KR960000217B1 - Semiconductor device mold epoxy resin - Google Patents
Semiconductor device mold epoxy resin Download PDFInfo
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- KR960000217B1 KR960000217B1 KR1019920010311A KR920010311A KR960000217B1 KR 960000217 B1 KR960000217 B1 KR 960000217B1 KR 1019920010311 A KR1019920010311 A KR 1019920010311A KR 920010311 A KR920010311 A KR 920010311A KR 960000217 B1 KR960000217 B1 KR 960000217B1
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- epoxy resin
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- flame retardant
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
- H01L23/18—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
Abstract
Description
본 발명은 열경화성 수지 조성물에 관한 것으로서, 상세하게로는 경화시간이 단축되고 내습성과 전기적 특성이 향상된 반도체소자 봉지용 에폭시수지 조성물에 관한 것이다.The present invention relates to a thermosetting resin composition, and more particularly, to an epoxy resin composition for encapsulating a semiconductor device having a short curing time and improved moisture resistance and electrical properties.
최근에는 반도체소자 봉지기술과 반도체소자 봉지장비의 발전으로 인하여 수동식인 싱글-플렌저 성형방식 보다 자동성형 방식이 많이 사용되고 있으므로 봉지재도 자동성형에 적합하도록 경화반응시간을 증가시켜 짧은 성형시간 내에 성형이 가능하도록 경화반응성을 개선할 필요가 있다.Recently, due to the development of semiconductor device encapsulation technology and semiconductor device encapsulation equipment, the automatic molding method is used more than the manual single-plunger molding method, so the encapsulant also increases the curing reaction time to be suitable for automatic molding. It is necessary to improve the curing reactivity so as to be possible.
이에 관한 종래의 기술로는 일본 공개특허 91-24116, 91-45622, 91-88818, 91-292325호 등에서 개시된 바와 같이 이미다졸류 및 3급 아민류, 포스핀류, 테트라페닐보레이트 염류 등으로 경화속도를 조절하는 방법이 있다.As a related art, as disclosed in Japanese Patent Laid-Open Publication Nos. 91-24116, 91-45622, 91-88818, 91-292325 and the like, the curing rate is increased by imidazoles, tertiary amines, phosphines, tetraphenylborate salts, and the like. There is a way to control it.
그러나 상기 방법들은 성형공정후 봉지재 중에 잔존하는 에폭시기 및 수산기로 인하여 내습성 및 전기적 특성이 취약하게 되는 문제점이 있다.However, the above methods have a problem in that moisture resistance and electrical properties become weak due to the epoxy group and the hydroxyl group remaining in the encapsulant after the molding process.
본 발명은 상기 문제점을 해소하기 위한 것으로, 경화반응성과 내습성 및 전기적 특성이 향상된 반도체소자 봉지용 에폭시수지 조성물을 제공하는 것을 목적으로 한다.The present invention is to solve the above problems, an object of the present invention is to provide an epoxy resin composition for encapsulating semiconductor device improved curing reactivity, moisture resistance and electrical properties.
본 발명자들은 상기 목적을 달성하기 위하여 연구한 결과, 에폭시수지 경화제로서 일반적으로 사용되고 있는 올소크레졸노볼락 페놀수지 보다 반응성이 빠른 하기와 같은 구조를 갖는 경화제를 사용하게 되면 경화반응속도가 증가하여 경화반응성이 향상됨과 아울러, 내습성과 전기적 특성이 저하를 방지할 수 있음을 밝혀내게 되었다.The present inventors have studied to achieve the above object, as a result of using the curing agent having the following structure is faster than the allocresol novolac phenol resin commonly used as epoxy resin curing agent increases the curing reaction rate In addition to these improvements, it has been found that moisture resistance and electrical properties can prevent degradation.
이하 본 발명을 상세히 설명한다.Hereinafter, the present invention will be described in detail.
본 발명의 조성물 및 바람직한 조성비는 아래의 표 1)과 같다.Compositions and preferred composition ratios of the present invention are shown in Table 1) below.
