KR950701081A - 캐스팅에 의한 집적 섬유칩 결합을 갖는 광학 중합체 부품 제조 방법(Mehtod for producing optical polymer components having integrated fibre-chip coupling by means of casting technology) - Google Patents
캐스팅에 의한 집적 섬유칩 결합을 갖는 광학 중합체 부품 제조 방법(Mehtod for producing optical polymer components having integrated fibre-chip coupling by means of casting technology)Info
- Publication number
- KR950701081A KR950701081A KR1019940703633A KR19940703633A KR950701081A KR 950701081 A KR950701081 A KR 950701081A KR 1019940703633 A KR1019940703633 A KR 1019940703633A KR 19940703633 A KR19940703633 A KR 19940703633A KR 950701081 A KR950701081 A KR 950701081A
- Authority
- KR
- South Korea
- Prior art keywords
- polymer components
- casting technology
- producing optical
- optical polymer
- integrated fiber
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
- B29C33/3857—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
- B29C33/3878—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts used as masters for making successive impressions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
- B29D11/0075—Connectors for light guides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4202—Packages, e.g. shape, construction, internal or external details for coupling an active element with fibres without intermediate optical elements, e.g. fibres with plane ends, fibres with shaped ends, bundles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0838—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using laser
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/061—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material
- G02F1/065—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material in an optical waveguide structure
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Ophthalmology & Optometry (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4212208A DE4212208A1 (de) | 1992-04-10 | 1992-04-10 | Verfahren zur Herstellung optischer Polymerbauelemente mit integrierter Faser-Chip-Kopplung in Abformtechnik |
PCT/DE1993/000248 WO1993021550A1 (de) | 1992-04-10 | 1993-03-18 | Verfahren zur herstellung optischer polymerbauelemente mit integrierter faser-chip-kopplung in abformtechnik |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950701081A true KR950701081A (ko) | 1995-02-20 |
Family
ID=6456625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940703633A KR950701081A (ko) | 1992-04-10 | 1994-10-10 | 캐스팅에 의한 집적 섬유칩 결합을 갖는 광학 중합체 부품 제조 방법(Mehtod for producing optical polymer components having integrated fibre-chip coupling by means of casting technology) |
Country Status (7)
Country | Link |
---|---|
US (1) | US5526454A (ko) |
EP (1) | EP0635139B1 (ko) |
JP (1) | JPH08500448A (ko) |
KR (1) | KR950701081A (ko) |
DE (2) | DE4212208A1 (ko) |
TW (1) | TW274122B (ko) |
WO (1) | WO1993021550A1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160085942A (ko) * | 2015-01-08 | 2016-07-19 | 오스템임플란트 주식회사 | 영상 촬영 방법 및 장치 |
Families Citing this family (58)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4232608C2 (de) * | 1992-09-29 | 1994-10-06 | Bosch Gmbh Robert | Verfahren zum Herstellen eines Deckels für eine integriert optische Schaltung |
