TW382825B - Method for making zinc metallized film for film capacitors exhibiting improved adhesion and thereby having excellent anti-oxidation characteristics - Google Patents

Abstract

A method for making a zinc metallized film for a film capacitor, being capable of protecting the zinc film from moisture and thereby preventing it from oxidizing. The method includes treating a surface of a polymer film with a metal having a high bonding force by use of glow discharge or sputtering process or evaporating a seed layer of aluminum, tin or chromium over the polymer film surface by use of a thermal evaporation process. The glow discharge or sputtering process is carried out in an atmosphere of oxygen or nitrogen at a vacuum of from 10-1 or 10-2 torrs whereas the thermal evaporation process is carried out at a vacuum of from 2x10<-2> to l0-4 torrs. The seed layer as an intermediate layer between the polymer film and zinc film provides a high bonding force between the polymer film and zinc film. By this high bonding force, the zinc metallized film exhibits an improved anti-oxidation property, a superior electrical characteristic and an lengthened use life. The intermediate layer is deposited to have a surface resistance of 100 to 2000 .omega./m2. Over the intermediate layer, zinc is deposited in a continued manner to obtain a total surface resistance of from 2 to 8 .omega./m2.

Description

V. Description of the invention (1 A7 B7 Inventor of the Central Standards Bureau, Masonry Consumer Cooperative, Ministry of Economic Affairs, Background of the Invention: Field of the Invention The present invention relates to a method for manufacturing an improved polymer film with zinc attached and thus having the best antioxidant properties. Method for applying zinc metallized film for film capacitors. The prior art shows that recently, most of the electrical and electronic appliances are compact and thin, so the use of metallized film-wrapped film capacitors has been greatly increased. In particular, This type of wrapped film capacitor exhibits high reliability due to the best high-frequency characteristics and the self-healing ability necessary to maintain film damage or defects on the electrode surface that may be caused by contamination of the wood body. At the same time, it is manufactured In terms of cost, compared with conventional electrolytic capacitors, this type of film capacitor is more beneficial. For these reasons, film capacitors using metal-plated (metalized) films are growing. In terms of metallized film used for capacitors, it can be classified as pure aluminum (A1) plating type, molybdenum _. (A1_Zn) plated type and zinc (^ ... plated type. Compared with those using aluminum plated film (hereinafter referred to as (MF_Al capacitor)) J uses zinc metallized film (hereinafter referred to as MF / zn capacitor) ) Metallized film capacitors have super electrical characteristics. However, this type of capacitor is practically limited because of its low moisture resistance and self-healing characteristics. On the other hand, 'Ming mirror-covered thin molds rely on The fact that Ming's conductivity is higher than that of metallized film can be approved by some people, and f ^ 虿 is equivalent to thickness, so it presents a super self-healing paper. ^ The standard is applicable to countries and countries. ((Please read the precautions on the back before (Fill in this page) .1 order

• _---I 1- I «II · -2 Α7 Β7 5. Description of the invention (2) Characteristics. In particular, in terms of storage characteristics, an aluminum metallized film is advantageous because it is used to chemically stabilize the film due to the formation of molybdenum oxide on its surface, thereby providing the best antioxidant properties. However, this type of aluminum metallized thin film is disadvantageous in that the capacitance decreases over time. Not only that, it is also disadvantageous in terms of cost because it involves high evaporation benefits from L 500 to 1800 ° C under a vacuum of 10-4 to 10-s torrs as its deposition conditions. The deposited film is very thin (100 to 250 mm) and cannot be in contact with lead wires. Due to such a narrow thickness, the deposited film cannot be thickened at the edges. As a result, a kind of film enters the surface portion of the film that contacts the metal spray. Aluminum oxide, a non-conductive material. The aluminum oxide on the metallized film is used to increase the contact resistance between the electrode and the aluminum wire. The zinc metallized film is the opposite, and the capacitance does not increase or slightly over time. It is only increased. The deposition is completed at a vacuum of 10-2 to 10-3701:]: 3 and about 600. (: low temperature. Because of the thickness of zinc metallized film than molybdenum metallized film Larger, zinc oxide is formed on the surface portion of the film in contact with aluminum, thereby reducing the contact resistance between lead and the electrode. This film, such as the aluminum metallized film, is also cost effective. Relying on these Advantages, zinc metallized film has been widely used. Printed by the consumer cooperation of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) However, zinc shows a highly oxidizing property. For example: Polyethylene terephthalate (PET), Polyisopropyl (0PP), Polyethylene ("PE") or Poly (Glycolic Acid) (PC) and other dielectric materials are weak Adhesiveness. For this reason, the zinc layer exhibits low surface adhesion strength. Therefore, the zinc metallized film has the disadvantage that it is easy to scratch on the zinc layer. The oxidation of a typical zinc metallized film is in water and Oxygen penetration into thin —3 — This paper is Λ degree applicable to Chinese National Standards (CNS). M said grid (210 '乂 297 mm). When the staff of the Central Standards Bureau of the Ministry of Economic Affairs cooperated with the printing process, the film was passed through a two-stage continuous method. The oxidation is continued as long as there is water in the film. In the primary stage, the oxidation is carried out in a manner such that Zn + 2H20 Zn (OH) 2 + H2 is carried out in a manner In this way, 2Zn (OH) 2 + 202 — 2ZnO + 2H20 + 〇2 water permeation is carried out through three routes A, B and C as shown in Figure 2. When passing through the A route, the moisture present in the atmospheric pressure With zinc metallized film and capacitor polymer film The water phase coupling of the zinc metallized film is the same as the water phase coupling of the zinc metallized film and the polymer film when it passes through the C line. The feeling of the route is the lowest. Because the zinc film has the characteristics of rapid oxidation in atmospheric pressure and the characteristic of continuing oxidation until the beginning of the liquid immersion stage during the capacitor molding process after film deposition, although its electrical characteristics are the best, the zinc film has Limited in practicality. Also, there will be problems when Zhen T is hidden for a long time. Therefore, while still maintaining the advantages obtained in the zinc metallized film, in order to improve the deposition characteristics of the deposited film, the UK's first; L, Patent No. 754, 064 proposes a method according to which a metal film such as Al2O3 and a metal oxide layer are sprayed with zinc on a polymer film, thereby improving a zinc metallized film. Antioxidant properties. Also, German Patent No. o'osm? Discloses another method in which instead of a multilayer film, a zinc-based alloy such as a Zn_Al alloy is plated on a plastic film as a single layer, thereby achieving improvement in oxidation prevention characteristics. In fact, it is improved when metal such as metal is plated on the 211 layer. "4-This paper size applies to the National Standard of China (CNS) M specification (210X297 mm). Please read the notes on the back before filling in this book. page)

A7 B7 Printed by the Consumer Standards Cooperative of the Central Bureau of Standards 51 5. Description of the invention (4) Antioxidant properties. However, in this case, high temperature and high space are required to deposit C ", and for this reason, this method is not actually adopted. SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a method for manufacturing A method of applying a zinc-coated metallized film for a film capacitor, according to the method of the present invention, uses a polymer film to perform a surface treatment to protect the metallized film with moisture resistance, and a zinc-coated metallized film is plated on the polymer film to increase polymerization. The surface tension of the material film, or the use of a mineral coating on a zinc film—a metal exhibiting high bonding ability.—In accordance with the present invention, a zinc-coated metallized film for manufacturing a film capacitor exhibiting the best oxidation resistance characteristics is provided The method includes the following steps: (a) using a sputtering method or a thermal evaporation method to process a polymer film surface with an aluminum metal having a high bonding ability to form a single type layer (seed layer) And (b) as an electrode alloy, zinc or a zinc aluminum alloy is deposited on the composite structure obtained in step U) to achieve a total surface electric power of 2 to 10 Ω / m2; In another aspect, the method according to the present invention further comprises forming a seed layer composed of aluminum metal having higher oxidation characteristics, depositing a layer of zinc as an electrode alloy, and the step of including the aluminum metal layer as a zinc protective film. The step of welding a sheet to the surface of an electrode alloy made of zinc. In yet another aspect, the present invention provides a method for manufacturing a zinc-coated metallized film for a film capacitor exhibiting the best oxidation resistance characteristics. The steps include: (a) Glow discharge method is used to generate (Γ group, (b) under the atmospheric pressure of 〇2, 〇2 + Αγ or 〇2 + N2 + Ατ under the atmospheric pressure of the polymer film (Please read the back first) Please note this page and fill in this page again),-° This paper size is quick to use China National Standards (CNS) Λ4 specifications (210X297 mm) Central Government Standards of the Ministry of Economic Affairs Employees Cooperatives printed A7 _ B7 V. Description of the invention (5 ) Zinc as an electrode alloy is deposited on the surface of the polymer film to achieve a total surface resistance of 2 to 10 Ω / m2. (C) Glow discharge by sputtering method is used to form a layer of zinc on the zinc-coated film. Protect oxide film. Brief description of the formula: Other objects and features of the present invention can be further understood from the description of the following embodiments and with reference to the drawings. Among them, FIG. 1 is a schematic diagram describing the state of deposited zinc according to the present invention; FIG. 2 is a Schematic diagram describing various invasion routes of water applied to a polymer film by a metal spray; FIG. 3 is a cross-sectional view illustrating a zinc-coated metallized film made in accordance with the present invention; FIG. 4 is a diagram illustrating a method made in accordance with the present invention; A schematic diagram of an empty furnace used for zinc-coated metallized films; and FIG. 5 is a graph describing the comparison of the oxidation resistance characteristics of a conventional film and the zinc-coated metalized film according to the present invention. Detailed description of the invention: Where a metal spray film is formed on the material film, a porous structure tends to appear. When the film is exposed to the atmosphere, water in the air pressure can easily penetrate into the film. In this case, the adhesion properties of the film are degraded, so that oxidation may occur suddenly. In order to improve the anti-oxidation characteristics of metal spray coatings to prevent such oxidation, a seed layer composed of a metal or an oxide exhibiting a high adhesion property to a polymer film may be used. Before applying the above paper on the polymer film, the size of the above-mentioned paper is applicable to the Chinese National Standard (CNS) 6-4 specifications (2) 0x297 mm. Seeding II order I line (please read the precautions on the back before filling this page). 5. Invention Note (6) A7 B7 The black layer metal printed on the consumer cooperative of the employees of the China Standards Bureau of the Ministry of Economic Affairs was sprayed onto the polymer film. The adhesion and oxidation properties of the metal spray film will depend on the type of seed layer. When the adhesive force between the seed layer and the polymer film is low, the welding of the seed layer is not uniform, so that a block shape is generated due to the surface tension energy of the seed crystal (3 °.) In this case, The zinc-coated metallized film applied on the seed layer exhibits secondary adhesion properties. This tendency occurs significantly when a polypropylene or polycarbonate film is used. The anti-oxidation properties of the spray coating and the oxidation mechanism are affected by the spray coating The adhesion properties of polymer films have a great effect. In particular, the two-sided stretched polyisopropylene film (OPP film) typically used as a polymer film for capacitors has a relatively low adhesion tension, for example: dyne / cirf, and polyester (PET) film adheres to the tension of the heart, showing the degradation of the adhesion properties of the zinc layer. For this purpose, this type of polypropylene film is subject to special treatments such as: corona treatment to increase its adhesion to No less than 38-42 dyne / cm2. Root # In the present invention, a zinc-coated metallized film is a capacitor with a thickness of 5 to 20 um, which is sprayed by using aluminum with the best anti-oxidation property as a seed layer. ^ Composite film is made up, so that the aluminum layer has a surface When the resistance is from 100 to 3 或 or the polymer film surface is treated according to glow discharge or sputtering, and then, zinc is sprayed on the synthesized thin film structure, so that the total surface resistance of the thin film structure is 3 to 4 .οΩ / m2. The zinc-plated metallized film is formed in—as shown in FIG. 4, including an upper chamber 9 and a vacuum degree maintained at 2) &lt; 1〇_2 七 〇1 ^ 3. The continuous process was performed in a vacuum furnace maintained in a lower chamber 10 of 2 × 10-4 torrsT. In particular, aluminum metal spraying is performed in a vacuum &amp; aluminum metal spraying zone 5 and zinc metal spraying is performed in a zinc furnace spraying zone 6 of a vacuum furnace. On the other hand, the treatment of polymer film f read the notes on the back before filling in this page j

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、 1T This paper size is applicable to Chinese National Standard (CNS) 8 4 Lin (2 丨 〇 &gt; &lt; 297 mm) Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 5. The description of the invention (7) This takes place in a plasma application zone 4 in a vacuum chamber. In the vacuum chamber shown in Figure 4, the capacitor film is continuously fed from a bottom film sleeve 2 to a cooling cylinder 1 ° at a speed of not less than 6 m / sec. The polymer film is fed by the cooling cylinder 1 while the cylinder 1 remains in contact, and then wound onto the roll film tray 3. As it is fed along the cooling cylinder 1, the polymer film passes through the zinc metal spray zone 6 in this zone from 600 to 800. (: The high-temperature zinc vapor adheres the polymer film. Then the cooling cylinder 1 maintained at a temperature from -M to -10 ° C is used to rapidly cool the zinc-coated metallized film. In the polymer film or polymer The membrane metal electrode is formed with a metal seed layer, which is fed at a high speed. The metal seed layer is formed in the plasma region 4 which is a batch-type vacuum tank by using one plus or one according to the glow discharge or sputtering method. ! ^ The power supply is also used to give a certain ratio of inert gas and oxygen or radon gas to the plasma area 4 to generate a plasma that exhibits a high oxidation rate metal. Another alternative is that a thermal evaporation method can be used in A metal seed layer is formed in the aluminum metal spraying area 5. According to this metal seed layer, an anti-oxidation film containing a high adhesion force can be formed on a polymer film or a metal electrode. Since the zinc-coated metallized film has micropolycrystals The structure has atomic adhesion to the polymer film. However, because the thermal energy is converted into absorbed energy and energy consumption is caused, the above-mentioned dead force is not sufficient. Polyethylene terephthalate used to form a thermally insulating polymer film (PET) and oriented polyisopropene (〇pp) each have the following molecular structure. —8 — This paper size applies to China National Standard (CNS) A4 specifications (210X297 mm) (Please read the precautions on the back before filling (This page) Order a T-B7 invention description (Η i-FREE The molecular structure contains oxygen, as long as the vinegar is mixed with the highly oxidizing metal in the seed layer, and it shows a high adhesion between the oxygen and the seed layer atom. In this way, the objective It is a strong metal combination between the seed metal and zinc _ knotted __ can be obtained when zinc is placed on the surface-uniform W dense diaphragm, so the oxidation resistance in this situation has However, it is impossible to expect such characteristics when the polymer does not contain oxygen groups such as polyisopropene. Therefore, for this polymer, the surface treatment needs to be performed in accordance with sputtering or glow discharge method. Plasma with a small amount of oxygen is carried out under atmospheric pressure. When such a surface treatment is performed, the film can have oxygen-containing molecules on the surface. Then, a metal having a highly oxidizing property is formed on the surface-treated polymer film by sputtering or ion plating. In this case, as in the case of PET thin mold, due to the above-mentioned treatment, a uniform and tight zinc layer can be deposited on the polymer film. In this way, it can obtain high adhesion and Capacitor with the best anti-oxidation properties. The surface treatment and protective film of the metal film exhibiting high oxidation properties are performed by a continuous method. Therefore, the purpose of the present invention is to use a DC power supply—a kind of electro-polymerization or conversion treatment method or use Extinguishing method—applicable to Chinese paper standard (CNS) A4 (210X297 mm) for the paper size of this layer. F Please read the precautions on the back before filling this page. Preparation of A7 B7 V. Description of the invention (9) The oxide or halide layer is formed in a high-oxidizing manner to prevent the oxidation of the metal electrode. The method of the invention is suitable for treating the surface of one or both sides of a metal electrode or a polymer film under a vacuum of 10-2 to 10-β torr / αη3, so as to enhance the adhesion between the film and the electrode, thereby achieving adhesion. The improvement in strength can thus improve the antioxidant properties. According to the method of the present invention, an oxide or halide film is coated on a surface of one or both surfaces of a polymer film to a thin film metal electrode having a thickness of 100 to 150 A by a continuous deposition method. The oxide or nitride film is generated by a plasma atmosphere generated by an electric field set at a DC or RF voltage of 400 to 1000 V. The plasma atmospheric pressure is supplied through a gas control threshold (MFC: mass flow controller) combined with an inert gas and a mixture of oxygen and krypton. In the plasma atmosphere, oxygen or radon reacts with a target material, that is, a material to be deposited as an oxide or a halide, and forms a 50 to 200 ^ on a metal electrode. An oxide or halide coating. In order to prevent the zinc coating film from being oxidized by water or oxygen, a layer made of materials such as chromium, titanium, niobium, or aluminum is formed on the zinc coating film to exhibit a highly oxidizing layer to form a fastened oxide film. sheet. Due to this oxide film, the zinc-coated thin film exhibits excellent oxygen-reducing properties. According to a first embodiment of the present invention in which a 0PP film is applied to a capacitor, the surface tension of the polymer film is enhanced to increase the adhesion between the polymer film and the metal deposited film. With this enhanced adhesion, the metallized metal film and the polymer film are firmly combined. In order to strengthen -10-This paper · size applies Chinese National Standard (CNS) A4 specification (2IOX297). (Please read the precautions on the back before filling this page) Order A7 B7 10 V. Description of the invention (surface tension energy, use According to the glow discharge method, the plasma produced in a vacuum dazzle is used to process the polymer membrane. The thickness of the polymer membrane is generated from 20 to several tens of thousands of units on the polymer membrane using the two methods of electric discharge. ^^ x The seed layer of vA, ^^ QStrorn, thereby activating the polymer membrane (Zη-0-C-, Znηα α π 屮, Α 丄 —0—C or Al-NC) as follows:

CH,-CH I-CH, η

CH2-CH Η-CII 〇j-or-£ ch2-CH-I — c — i 0-(Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Central Sample Bureau of the Ministry of Economic Affairs A layer with high oxidation properties such as chromium, titanium, aluminum, or silver or an aluminum alloy is evenly deposited on the seed layer to a thickness of 5 to hundreds of thousands of angstroms. A layer of zinc or aluminum-zinc alloy was over-clad on the synthesized structure, so that a multilayer film structure was obtained. According to a second embodiment of the present invention, according to a sputtering method, an argon gas of argon 'or argon + oxygen or argon + nitrogen generated by an RF power source is used in the atmospheric pressure, and target materials such as aluminum, silver, or zinc are polymerized. A layer is formed on the film. At this time, oxygen or radon gas is provided on the surface of the polymer membrane, and then, according to the same method as in the first embodiment, zinc or a zinc alloy is deposited on the synthesized structure. According to this embodiment, improvements in oxidation resistance and adhesion characteristics are obtained. Because the fastened oxide or halide layer is used to protect the metal diaphragm from the water contained in the polymer diaphragm or penetrate into the polymer diaphragm from the outside, the metal sprayed film has an improved resistance Oxidation characteristics-11- This paper size applies to China National Standard (CNS) A4 (210X297 mm). The central government ’s Bureau of Standards, Ministry of Economic Affairs, employee consumption cooperation printed A7 _______ B7 V. Description of the invention (U). At the same time, an oxide or emulsion film formed on the metal electrode to a thickness of from 50 to 10 "is used to provide a thin film that protects the metal electroplated electrode from the moisture present in the atmosphere. According to the invention, a third In the embodiment, a thermal evaporation method is used to deposit a metal having a higher oxidation effect than zinc as an intermediate layer so as to reach a thickness of from 20 to 501 to be deposited on a polymer film. Thereafter, in synthesis A layer of zinc coating is deposited on the structure of the structure. Because the zinc coating is in a reduction potential state, the intermediate layer is oxidized before the zinc coating is oxidized, thereby forming an oxide with a fastening structure. Film. Because the giant potential is _1662 V and the zinc potential is _〇763 V, when the intermediate layer is made of aluminum, the intermediate layer is in an oxidation potential state and the zinc-coated film is in a reducing potential state. Therefore, in The zinc-coated film oxidizes the aluminum-coated film before it oxidizes. In addition, since the oxide film is produced when the film is oxidized, no jafani battery is formed, and thus the zinc-coated film can be prevented from rapidly oxidizing. This oxide The film is used to protect the zinc-coated film from the water contained in or penetrated by the polymer film. Therefore, the zinc-coated film exhibits improved antioxidant properties. The intermediate layer metal (A1 + 3) The electrode metal, that is, zinc (Zn + 2), is transferred to the surface of the polymer film. In this way, the intermediate metal is coated with zinc film in advance and coupled with oxygen, thereby forming a thickness from 20 to 50 × Oxide film. This oxide film is used to protect the zinc-coated film from the water immersed in the polymer film from the atmosphere. &Amp; According to the present invention, another method can also be performed, which The method can be applied to high-voltage capacitors. The method involves covering a polymer film—Laohang g -12-This paper is sized to the Chinese National Standard (CNS) VIII (210X 297 mm) (Please read first Note on the back, please fill in this page again), 1T printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs A7 B7 5. Description of the invention (12) The thin film is used as electrode metal to deposit zinc on the anti-oxidation coating film, and then, Weld on a zinc film Layer is a metal protective layer that prevents the oxidation of the zinc coating film. According to this method, zinc is deposited on the polymer film to achieve a surface resistance from 4 to 100 Ω / m2. As for the metal protection layer, The continuous method is applied to the zinc coating to achieve a surface resistance of 2 to ίο Ω / nf. In this way, a multi-layer structure can be obtained by the continuous welding method. According to the method described above, the zinc coating can be maximized. Good anti-oxidation characteristics and various advantages. This invention will be easily understood by referring to the following examples. However, the following examples are used to describe the content of this invention and are not meant to limit the scope of the invention. Example 1 In a vacuum chamber with a vacuum of 2XlO-2torrs in the upper chamber and a vacuum of 2X10-torrs in the lower chamber, aluminum was deposited as a seed layer to a corona-treated polyisocyanate having a thickness of 4 to 6 / im. Acrylic diaphragm. Welding is performed in this way to achieve a surface resistance from 100 to 300 Ω / m2. After that, zinc was deposited on the molybdenum-coated film to achieve a surface resistance from 3 to 4 Ω / m2, thus obtaining a metallized capacitor film structure. Then the capacitor film structure was stored in a constant temperature and humidity container maintained at a temperature of 60 ° C and a relative humidity of 80% to different hours of 2, 8, 12, and 20 hours to measure the change in surface resistance. The degree of oxidation of the diaphragm is measured on the basis of the changes measured on the surface resistance. The measured results are shown in Fig. 5. (Please read the precautions on the back before filling out this page) -13-This paper size applies to Chinese National Standard (CNS) A4 specification (210 × 297 mm) A7 B7 38 ^ 825 V. Description of the invention (13 Examples (please listen first Read the notes on the back of the document and fill in the text.) A capacitor film structure was made in the same way as in Example 1. In addition, aluminum was deposited on the zinc film of the capacitor film structure to achieve a surface of 3 Ω / nf. Resistance. The synthetic capacitor film structure was measured in the same manner as in Example 1 to determine its degree of oxidation, and the measurement results are shown in Figure 5. Example 3 Preparation of a polymer without corona treatment 6 &quot; Isopropene diaphragm. Then place the polyisopropene diaphragm in the upper chamber as Ar (6) in a vacuum furnace with a vacuum of 2Xi &lt; torrs and a lower chamber of 2: 1104 torrs. 〇%) + 〇 (40%) under a glow discharge treatment. Then, as a seed layer ^ aluminum was deposited on the polyisopropylene film. Zinc was deposited on the molybdenum layer by a continuous method to achieve a total The surface resistance is 3 Q / fen. In this way, a gold spray plating electrode is obtained H film structure. The capacitor thin-lin structure was measured in the same manner as in Example 1 to determine the degree of oxidation. The measurement results are shown in Figure 5. Example 4 No seed layer was formed except on the polyisopropylfluorene film In addition, the same method as in Example 3 was used to obtain the thin film structure of gold-plated capacitors. The film structure of the printed film device of the Consumer Cooperative of the Central Standards Bureau of the Ministry of Capacitive Economy was made in the same manner to determine its oxidation. The measured results are shown in Fig. 5. Example 5 = The continuous method using the same method as that of 3 towels was applied to the same polyisopropene film as in Example 3, using continuous: -A7 3S2825 V. Description of the invention (14) Apply Ming Xuan to the zinc film to achieve the surface resistance, thus achieving a total surface resistance of about 25 Ω / nf. This will obtain a metal spray capacitor film structure. This capacitor film structure was measured in the same manner as in Example 1 to determine its degree of oxidation. The measurement results are shown in Figure 5. Example 6 A continuous method using the same method as in Example 3 was used. Zinc was deposited on the same polyisopropylene film as in Example 3. Next, the zinc-coated film was subjected to a glow discharge treatment in the lower chamber, thereby achieving the total surface resistance. In this way, a metal sprayed capacitor film structure was obtained. The thin-film structure of this capacitor was measured in the same manner as in Example 1 to determine the degree of oxidation. The measurement results are shown in Figure 5. Comparative Example: Zinc was applied to a polyisopropene or polyterephthalic acid The total surface resistance of the ethylene glycol film was 3.5 Q / permissible. In this way, a welded capacitor film structure was obtained. The capacitor film structure was measured in the same manner as in Example 1 to determine the degree of oxidation. The measured results are shown in FIG. 5. As can be seen from referring to Fig. 5, the capacitor film structures of Examples 1 to 6 exhibited superior oxidation resistance compared to the comparative example. At the same time, it was also found that the capacitor film structures of the 'Examples 1 to 6 showed improvement in electrical properties (improvement of long-term reliability and small degree of capacitive reduction, etc.). Although the above is for the purpose of illustration, the preferred embodiments of the present invention are disclosed: Any person skilled in the art knows that without departing from the spirit and scope of the present invention disclosed in the scope of the patent application, its various changes, additions and substitutions are Possible 0 China m. Tfjf nm ^ n · — tn · n ^ i 1 -1 ml nn ^^ — B— nw I · 1 (Please read the notes on the back before filling this page) Staff of the Central Standards Bureau of the Ministry of Economic Affairs Consumer Cooperatives Printing-15-

Claims (1)

Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 38 ^ 825 6. Scope of Patent Application (Revised Edition) 1. A method for manufacturing a metallized film for film capacitors exhibiting the best oxidation resistance, including the following steps: (a ) Using a sputtering method or a thermal evaporation method to treat the surface of a polymer diaphragm with an aluminum metal having a high bonding ability to make a single layer / layer, (b) using zinc or zinc aluminum as an electrode alloy The alloy is deposited onto the resultant structure obtained in step (a) to achieve a total surface yield of 2 to 10 Ω / rrf. 2. If the method of claim 1 is applied, it is characterized in that: it is made of / made of a layer of aluminum metal with high oxidation characteristics, deposited as an electrode alloy with a layer of zinc and 尙 includes the aluminum metal layer as a A step of welding a zinc protective film onto the surface of an electrode alloy made of zinc. 3. A method for manufacturing a zinc-coated metallized film for thin film capacitors exhibiting the best anti-oxidation characteristics, including the following steps: (a) using a glow discharge method at 〇2, 〇2 + Αγ or 〇2 + N2 + Ar O-groups are generated on the surface of the polymer membrane at atmospheric pressure. (B) Zinc as an electrode alloy is deposited on the surface of the polymer film without the need to make a metal seed layer to achieve 2 to 10 Ω / m2. Total surface resistance, (c) Glow discharge on the zinc-coated thin film using a sputtering method to form an upper-layer zinc protective oxide film. This paper size is suitable for Ning Guozhen (CNS> A4 specification (2i0X297mm) -S0 C 锖 First read and read the notes on the back and fill in the purchase)