KR960003068U - Wax centering device for unloading of trek interface for semiconductor exposure and development equipment - Google Patents

Wax centering device for unloading of trek interface for semiconductor exposure and development equipment

Info

Publication number
KR960003068U
KR960003068U KR2019940013591U KR19940013591U KR960003068U KR 960003068 U KR960003068 U KR 960003068U KR 2019940013591 U KR2019940013591 U KR 2019940013591U KR 19940013591 U KR19940013591 U KR 19940013591U KR 960003068 U KR960003068 U KR 960003068U
Authority
KR
South Korea
Prior art keywords
trek
unloading
wax
interface
centering device
Prior art date
Application number
KR2019940013591U
Other languages
Korean (ko)
Other versions
KR200169678Y1 (en
Inventor
서영만
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019940013591U priority Critical patent/KR200169678Y1/en
Publication of KR960003068U publication Critical patent/KR960003068U/en
Application granted granted Critical
Publication of KR200169678Y1 publication Critical patent/KR200169678Y1/en

Links

KR2019940013591U 1994-06-11 1994-06-11 Centering apparatus semiconductor exposure and developing track interface unload wafer KR200169678Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940013591U KR200169678Y1 (en) 1994-06-11 1994-06-11 Centering apparatus semiconductor exposure and developing track interface unload wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940013591U KR200169678Y1 (en) 1994-06-11 1994-06-11 Centering apparatus semiconductor exposure and developing track interface unload wafer

Publications (2)

Publication Number Publication Date
KR960003068U true KR960003068U (en) 1996-01-22
KR200169678Y1 KR200169678Y1 (en) 2000-03-02

Family

ID=19385413

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940013591U KR200169678Y1 (en) 1994-06-11 1994-06-11 Centering apparatus semiconductor exposure and developing track interface unload wafer

Country Status (1)

Country Link
KR (1) KR200169678Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100611215B1 (en) * 2002-08-28 2006-08-09 삼성에스디아이 주식회사 Substrate processing equipment of multi chamber type having improved substrate transfer apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100611215B1 (en) * 2002-08-28 2006-08-09 삼성에스디아이 주식회사 Substrate processing equipment of multi chamber type having improved substrate transfer apparatus

Also Published As

Publication number Publication date
KR200169678Y1 (en) 2000-03-02

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