[표 1]TABLE 1
본 발명에서 사용되는 조성물의 성분을 구체적으로 설명하면, 에폭시수지는 올소-크레졸노볼락형이나 비스-페놀 A형 에폭시수지로서 1분자 중에 적어도 에폭시기를 2개 이상 가지는 EOCN-1020(일본화약(주), 연화점 65-70℃,에폭시 당량 190-210), ESCN-195XL(스미토모 화학(주), 연화점 65-70℃, 에폭시 당량 200-210) 등이 적합하고, 무기충전제의 함량에 따라 에폭시수지의 연화점, 점도 등을 조절하여 사용한다.Specifically, the components of the composition used in the present invention, an epoxy resin is an oxo-cresol novolak-type or bis-phenol A-type epoxy resin having at least two epoxy groups in one molecule of EOCN-1020 ), Softening point 65-70 ℃, epoxy equivalent 190-210), ESCN-195XL (Sumitomo Chemical Co., Ltd., softening point 65-70 ℃, epoxy equivalent 200-210), etc., and epoxy resins depending on the content of inorganic filler Adjust the softening point, viscosity and so on.
유기난연제는 브롬화 노볼락에폭시나 브롬화 비스-페놀 A형 에폭시 등으로 BREN-S(일본화학(주), 연화점 85-100℃, 에폭시 당량 250-300), ESB-400T(스미토모화학(주), 연화점 65-85℃,에폭시 당량 300-400) 등을 사용하며, 경화제는 올소-크레졸 노볼락형 페놀수지 PSM-4261(군영화학(주), 연화점 70-85℃, 수산기 당량 105-107)와 구조식(Ⅰ)-(Ⅳ)와 같은 경화제를 사용한다.Organic flame retardants are brominated novolac epoxy or brominated bis-phenol A epoxy, etc. BREN-S (Japan Chemical Co., Ltd., softening point 85-100 ° C, epoxy equivalent 250-300), ESB-400T (Sumitomo Chemical Co., Ltd.) Softening point 65-85 ℃, epoxy equivalent 300-400), etc., and the curing agent is Osocrecresol novolak-type phenolic resin PSM-4261 (Gunyoung Chemical Co., Ltd., softening point 70-85 ℃, hydroxyl equivalent 105-107) and A curing agent such as Structural Formulas (I)-(IV) is used.
개질제는 분자량이 1000-8000인 에폭시, 아민, 카르복실 변성 실리콘 오일류나, 실리콘 분말, 기타 열가소성 수지 등을 사용하고, 무기충전재 A는 평균입도가 20-3O㎛인 고순도 용융 구상 실리카이며, 무기충전재 B는 평균입도가 3-10㎛인 고순도 용융파쇄형 실리카이다.Modifiers include epoxy, amine, and carboxyl modified silicone oils having molecular weights of 1000-8000, silicone powders, and other thermoplastic resins. Inorganic filler A is a high-purity fused spherical silica with an average particle size of 20-3O m. B is a high purity melt crushed silica having an average particle size of 3-10 μm.
무기난연재는 안티몬트리옥사이드나 안티몬펜타옥사이드로서 평균입도가 5㎛ 이하인 것을 사용하며, 결합제는 에폭시기나 아민기를 가지는 글리시독시 프로필 트리메톡시 실란계 등이 사용될 수 있다.As the inorganic flame retardant, antimony trioxide or antimony penta oxide may be used having an average particle size of 5 μm or less, and a binder may be a glycidoxy propyl trimethoxy silane system having an epoxy group or an amine group.
이형제는 천연 왁스류나 합성왁스, 지방산 등을 적당한 비율로 혼용하여 사용하며, 사용량은 0.5-1.0중량부가 적당하다.The release agent is used by mixing natural waxes, synthetic waxes, fatty acids, etc. in an appropriate ratio, and the amount of use is appropriately 0.5-1.0 parts by weight.
착색제는 카아본 블랙을 사용하며, 경화촉진제는 이미다졸류, 포스핀류, 3급 아민류, 테트라트리페닐 보레이트 염류등을 반도체칩의 집적도에 따라서 적당한 비율로 오혼용하여 사용한다.The colorant is carbon black, and the curing accelerator is mixed with imidazoles, phosphines, tertiary amines, tetratriphenyl borate salts, etc. at an appropriate ratio depending on the degree of integration of the semiconductor chip.
본 발명의 실시예는 다음과 같다.Embodiments of the present invention are as follows.
[실시예 1]Example 1
표 1)의 조성 중 경화제 A는 올소-크레졸 노볼락형 페놀수지를 사용하고, 경화제 B는 구조식(I)의 성분을 15.0중량부 사용하며, 나머지는 표 1)에 기재된 바와 같은 중량비로 평량하여 분쇄혼합기에 미세하게 분쇄한 다음, 용융혼합기(two-roll MILL, KNEADER)에서 온도 80℃에서 7분간 용융혼합하고 상온으로 냉각하여 분말상태로 분쇄한다.In the composition of Table 1), the curing agent A uses an oxo-cresol novolak-type phenolic resin, the curing agent B uses 15.0 parts by weight of the component of formula (I), and the remainder is basis weight in a weight ratio as described in Table 1). After finely pulverizing in a pulverizing mixer, melt-mixed for 7 minutes at a temperature of 80 ℃ in a two-roll MILL (KNEADER), cooled to room temperature and pulverized to a powder state.
상기와 같이 제조된 에폭시수지조성물을 가열 이송성형기(175℃, 180℃, 45sec, 90sec, 70kg/㎠)를 이용하여 유동성, 경화속도, 유리전이온도, 내습특성, 전기특성(체적저항)등과, 경화물에 잔존하는 에폭시, 수산기 등을 측정하여 그 결과를 표 2)에 나타내었다.Epoxy resin composition prepared as described above using a heat transfer molding machine (175 ℃, 180 ℃, 45 sec, 90 sec, 70kg / ㎠) fluidity, curing rate, glass transition temperature, moisture resistance, electrical characteristics (volume resistance) and the like, The epoxy, hydroxyl groups, etc. which remain | survived in hardened | cured material were measured, and the result is shown in Table 2).
각 측정방법은 다음과 같다.Each measuring method is as follows.
* 유동성 측정* Liquidity measurement
EMMI-I-66 측정방법으로 스파이럴 플로우 금형(spiral flow mold)에서 가열이송 성형기(175℃, 90sec, 70kg/㎠)로 측정한다.It is measured by a heat transfer molding machine (175 ° C., 90 sec, 70 kg / cm 2) in a spiral flow mold by the EMMI-I-66 measuring method.
* 경화속도 측정* Curing rate measurement
JIS-6910방법에 의거 핫플레이트(175℃)에서 용융시켜 경화되는 시간을 측정한다.According to JIS-6910 method, the time which melts and hardens on a hotplate (175 degreeC) is measured.
* 유리전이온도 측정* Glass transition temperature measurement
ASTM-D-790에 준하여 시편을 제작한 다음, 열분석기(TMA)를 이용하여 유리전이온도를 측정한다. 이때 시편 성형조건을 온도 180℃, 성형 압력 70kg/㎠, 성형시간을 45sec로 한다.After the specimen is prepared according to ASTM-D-790, the glass transition temperature is measured using a thermal analyzer (TMA). At this time, the specimen molding conditions were 180 ° C., molding pressure 70 kg / cm 2, and the molding time was 45 sec.
* 내습특성 측정* Moisture resistance measurement
내습특성용 시편(가로 4cm, 세로 2cm, 두께 0.5cm)을 이송성형기(180℃, 45sec, 70kg/㎠)로 성형하여, 각 시편의 무게를 평량항 다음 가열, 포화수증기(121℃, 2atm)분위기 하에 48시간 방치한 후, 무게를 평량하게 흡수된 수분의 량(흡수율)을 측정한다.Specimens for moisture resistance (width 4cm, length 2cm, thickness 0.5cm) are molded by a transfer molding machine (180 ℃, 45sec, 70kg / ㎠), and the weight of each specimen is heated after the basis weight term, saturated steam (121 ℃, 2atm) After leaving for 48 hours in the atmosphere, the amount of water (absorption rate) absorbed in a weight basis is measured.
