation Ab Floorboards provided with a mechanical locking system
US10844612B2 (en) 2013-03-25 2020-11-24 Valinge Innovation Ab Floorboards provided with a mechanical locking system
US10493731B2 (en) 2014-07-16 2019-12-03 Valinge Innovation Ab Method to produce a thermoplastic wear resistant foil
US10982449B2 (en) 2014-08-29 2021-04-20 Valinge Innovation Ab Vertical joint system for a surface covering panel
US11661749B2 (en) 2014-08-29 2023-05-30 Valinge Innovation Ab Vertical joint system for a surface covering panel
US10865571B2 (en) 2014-08-29 2020-12-15 Valinge Innovation Ab Vertical joint system for a surface covering panel
US10837181B2 (en) 2015-12-17 2020-11-17 Valinge Innovation Ab Method for producing a mechanical locking system for panels
US10851549B2 (en) 2016-09-30 2020-12-01 Valinge Innovation Ab Set of panels
US11814850B2 (en) 2016-09-30 2023-11-14 Välinge Innovation AB Set of panels
US11794460B2 (en) 2018-01-04 2023-10-24 Flooring Industries Limited, Sarl Methods for manufacturing panels
US11808045B2 (en) 2018-01-09 2023-11-07 Välinge Innovation AB Set of panels
US10808410B2 (en) 2018-01-09 2020-10-20 Valinge Innovation Ab Set of panels
US10801213B2 (en) 2018-01-10 2020-10-13 Valinge Innovation Ab Subfloor joint
US10941578B2 (en) 2018-01-10 2021-03-09 Valinge Innovation Ab Subfloor joint
US11578495B2 (en) 2018-12-05 2023-02-14 Valinge Innovation Ab Subfloor joint

Also Published As

Publication number Publication date
KR0147425B1 (en) 1998-11-02

Similar Documents

Publication Publication Date Title
KR960005785A (en) Tios processing equipment
TW359004B (en) Methods and apparatus for shallow trench isolation
KR840005751A (en) Chemical vapor deposition apparatus and method
KR920007116A (en) How to Form Inner Layer Insulation
DE59805649D1 (en) Process and devices for the production of pipes insulated with foam
ES2129255T3 (en) THERMAL INSULATION SYSTEM OF DUCTS.
DK0828964T3 (en) Studs for concrete pipes
KR920001627A (en) Manufacturing Method of Semiconductor Substrate
KR20010056330A (en) Apparatus for fabricating a semiconductor device
RU2000108491A (en) STEAM DEPOSITION DEVICE
ES8605326A1 (en) Fluid-conveying conduit with at least one choke.
JPS5841656B2 (en) Hand-painted construction
DE59004035D1 (en) Heat exchanger for cooling hot reaction gas.
JPH11193891A (en) Device for vacuum-tightly coupling two members consisting of different materials with each other
KR940704054A (en) Heat Treatment Apparatus
JPH0510480A (en) Gas piping and execution method therefor
JPS62262420A (en) Method of sealing heat resisting tube for heating semiconductor
KR20010045802A (en) Device for sealing flange of horizontal type furnace for Low Pressure Chemical Vaper Deposition
KR920005257A (en) Plasma chemical vapor deposition apparatus
FR2399603A1 (en) SEALING GASKET FOR SOCKET PIPES
KR970018002A (en) Chemical vapor deposition apparatus and deposition method
KR920008839A (en) SiNx / a-Si interface formation method
JPS57175797A (en) Epitaxial growth under reduced pressure
KR970002100Y1 (en) Wafer evaporation apparatus
JPS5364820A (en) Tight connecting process of plastic hose

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
O035 Opposition [patent]: request for opposition
O132 Decision on opposition [patent]
FPAY Annual fee payment

Payment date: 20020417

Year of fee payment: 5

LAPS Lapse due to unpaid annual fee