KR960002491B1 - Multi-tube integrated circuit transferring device - Google Patents

Multi-tube integrated circuit transferring device Download PDF

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Publication number
KR960002491B1
KR960002491B1 KR1019920019337A KR920019337A KR960002491B1 KR 960002491 B1 KR960002491 B1 KR 960002491B1 KR 1019920019337 A KR1019920019337 A KR 1019920019337A KR 920019337 A KR920019337 A KR 920019337A KR 960002491 B1 KR960002491 B1 KR 960002491B1
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South Korea
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integrated circuit
tube
magazine
lifter
cylinder
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KR1019920019337A
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Korean (ko)
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KR940010261A (en
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박창순
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현대전자산업주식회사
김주용
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Priority to KR1019920019337A priority Critical patent/KR960002491B1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Specific Conveyance Elements (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The apparatus is characterized in that a multi tube magazine(1) is formed in an insertion groove to thereby lift a lead screw, in that the lifter(2) lifted by cylinder(5) is mounted in the front direction of the multi tube magazine(1), in that a loadless cylinder(4) for operating a pair of slits is mounted in the direction of the lifter to install a clamp(3) therein, in that one part of the lifter is tilted down, in that an integral circuit magazine(1) is arranged by a servo motor(6) in the front or back direction thereof, and in that an integral circuit guide rail(8) is mounted in the outer terminal of the integral circuit magazine.

Description

다중튜브 집적회로 이송장치Multitube Integrated Circuit Conveyor

제1도는 본 발명의 전체 사시도.1 is an overall perspective view of the present invention.

제2도는 동 정면도.2 is a front view of the same.

제3도는 동 우측면도.3 is the same right side view.

제4도는 동 평면도.4 is a plan view of the same.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 다중튜브 매거진 2 : 리프터1: multi-tube magazine 2: lifter

3 : 클램프 4 : 로드레스 실린더3: clamp 4: rodless cylinder

5 : 승강 실린더 6 : 서보모터5: lifting cylinder 6: servomotor

7 : 모터 8 : 레일7: motor 8: rail

9 : 집적회로매거진 10 : 안내봉9: integrated circuit magazine 10: guide rod

14 : 다중튜브14: multitube

본 발명은 제조된 집적회로의 검사공정에 있어서 검사하려는 다중튜브내의 집적회로를한 줄의 레일로 이송시켜 주기 위한 다중튜브 집적회로 이송장치에 관한 것이다.The present invention relates to a multi-tube integrated circuit transfer apparatus for transferring the integrated circuit in the multi-tube to be inspected in a row of rails in the inspection process of the manufactured integrated circuit.

기존의 다중튜브식 집적회로 이송방법은 다중튜브내의 집적회로를 시이소오 방식을 이용하여 날개의 튜브로 이송한 후 이 날개의 튜브를 다시 한 줄의 레일로 이송하는 방식으로 작업이 이뤄져 왔다. 그러나 이러한 집적회로 이송방식은 이송공정에 있어서 날개의 튜브로 집적회로를 이송하는 작업이 사실상 불필요한 공정임에도 쓸데없이 한 공정을 더 거치는 결과나 마찬가지여서 결과적으로 집적회로에 품질저하, 인력낭비, 생산성 저하와 같은 불이익을 가져올 수 밖에 없었다.Conventional multi-tube integrated circuit transfer method has been carried out by transferring the integrated circuit in the multi-tube to the tube of the wing by using the seesaw method, and then transfer the tube of the wing to a row of rails again. However, this integrated circuit transfer method is a result of unnecessarily one more process, even though the transfer of the integrated circuit to the wing tube is actually unnecessary process in the transfer process, resulting in deterioration of the integrated circuit, waste of manpower and productivity. And had to bring the same disadvantages.

따라서 본 발명자는 종래의 이같은 문제점을 개선하기 위하여 엘리베이터의 원리와 다중튜브를 물었다 놨다하는 클램핑장치와 로우된 다중튜브를 들어올리고 내리는 리프트장치, 그리고 이송받은 집적회로를 한줄의 레일로 이송시켜 주기 위한 서보 모터(survo motor) 제어 기술을 복합적으로 응용하여 다중튜브내의 집적회로를 날개의 튜브를 거치지 않고 직접 레일로 이송시켜 줌으로써 불필요한 공정과 품을 줄이는 반면에 상대적으로 생산성은 높일 수 있는 집적회로 이송장치의 완성을 보고 본 발명을 제안하게 된 것이다.Therefore, in order to improve the above-mentioned problems, the inventors of the present invention provide a clamping device that lifts and lowers a multi-tube clamping device, a lift device for lifting and lowering a lowered multi-tube, and a conveyed integrated circuit for transporting a single line of rails. Integrated circuit transfer device that can reduce productivity and reduce unnecessary processes and products by transferring servo circuit control technology directly to rails without passing through tube of wing. Upon seeing the completion of the present invention will be proposed.

이하, 바람직한 실시예에 터잡아 작성한 첨부도면에 따라 더욱 구체적으로 본 발명을 설명한다.Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings, made in accordance with a preferred embodiment.

본 발명의 다중튜브내 집적회로 이송장치는 엘리베이터(A)와 다중튜브용 리프트장치(B), 그리고 다중튜브 로드/언로드 및 단축 로로트(C)로 구성된다.The multi-tube integrated circuit transfer device of the present invention is composed of an elevator (A), a lift device (B) for a multi-tube, and a multi-tube load / unload and uniaxial lot (C).

엘리베이터(A)는 다중튜브 매거진(1)과 모터(7), 매거진 지지봉(10) 및 리드 스크류(11)로 구성된다. 다중튜브 매거진(1)은 다중튜브(14)를 소정의 간격을 띄운채 차곡차곡 적층하듯 끼워둘 수 있는 홈(1a)을 상하방향으로 정연하게 형성한 일종의 상자로서, 수직으로 오르내리는 리프터(2)의 뒷쪽에 세운 지지봉(10)의 안내를 받아 오르내릴 수 있는 형태로 설치된다.The elevator A is composed of a multi-tube magazine 1 and a motor 7, a magazine support rod 10, and a lead screw 11. The multi-tube magazine 1 is a kind of box in which the grooves 1a can be stacked in a vertical direction in a manner of stacking the multi-tubes 14 at regular intervals at a predetermined interval. It is installed in the form that can be moved up and down guided by the support rod (10) erected on the back.

또, 모터(7)는 리드 스크류(11)의 하단에 축설치한 폴리간에 두른 벨트(13)를 통하여 구동력을 전하고, 리드 스크류(11)는 모터(7)의 구동력에 의해 회전하면서 리프트장치(B)는 리프터(2)와 클램프(3), 로드레스 실린더(4) 그리고 승강 실린더(5) 및 축(12)으로 구성된다. 여기서, 리프터(2)는 수직방향으로 작동하게 설치한 승간 실린더(5)에 의해 수직으로 오르내리며 다중튜브(14)를 올리고 내리는 임무를 수행하고, 로드 레스 실린더(4)는 리프터(2)의 판면에서 앞 뒤 방향으로 평행하게 따낸 한쌍의 안내용 슬릿(2a)을 따라 그 슬릿방향으로 작동하면서 그 위로 옮겨 실린 다중튜브(14)를 끌어내 리프터(2)위로 옮기는 역할을 한다. 이때 다중튜브(14)를 물어주는 것은 로드레스 실린더(4)의 선단에 장착된 클램프(3)이다.In addition, the motor 7 transmits a driving force through a belt 13 wrapped around a poly shaft axially installed at the lower end of the lead screw 11, and the lead screw 11 is rotated by the driving force of the motor 7 while the lift apparatus ( B) consists of a lifter 2 and a clamp 3, a rodless cylinder 4 and a lifting cylinder 5 and a shaft 12. Here, the lifter 2 is vertically moved up and down by the reciprocating cylinder 5 installed to operate in the vertical direction, and performs the task of raising and lowering the multi-tubes 14, and the rodless cylinder 4 of the lifter 2 It acts in the slit direction along a pair of guide slits 2a, which are pulled parallel to the front and back in the plate surface, and serves to draw the multitubes 14 carried on the lifter 2 and move them thereon. At this time, it is the clamp (3) attached to the front end of the rodless cylinder (4) to bury the multi-tube (14).

그리고 단축 로보트(C)는 집적회로 매거진(9)만으로 구성되는데, 이것은 리프터(2)의 좌측에 배치되며 제1도 및 제2도에서 보듯이 다중튜브 매거진(1)의 하단높이로부터 외측을 향하여 하향경사진 슈트를 닮았으며, 서보모터(6)에 의개 제1도의 화살표방향으로 전후진하면서 집적회로 매거진(9)상의 다중튜브(14)속 집적회로를 롤 레일(8) 위치로 정확히 안내하는 일을 하는 것이다.The single-axis robot C is composed of only the integrated circuit magazine 9, which is disposed on the left side of the lifter 2 and faces outward from the bottom height of the multi-tube magazine 1 as shown in FIGS. 1 and 2. It resembles a downwardly inclined chute, and guides the integrated circuit in the multi-tube 14 on the integrated circuit magazine 9 accurately to the roll rail 8 position while advancing back and forth in the direction of the arrow of FIG. 1 to the servomotor 6. To work.

다음으로, 이같은 구성에서 비롯되는 작용과 효과에 대하여 상술한다.Next, the action and effect resulting from such a structure are explained in full detail.

엘리베이터(A)의 모터(7)에서 발생한 동력은 벨트(13)를 거쳐 리드 스크류(11)에 전달되어 리드 스크류(11)를 회전시킨다. 이에따라 다중튜브 매거진(1)의 승강동작이 이뤄지게 된다.Power generated in the motor 7 of the elevator A is transmitted to the lead screw 11 via the belt 13 to rotate the lead screw 11. Accordingly, the lifting operation of the multi-tube magazine 1 is made.

다중튜브 매거진(1)이 상사점에 당도한 후에 다중튜브 로드/언로드 및 리프트장치(B)의 로트레스 실린더(4) 위에 장착된 클램프(3)가 그 실린더(4)에 의해 다중튜브 매거진(1)내에 장착된 다중튜브(14)를 리프트(2)까지 물고 가 싣는다. 이어서 상기 승강 실린더(5)는 축(12)을 기준으로 리프터(2), 클램프(3), 로드레스 실린더(4)를 단축 로보트(9)의 기울기와 일치하도록 로드/언로드시킨다.After the multitube magazine 1 has reached its top dead center, a clamp 3 mounted on the lotless cylinder 4 of the multitube load / unload and lift device B is provided by the cylinder 4 with the multitube magazine ( 1) Hold the multitubes (14) mounted in 1) up to the lift (2). The lifting cylinder 5 then loads / unloads the lifter 2, the clamp 3, and the rodless cylinder 4 relative to the inclination of the single axis robot 9 with respect to the shaft 12.

그후, 단축 로보트(C)는 서보모터(6)로 집적회로 매거진(9)을 좌, 우로 이동시키는 한편 집적회로 매거진(9)은 서보모터(6)로부터 전달되는 구동력에 의해 좌우로 이동하여 집적회로 매거진(9) 내부의 집적회로(15)를 검사하고자 하는 레일(8)로 한 줄씩 이송시켜 준다.After that, the single-axis robot C moves the integrated circuit magazine 9 to the left and right with the servomotor 6 while the integrated circuit magazine 9 moves to the left and right by the driving force transmitted from the servomotor 6 to accumulate. The integrated circuit 15 in the circuit magazine 9 is transferred line by line to the rail 8 to be inspected.

제1도에 있어서, 집적회로가 들어있는 다중튜브(14)를 다중튜브 매거진(1)내에 여러장 삽입한다. 그리고 제3도와 같이 커버(10)를 올려 닫고 본 집적회로 이송장치를 시동한다. 이 장치는 그 시동신호를 받아 클램프(3)가 로드레스 실린더(4)를 타고 전진하여 매거진(1)속의 첫번째 다중튜브를 집어 다중튜브 매거진(1)밖에 위치한 리프트(2) 위치까지 끌어낸다.In FIG. 1, multiple tubes 14 containing integrated circuits are inserted into the multiple tube magazine 1. Then, the cover 10 is lifted up and closed as shown in FIG. 3 to start the integrated circuit transfer device. The device receives the start signal and the clamp (3) advances in the rodless cylinder (4), picks up the first multitube in the magazine (1) and pulls it to the lift (2) position located outside the multitube magazine (1).

다중튜브(14)가 옮겨와 얹힌 리프트(2)는 승강 실린더(5)에 의해 축(12)을 중심으로 상승하여 다중튜브(14)내의 집적회로(15)를 집적회로 매거진(9)으로 전량 이송한다.The lift 2, in which the multitubes 14 are moved and mounted, is lifted about the shaft 12 by the elevating cylinder 5, so that the integrated circuit 15 in the multitubes 14 is transferred to the integrated circuit magazine 9. Transfer.

집적회로를 이송시킨 리프터(2)는 실린더(5)에 의해 하강하고 다중튜브(14)를 쥐고 있던 클램프(3)는 로드레스 실린더(4)에 의해 다중튜브(14)를 다중튜브 매거진(1)내의 작업전의 홈(1a)에 위치시킨다. 이어서 클램프(3)는 다시 벌어지고 곧바로 로드레스 실린더(4)에 의해 후진하여 복귀, 후속작업을 대기한다.The lifter 2, which transported the integrated circuit, is lowered by the cylinder 5, and the clamp 3, which holds the multi-tube 14, moves the multi-tube 14 to the multi-tube magazine 1 by the rodless cylinder 4. ) Is placed in the groove 1a before the operation. The clamp 3 then opens again and immediately retracts by the rodless cylinder 4 to wait for return and subsequent work.

클램프(3)가 복귀하면 다중튜브 매거진(1)은 엘리베이터(A)에 의해 1스텝 밑으로 하강하여 다음 동작을 기다린다.When the clamp 3 returns, the multi-tube magazine 1 descends by one step by the elevator A and waits for the next operation.

한편, 집적회로(15)를 이송받은 집적회로 매거진(9)은 서보모터에 의해 좌우로 움직이며 레일(8)에 한 줄씩의 집적회로(14)를 이송시켜 준다. 집적회로 매거진(9) 내부의 검사하고자 하는 레일(8)로 직접회로(14)가 모두 이송되고 나면 클램프(3)는 로드레스 실린더(4)에 의해 후속 다중튜브(14)를 작업하기 위해 전진하고, 이후에는 앞서 설명한 바와같은 동작을 반복 실행한다.Meanwhile, the integrated circuit magazine 9 which has received the integrated circuit 15 moves left and right by the servo motor and transfers the integrated circuit 14 line by line to the rail 8. After all of the integrated circuit 14 has been transferred to the rail 8 to be inspected inside the integrated circuit magazine 9, the clamp 3 is advanced by the rodless cylinder 4 to work subsequent multitubes 14. After that, the same operation as described above is repeatedly performed.

반도체 조립에 있어서의 집적회로 검사공정에서 다중튜브속에 있는 집적회로를 검사부인 레일로 이송하는 방법에 있어서, 종래에는 다중튜브에 들어있는 집적회로를 양쪽으로 올리고 내려지는 시이소오 방식을 이용하여 날개의 튜브로 이송시킨 후 이를 검사하고자 하는 일로 이송시켜 작업을 이루어 왔었지만, 본 발명은 다중튜브를 다량 장착하여 작업할 수 있는 엘리베이터와 다중튜브를 끌어 낸 다음에 인상시켜 집적회로를 이송하고 난 후 하강하여 다중튜브를 작업전의 위치로 되돌아가도록 구성한 것으로서, 따라서 본 발명에 의하면 다중튜브내의 집적회로를 날개의 튜브로 이송하는 공정이 하나 줄고 단시간에 많은 양의 다중튜브를 적재할 수 있는 구조로 개량되어 있으므로 집적회로의 로딩 타임을 줄임에 따른 생산성 향상 및 인력절감효과를 가져오게 되는 것이다.In the integrated circuit inspection process in the assembly of semiconductors, a method of transferring an integrated circuit in a multi-tube to a rail, which is an inspection unit, has conventionally been carried out by using a siosio method of raising and lowering an integrated circuit contained in a multi-tube on both sides. After the transfer to the work to be inspected it has been done, but the present invention pulls down the elevator and multi-tube after lifting the elevator and multi-tube can be equipped with a large amount of multi-tube work to transfer the integrated circuit and then descend Since the multi-tube is configured to return to the position before the work, according to the present invention, the process of transferring the integrated circuit in the multi-tube to the tube of the wing is reduced to one and the structure can be loaded in a large amount of multi-tube in a short time Improved productivity and reduced manpower by reducing the loading time of integrated circuits It will be the lead.

Claims (1)

다중튜브(14) 삽입용 홈(1a)을 종방향으로 층층이 형성한 다중튜브 매거진(1)을 수직형 안내봉(10)에 설치하여 모터(7)로부터 전해지는 구동력으로 회전하는 리드 스크류(7)에 의해 승강될 수 있게 하고, 상기 다중튜브 매거진(1)의 직전방에는 승강 실린더(5)에 의하여 승강되는 리프터(2)를 설치하고 또한 리프터(2)의 판면에는 전후방향으로 형행하게 한쌍의 슬릿(2a)을 틔우고 여기에 전후방향으로 작동하는 로드 레스 실린더(4)를 설치함과 동시에 여기에 클램프(3)를 장착하고, 리프터(2)의 일측에는 외측단이 하향경사지고 또한 서보모터(6)에 의하여 전후방향으로 이동가능한 집적회로 매거진(9)을 설치하고 이 집적회로 매거진(9)의 외측단에 인접한 작업위치에 집적회로 안내용 레일(8)을 설치한 것을 특징으로 하는 다중튜브 집적회로 이송장치.Lead tube 7 which rotates with the driving force transmitted from the motor 7 by installing the multi-tube magazine 1 having a multi-layered groove 1a for insertion of the multi-tube 14 in the vertical guide rod 10. And a lifter (2) which is lifted and lifted by a lifting cylinder (5) in front of the multi-tube magazine (1), and the plate surface of the lifter (2) in a forward and backward direction. The slit 2a and the rodless cylinder 4 acting in the forward and backward direction, and the clamp 3 is attached thereto, and the outer end is inclined downward on one side of the lifter 2 and the servo It is characterized in that the integrated circuit magazine 9, which is movable in the front and rear direction by the motor 6, is installed, and the integrated circuit guide rail 8 is installed at a work position adjacent to the outer end of the integrated circuit magazine 9. Multitube Integrated Circuit Conveyor.
KR1019920019337A 1992-10-21 1992-10-21 Multi-tube integrated circuit transferring device KR960002491B1 (en)

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