KR960000459A - Manufacturing method of zinc deposited film for film capacitor with excellent oxidation resistance by improving adhesion - Google Patents

Manufacturing method of zinc deposited film for film capacitor with excellent oxidation resistance by improving adhesion Download PDF

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Publication number
KR960000459A
KR960000459A KR1019940014772A KR19940014772A KR960000459A KR 960000459 A KR960000459 A KR 960000459A KR 1019940014772 A KR1019940014772 A KR 1019940014772A KR 19940014772 A KR19940014772 A KR 19940014772A KR 960000459 A KR960000459 A KR 960000459A
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KR
South Korea
Prior art keywords
zinc
film
deposited
resistance
aluminum
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Application number
KR1019940014772A
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Korean (ko)
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KR0141509B1 (en
Inventor
김용한
Original Assignee
박철서
성문전자 주식회사
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Priority to KR1019940014772A priority Critical patent/KR0141509B1/en
Priority to TW084112473A priority patent/TW382825B/en
Publication of KR960000459A publication Critical patent/KR960000459A/en
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Publication of KR0141509B1 publication Critical patent/KR0141509B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004—Details
    • H01G9/04—Electrodes or formation of dielectric layers thereon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/14—Organic dielectrics
    • H01G4/145—Organic dielectrics vapour deposited

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

권취형 금속 증착 플라스틱 필름 콘텐서에 사용되는 금속증착 필름 제조시 진공도 2×10-210-4torr 범위에서 1.5 내지 20㎛ 두께의 플라스틱 유전체 필름의 표면처리를 글로방전(GLOW DISCHARGE), 스퍼터링(SPUTTERING) 또는 접착 에너지가 큰 금속을 저항가열 증착방식(THERMAL EVAPORATION)으로 연속 증착시켜 수분의 침투로 부터 아연막을 보호하여 아연 산화를 방지토록 하는 증착필름의 제법으로서, 글로방전과 스퍼터링은 산소 또는 질소분위기에서 진공도 10-1_10-atorr에서 실시하고,The surface treatment of the wound metal-deposited plastic film vapor-deposited metal film made when the degree of vacuum 2 × 10 -2 10 plastic dielectric film of thickness 1.5 to 20㎛ -4 torr in the range used for the glow discharge cone tensor (GLOW DISCHARGE), sputtering ( It is a method of deposition film that prevents zinc oxidation by protecting the zinc film from moisture penetration by continuously depositing metal with high sputtering) or adhesive energy by THERMAL EVAPORATION. In an atmosphere at a vacuum degree of 10-1_10-atorr,

방식은 진공을 2×10-110-2torr범위내에서 폴리머 표면에 Cr이나 Ti 혹은 알루미늄(Al)의 산화물 또는 금속막을 연속적으로 고르게 형성시켜 주어, 이 중간층(씨앗층)을 이용하여 폴리머와 강산화성 씨앗층간의 강한 접착성을 부여하므로서 아연 증착필름의 내산화성이 향상되며 전기적으로 우수하고 장기 보관이 가능하다.The method uses vacuum to continuously form an evenly formed oxide or metal film of Cr, Ti, or aluminum (Al) on the polymer surface within the range of 2 × 10 -1 10 -2 torr. By providing strong adhesion between the strong oxidizing seed layers, the oxidation resistance of the zinc deposited film is improved, it is excellent in electrical and long-term storage.

중간층 면저항값으로 2000 내지 100Ω/㎡이 되도록 증착시키고, 그 위에 연속적으로 전체저항이 2 내지 8Ω/㎡이 되도록 아연을 증착시킴을 특징으로 하는 내산화성이 우수한 필름 콘덴서용 아연증착 필름의 제조방법.A method for producing a zinc-deposited film for film capacitors having excellent oxidation resistance, characterized in that it is deposited so as to have an intermediate layer sheet resistance value of 2000 to 100 mW / m 2, and subsequently zinc is deposited thereon to have a total resistance of 2 to 8 mW / m 2.

Description

접착력 향상으로 내산화성이 뛰어난 필름콘덴서용 아연 증착필름의 제조방법Manufacturing method of zinc deposited film for film capacitor with excellent oxidation resistance by improving adhesion

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명 아연 증착상태를 나타내는 상태도,1 is a state diagram showing a zinc deposition state of the present invention,

제2도는 금속증착 플라스틱 필름의 수분 침투 경로 예시도,2 is a view illustrating a water penetration path of the metal-deposited plastic film,

제3도는 본 발명의 아연 증착필름의 단면구조도,3 is a cross-sectional view of the zinc deposited film of the present invention,

제4도는 본 발명 아연 증착필름의 내산화성 처리 공정도,4 is a process for oxidation resistance treatment of the zinc deposited film of the present invention,

제5도는 본 발명 아연 증착필름의 내산화 특성을 나타내는 그래프.5 is a graph showing the oxidation resistance of the zinc deposition film of the present invention.

Claims (3)

유전체 폴리머의 표면을 접착에너지가 큰 금속으로 스퍼터링(SPATTERING) 방식에 의해 처리하거나, 저항가열 증착방식(THERMAL EVAPORATI0N)으로 알루미늄이나 주석, 은등의 씨앗층을 단일 또는 복합층으로 연속 증착시킨 후 그 위에 아연이나 아연+알루미늄을 증착시켜 전체면 저항이 2-10Ω/㎡ 되도록 함을 특징으로 하는 내산화성이 향상된 필름콘텐서용 아연중착 필름의 제조방법.The surface of the dielectric polymer is treated with a metal with a large adhesive energy by sputtering, or a seed layer of aluminum, tin, or silver is continuously deposited as a single or a composite layer by resistance heating deposition method (THERMAL EVAPORATI0N). Method of producing a zinc-adhesive film for the film resistance improved oxidation resistance, characterized in that by depositing zinc or zinc + aluminum on the top surface resistance is 2-10Ω / ㎡. 제1항에 있어서, 아연전극을 증착하기 전에 알루미늄 또는 은, 티타늄등 아연보다 산화성이 빠른 금속 씨앗층을 연속적으로 증착시킨 후, 아연을 면저항 3.5-10Ω/㎡ 가 되도록 증착하고, 다시 아연을 보호하기 위해 알루미늄을 연속증착시켜 전체 면저항값이 2∼3.5 Ω/㎡ 되도록 함을 특징으로 하는 필름콘덴서용 아연증착 필름의 제조방법.The method of claim 1, wherein before depositing the zinc electrode, after depositing a metal seed layer having a higher oxidation rate than that of zinc such as aluminum, silver, or titanium, the zinc is deposited to have a sheet resistance of 3.5-10 mW / m 2, and the zinc is further protected. In order to make a continuous deposition of aluminum so that the total sheet resistance value of 2 to 3.5 Ω / ㎡ characterized in that the manufacturing method of the zinc-deposited film for film capacitors. 콘덴서용 폴리머 유전체 필름을 글로방전(GLOW DISCHARGE) 방식으로 02+Ar, 02나 02+N2+Ar 분위기에서 0-기를 생성시킨 후 그 위에 금속 씨앗층 없이 전극금속인 아연만을 연속적으로 증착시켜 전체 면저항 값이 2∼10Ω/㎡ 이 되도록 하는 것과 그 위에 다시 아연층 표면을 글로 방전 또는 스퍼터링 방식으로 아연 보호 산화막을 형성시킴을 특징으로 하는 내산화성이 향상된 필름 콘텐서용 아연증착 필름의 제조방법.Polymer dielectric film for capacitor is produced by GLOW DISCHARGE method in 0 2 + Ar, 0 2 or 0 2 + N 2 + Ar atmosphere, and then 0 - group is continuously formed on it. Of the zinc-deposited film for improved oxidation resistance, characterized in that the total sheet resistance value of 2 to 10Ω / ㎡ by deposition to form a zinc protective oxide film on the surface of the zinc layer by glow discharge or sputtering method. Manufacturing method. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940014772A 1994-06-25 1994-06-25 Method for zinc adhesive strength film KR0141509B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1019940014772A KR0141509B1 (en) 1994-06-25 1994-06-25 Method for zinc adhesive strength film
TW084112473A TW382825B (en) 1994-06-25 1995-11-23 Method for making zinc metallized film for film capacitors exhibiting improved adhesion and thereby having excellent anti-oxidation characteristics

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940014772A KR0141509B1 (en) 1994-06-25 1994-06-25 Method for zinc adhesive strength film

Publications (2)

Publication Number Publication Date
KR960000459A true KR960000459A (en) 1996-01-25
KR0141509B1 KR0141509B1 (en) 1998-07-01

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KR1019940014772A KR0141509B1 (en) 1994-06-25 1994-06-25 Method for zinc adhesive strength film

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TW (1) TW382825B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3307067B2 (en) * 1994-04-15 2002-07-24 東レ株式会社 Evaporated film and capacitor using the same

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KR0141509B1 (en) 1998-07-01
TW382825B (en) 2000-02-21

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