* 전기적 특성(체적저항) 측정* Measurement of electrical characteristics (volume resistance)
ASTM-D-257 방법에 의하여 시편(지름 10cm, 두께 0.35cm)을 제작하고 가열, 포화 수증기(121℃, 2atm) 분위기 하에 48시간 방지 전후의 체적 저항을 상온, 고온(100℃)에서 측정하였다.Specimens (diameter 10 cm, thickness 0.35 cm) were prepared by the ASTM-D-257 method, and the volume resistivity was measured at room temperature and high temperature (100 ° C) before and after 48 hours under heating and saturated steam (121 ° C, 2atm) atmosphere. .
* 미반응 에폭시기, 수산기의 측정* Measurement of unreacted epoxy group and hydroxyl group
에폭시 조성물을 이송성형기(180℃, 48sec, 70kg/㎠)에서 시편을 성형하여 FT-IR로 미반응기(에폭시, 수산기)를 측정한다.The epoxy composition is molded in a transfer molding machine (180 ° C., 48 sec, 70 kg / cm 2) and the unreacted (epoxy, hydroxyl) is measured by FT-IR.
[실시예 2]Example 2
실시예 1의 경화제 B로 구조식(Ⅱ)를 5.0중량부 사용한 것을 제외하고는 실시예 1)과 동일하게 제조 및 평가시험을 실시하였다.Preparation and evaluation tests were carried out in the same manner as in Example 1), except that 5.0 parts by weight of Structural Formula (II) was used as the curing agent B of Example 1.
[실시예 3]Example 3
실시예 1의 경화제 B로 구조식 (Ⅲ)을 3.0중량부 사용할 것을 제외하고 실시예 1)과 동일하게 제조 및 평가시험을 실시하였다.Preparation and evaluation tests were carried out in the same manner as in Example 1), except that 3.0 parts by weight of Structural Formula (III) was used as the curing agent B of Example 1.
[실시예 4]Example 4
실시예 1의 경화제 B로 구조식 (Ⅳ)를 3.0중량부 사용한 것을 제외하고 실시예 1)과 동일하게 제조 및 평가시험을 실시하였다.Preparation and evaluation tests were carried out in the same manner as in Example 1), except that 3.0 parts by weight of Structural Formula (IV) was used as the curing agent B of Example 1.
[비교예 1]Comparative Example 1
실시예 1)의 경화제 B를 사용하지 아니하고 경화제 A만 60.0중량부 사용한 것을 제외하고 실시예 1과 동일하게 제조 및 평가시험을 실시하였다.The preparation and evaluation test were carried out in the same manner as in Example 1, except that only 60.0 parts by weight of the curing agent A was used without using the curing agent B of Example 1).
[표 2]TABLE 2
* 1 : 상기 에폭시 조성물을 DIP-18PIN PACKAGE에 성형한 다음, 가열, 포화수증기(PCT : 121℃, 2atm) 분위기에서 500시간 방치한 다음, 누설전류를 측정함.* 1: The epoxy composition was molded in DIP-18PIN PACKAGE, and then left for 500 hours in a heated, saturated steam (PCT: 121 ° C, 2atm) atmosphere, and then leakage current was measured.
본 발명은 상기 표 2)에서 나타난 바와 같이, 에폭시수지조성물 중 경화제 B로 구조식 I-Ⅳ)과 같은 구조를 가진 경화제를 사용함으로써 짧은 성형 조건(180℃, 45sec)에서 미반응기를 급격하게 감소시켜 흡수율, 체적저항 등을 개선하였고, 아울러 기존의 에폭시수지조성물보다 누설전류에 의해 불량율을 개선하는 효과를 나타내다.In the present invention, as shown in Table 2), by using a curing agent having the same structure as the formula (I-IV) as the curing agent B in the epoxy resin composition to reduce the unreacted radical rapidly at short molding conditions (180 ℃, 45 sec) Absorption rate, volume resistance, etc. are improved, and the defect rate is improved by leakage current than conventional epoxy resin composition.
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WO2015076633A1 (en) * | 2013-11-25 | 2015-05-28 | 주식회사 엘지화학 | Composition for forming conductive pattern, and resin structure having conductive pattern |
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