DE4240950C1 (de) * | 1992-12-07 | 1994-03-31 | Bosch Gmbh Robert | Verfahren zum Herstellen eines Deckels für eine integriert optische Schaltung und Deckel für eine integriert optische Schaltung |
US5832593A (en) * | 1993-04-14 | 1998-11-10 | Minnesota Mining And Manufacturing Company | Splice head for insulated telecommunication wires |
DE4317953A1 (de) * | 1993-05-28 | 1994-12-01 | Siemens Ag | Verfahren zur Herstellung von Führungselementen für Lichtwellenleiter |
DE4344179C1 (de) * | 1993-12-23 | 1994-10-27 | Krone Ag | Koppelvorrichtung zwischen einer Glasfaser und einem auf einem Substrat integrierten dielektrischen Wellenleiter |
DE4401219A1 (de) * | 1994-01-18 | 1995-07-20 | Bosch Gmbh Robert | Integriert optisches Bauelement und Verfahren zur Herstellung eines integriert optischen Bauelements |
DE4406335C2 (de) * | 1994-02-28 | 1998-01-29 | Bosch Gmbh Robert | Anordnung zur Abzweigung oder Einkopplung von Licht |
DE4411860C2 (de) * | 1994-04-06 | 1998-04-23 | Fraunhofer Ges Forschung | Verfahren zur Herstellung von dreidimensionalen Wellenleiterstrukturen |
DE4438053C2 (de) * | 1994-10-25 | 2002-05-02 | Harting Elektrooptische Bauteile Gmbh & Co Kg | Verfahren zum Herstellen einer elektrisch leitfähigen Struktur |
DE4446509A1 (de) * | 1994-12-24 | 1996-06-27 | Sel Alcatel Ag | Verfahren zur Herstellung von Leiterbahnen auf einem Vertiefungen aufweisenden Substrat |
TW323341B (ko) * | 1995-01-09 | 1997-12-21 | Minnesota Mining & Mfg | |
DE19501285C1 (de) * | 1995-01-18 | 1996-05-15 | Bosch Gmbh Robert | Anordnung zur Umsetzung von optischen in elektrische Signale und Verfahren zur Herstellung |
US5987202A (en) * | 1995-01-18 | 1999-11-16 | Robert Bosch Gmbh | Arrangement for converting optical signals into electrical signals and method of producing the arrangement |
JP3356581B2 (ja) * | 1995-05-12 | 2002-12-16 | 松下電器産業株式会社 | 光回路部品及びその製造方法 |
US5620634A (en) * | 1995-08-17 | 1997-04-15 | Lucent Technologies Inc. | Method of making fiber waveguide connectors |
TW304233B (ko) * | 1995-09-07 | 1997-05-01 | At & T Corp | |
JPH0990173A (ja) * | 1995-09-27 | 1997-04-04 | Furukawa Electric Co Ltd:The | 表面実装モジュールとその製造方法 |
DE19538103A1 (de) * | 1995-10-13 | 1997-04-17 | Bosch Gmbh Robert | Verfahren zum Herstellen einer Lichtwellenleiter-Glasfaser-Koppelstelle auf einem integriert optischen Bauelement |
US5748818A (en) * | 1995-12-22 | 1998-05-05 | Weiss; Roger E. | Massive parallel optical interconnect system |
US6045270A (en) | 1995-12-22 | 2000-04-04 | Methode Electronics, Inc. | Massive parallel optical interconnect system |
DE19606537A1 (de) * | 1996-02-22 | 1997-08-28 | Bosch Gmbh Robert | Verfahren zur Herstellung einer Masterstruktur |
DE19607671B4 (de) * | 1996-02-29 | 2004-08-26 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Verfahren zur Herstellung optischer Bauelemente mit angekoppelten Lichtwellenleitern und nach diesem Verfahren hergestellte Bauelemente |
SE510049C2 (sv) * | 1996-03-25 | 1999-04-12 | Ericsson Telefon Ab L M | Anordning för att ansluta minst en vågledare till en optisk sändare eller mottagare |
DE19619353A1 (de) * | 1996-05-14 | 1997-11-20 | Bosch Gmbh Robert | Verfahren zur Herstellung eines integriert optischen Wellenleiterbauteiles sowie Anordnung |
JP3006832B2 (ja) * | 1996-05-14 | 2000-02-07 | 日本電気株式会社 | 発光素子と光導波路の光結合構造 |
DE19642088A1 (de) * | 1996-10-12 | 1998-04-16 | Bosch Gmbh Robert | Verfahren zur Herstellung eines mikrostrukturierten Körpers, eines Gußrahmens und eines integriert-optischen Bauteils |
US5935451A (en) * | 1997-02-24 | 1999-08-10 | Lucent Technologies Inc. | Fabrication of etched features |
DE19717015A1 (de) * | 1997-04-23 | 1998-10-29 | Inst Mikrotechnik Mainz Gmbh | Miniaturisiertes optisches Bauelement sowie Verfahren zu seiner Herstellung |
WO1998058284A1 (de) * | 1997-06-17 | 1998-12-23 | Harting Elektro-Optische Bauteile Gmbh & Co. Kg | Verfahren zur herstellung eines integriert-optischen wellenleiterbauteils |
US5987196A (en) * | 1997-11-06 | 1999-11-16 | Micron Technology, Inc. | Semiconductor structure having an optical signal path in a substrate and method for forming the same |
DE19748989A1 (de) * | 1997-11-06 | 1999-07-15 | Daimler Chrysler Ag | Optisches Sende/Empfangsmodul |
US6151430A (en) * | 1998-07-08 | 2000-11-21 | Gore Enterprise Holdings, Inc. | Photonic device having an integal guide and method of manufacturing |
SE522114C2 (sv) | 1998-08-18 | 2004-01-13 | Ericsson Telefon Ab L M | Metalliska byggelement för optoelektronik |
DE10018283A1 (de) * | 2000-04-13 | 2001-10-25 | Sel Alcatel Ag | Optische Wellenleiterstruktur und Verfahren zur Herstellung einer solchen Wellenleiterstruktur |
US6738538B2 (en) * | 2000-10-25 | 2004-05-18 | Patrick R. Antaki | Method to construct optical infrastructure on a wafer |
US6396297B1 (en) * | 2000-12-14 | 2002-05-28 | Xerox Corporation | Electrical detection of V-groove width |
US6672773B1 (en) | 2000-12-29 | 2004-01-06 | Amkor Technology, Inc. | Optical fiber having tapered end and optical connector with reciprocal opening |
US6625366B2 (en) | 2001-02-20 | 2003-09-23 | Ramot At Tel-Aviv University Ltd. | Polymer on substrate waveguide structure and corresponding production method |
FI20010778A (fi) * | 2001-04-12 | 2002-10-13 | Nokia Corp | Optinen kytkentäjärjestely |
US6555480B2 (en) | 2001-07-31 | 2003-04-29 | Hewlett-Packard Development Company, L.P. | Substrate with fluidic channel and method of manufacturing |
US20030035643A1 (en) * | 2001-08-17 | 2003-02-20 | Photon-X, Inc. | Structure for attaching an optical fiber to a planar waveguide and method thereof |
KR100439088B1 (ko) * | 2001-09-14 | 2004-07-05 | 한국과학기술원 | 상호 자기 정렬된 다수의 식각 홈을 가지는 광결합 모듈및 그 제작방법 |
DE10164589B4 (de) * | 2001-12-21 | 2004-01-29 | Infineon Technologies Ag | Planarer optischer Schaltkreis |
US6554403B1 (en) * | 2002-04-30 | 2003-04-29 | Hewlett-Packard Development Company, L.P. | Substrate for fluid ejection device |
US6981759B2 (en) * | 2002-04-30 | 2006-01-03 | Hewlett-Packard Development Company, Lp. | Substrate and method forming substrate for fluid ejection device |
KR100476317B1 (ko) * | 2002-10-24 | 2005-03-16 | 한국전자통신연구원 | 광결합 소자 및 그 제작 방법, 광결합 소자 제작을 위한마스터 및 그 제작 방법 |
JP4133280B2 (ja) * | 2002-12-09 | 2008-08-13 | アルプス電気株式会社 | 機能性多層膜 |
US6910758B2 (en) * | 2003-07-15 | 2005-06-28 | Hewlett-Packard Development Company, L.P. | Substrate and method of forming substrate for fluid ejection device |
GB0327661D0 (en) * | 2003-11-28 | 2003-12-31 | Qinetiq Ltd | Optical Amplifier |
JP2005181958A (ja) * | 2003-12-22 | 2005-07-07 | Rohm & Haas Electronic Materials Llc | レーザーアブレーションを用いる電子部品および光学部品の形成方法 |
US7653281B2 (en) * | 2004-09-02 | 2010-01-26 | Ramot At Tel-Aviv University Ltd. | Embedded channels, embedded waveguides and methods of manufacturing and using the same |
US7826133B2 (en) * | 2005-01-11 | 2010-11-02 | City University Of Hong Kong | Doped polymeric optical waveguide amplifiers |
KR100696178B1 (ko) * | 2005-09-13 | 2007-03-20 | 한국전자통신연구원 | 광 도파로 마스터 및 그 제조 방법 |
EP2116867A3 (de) * | 2008-04-15 | 2010-03-03 | Pepperl + Fuchs Gmbh | Optischer Sensor |
DE102008038993B4 (de) * | 2008-08-13 | 2011-06-22 | Karlsruher Institut für Technologie, 76131 | Optisches Element und Verfahren zu seiner Herstellung |
CH700471B1 (de) | 2009-02-17 | 2013-07-31 | Vario Optics Ag | Verfahren zur Herstellung einer elektro-optischen Leiterplatte mit Lichtwellenleiterstrukturen. |
TWI396877B (zh) * | 2010-04-23 | 2013-05-21 | Glory Science Co Ltd | 光纖連接頭 |
US9933570B2 (en) * | 2016-03-01 | 2018-04-03 | Futurewei Technologies, Inc. | Integration of V-grooves on silicon-on-insulator (SOI) platform for direct fiber coupling |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0194305A (ja) * | 1987-10-07 | 1989-04-13 | Hitachi Ltd | 光回路装置 |
US4883743A (en) * | 1988-01-15 | 1989-11-28 | E. I. Du Pont De Nemours And Company | Optical fiber connector assemblies and methods of making the assemblies |
US4904036A (en) * | 1988-03-03 | 1990-02-27 | American Telephone And Telegraph Company, At&T Bell Laboratories | Subassemblies for optoelectronic hybrid integrated circuits |
DE3908927A1 (de) * | 1989-03-18 | 1990-09-27 | Iot Entwicklungsgesellschaft F | Mikromechanisches bauteil |
US5059763A (en) * | 1990-06-06 | 1991-10-22 | Massachusetts Institute Of Technology | Formation of optical quality surfaces in optical material |
-
1992
- 1992-04-10 DE DE4212208A patent/DE4212208A1/de not_active Ceased
-
1993
- 1993-03-18 JP JP5517897A patent/JPH08500448A/ja active Pending
- 1993-03-18 WO PCT/DE1993/000248 patent/WO1993021550A1/de active IP Right Grant
- 1993-03-18 US US08/318,661 patent/US5526454A/en not_active Expired - Fee Related
- 1993-03-18 DE DE59309666T patent/DE59309666D1/de not_active Expired - Fee Related
- 1993-03-18 EP EP93905201A patent/EP0635139B1/de not_active Expired - Lifetime
- 1993-03-22 TW TW082102120A patent/TW274122B/zh active
-
1994
- 1994-10-10 KR KR1019940703633A patent/KR950701081A/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160085942A (ko) * | 2015-01-08 | 2016-07-19 | 오스템임플란트 주식회사 | 영상 촬영 방법 및 장치 |
Also Published As
Publication number | Publication date |
---|---|
WO1993021550A1 (de) | 1993-10-28 |
DE4212208A1 (de) | 1993-10-14 |
DE59309666D1 (de) | 1999-07-29 |
JPH08500448A (ja) | 1996-01-16 |
TW274122B (ko) | 1996-04-11 |
US5526454A (en) | 1996-06-11 |
EP0635139B1 (de) | 1999-06-23 |
EP0635139A1 (de) | 1995-01-25 |
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Legal Events
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A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
LAPS | Lapse due to unpaid annual fee |