KR960038709U - Stage of wafer exposure apparatus - Google Patents
Stage of wafer exposure apparatusInfo
- Publication number
- KR960038709U KR960038709U KR2019950010083U KR19950010083U KR960038709U KR 960038709 U KR960038709 U KR 960038709U KR 2019950010083 U KR2019950010083 U KR 2019950010083U KR 19950010083 U KR19950010083 U KR 19950010083U KR 960038709 U KR960038709 U KR 960038709U
- Authority
- KR
- South Korea
- Prior art keywords
- stage
- exposure apparatus
- wafer exposure
- wafer
- exposure
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950010083U KR960038709U (en) | 1995-05-13 | 1995-05-13 | Stage of wafer exposure apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950010083U KR960038709U (en) | 1995-05-13 | 1995-05-13 | Stage of wafer exposure apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960038709U true KR960038709U (en) | 1996-12-18 |
Family
ID=60868945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950010083U KR960038709U (en) | 1995-05-13 | 1995-05-13 | Stage of wafer exposure apparatus |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960038709U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100713561B1 (en) * | 2006-05-16 | 2007-05-04 | (주)에스티아이 | Gantry type xy stage |
KR100745371B1 (en) * | 2006-10-23 | 2007-08-02 | 삼성전자주식회사 | Device for cleaning wafer chuck of semiconductor stepper |
-
1995
- 1995-05-13 KR KR2019950010083U patent/KR960038709U/en not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100713561B1 (en) * | 2006-05-16 | 2007-05-04 | (주)에스티아이 | Gantry type xy stage |
KR100745371B1 (en) * | 2006-10-23 | 2007-08-02 | 삼성전자주식회사 | Device for cleaning wafer chuck of semiconductor stepper |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |