KR960038709U - Stage of wafer exposure apparatus - Google Patents

Stage of wafer exposure apparatus

Info

Publication number
KR960038709U
KR960038709U KR2019950010083U KR19950010083U KR960038709U KR 960038709 U KR960038709 U KR 960038709U KR 2019950010083 U KR2019950010083 U KR 2019950010083U KR 19950010083 U KR19950010083 U KR 19950010083U KR 960038709 U KR960038709 U KR 960038709U
Authority
KR
South Korea
Prior art keywords
stage
exposure apparatus
wafer exposure
wafer
exposure
Prior art date
Application number
KR2019950010083U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950010083U priority Critical patent/KR960038709U/en
Publication of KR960038709U publication Critical patent/KR960038709U/en

Links

KR2019950010083U 1995-05-13 1995-05-13 Stage of wafer exposure apparatus KR960038709U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950010083U KR960038709U (en) 1995-05-13 1995-05-13 Stage of wafer exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950010083U KR960038709U (en) 1995-05-13 1995-05-13 Stage of wafer exposure apparatus

Publications (1)

Publication Number Publication Date
KR960038709U true KR960038709U (en) 1996-12-18

Family

ID=60868945

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950010083U KR960038709U (en) 1995-05-13 1995-05-13 Stage of wafer exposure apparatus

Country Status (1)

Country Link
KR (1) KR960038709U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100713561B1 (en) * 2006-05-16 2007-05-04 (주)에스티아이 Gantry type xy stage
KR100745371B1 (en) * 2006-10-23 2007-08-02 삼성전자주식회사 Device for cleaning wafer chuck of semiconductor stepper

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100713561B1 (en) * 2006-05-16 2007-05-04 (주)에스티아이 Gantry type xy stage
KR100745371B1 (en) * 2006-10-23 2007-08-02 삼성전자주식회사 Device for cleaning wafer chuck of semiconductor stepper

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination