KR950027686A

KR950027686A - Thin film magnetic head and its manufacturing method

Info

Publication number: KR950027686A
Application number: KR1019940006799A
Authority: KR
Inventors: 추대호
Original assignee: 김광호; 삼성전자 주식회사
Priority date: 1994-03-31
Filing date: 1994-03-31
Publication date: 1995-10-18

Abstract

본 발명은 박막 자기헤드 및 이의 제조방법에 관한 것으로, 좀 더 상세하게는 자기 저항헤드와 유도 기록헤드로 구성된 박막 자기헤드의 제조방법에 있어서, 상기 자기 저항헤드의 자속 유도층(26), 절연층(252), 도전층(27), 및 상부 자성층(28)의 각각의 유도 기록헤드의 하부 자성층(281), 절연층(254), 유도 코일층(29)및 상부 자성층(30)의 각각과 동시에 제작하므로써 패터닝을 위한 포토 마스크의 수를 40%정도 줄일 수 있어 제조수율을 40%이상 향상시킬 수 있고 다수층에 따른 응력 유기량을 감소시킬 수 있으므로 궁극적으로 제품의 신뢰성을 향상시킬 수 있는 박막 자기헤드 및 이의 제조방법에 관한 것이다.The present invention relates to a thin film magnetic head and a method of manufacturing the same, and more particularly, to a method of manufacturing a thin film magnetic head including a magnetoresistive head and an induction recording head, wherein the magnetic flux inducing layer 26 of the magnetoresistive head is insulated. Each of the lower magnetic layer 281, the insulating layer 254, the induction coil layer 29 and the upper magnetic layer 30 of each inductive recording head of the layer 252, the conductive layer 27, and the upper magnetic layer 28. Simultaneously, the number of photo masks for patterning can be reduced by 40%, and the manufacturing yield can be improved by 40% or more, and the amount of stress induced by multiple layers can be reduced, thereby ultimately improving the reliability of the product. A thin film magnetic head and a method of manufacturing the same.

Description

Thin film magnetic head and its manufacturing method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도는 본 발명의 박막 자기헤드의 단면도.2 is a cross-sectional view of the thin film magnetic head of the present invention.

Claims

In the method of manufacturing a thin film magnetic head composed of a magnetoresistive head and an inductive recording head, each of the magnetic flux inducing layer 26, the insulating layer 252, the conductive layer 27, and the upper magnetic layer 28 of the magnetoresistive head And a lower magnetic layer (281), an insulating layer (254), an induction coil layer (29), and an upper magnetic layer (30) of the inductive recording head of the thin film magnetic head.

A method of manufacturing a thin film magnetic head comprising a magnetoresistive head and an induction recording head, wherein the heads are formed in parallel on the same substrate.

※ Note: The disclosure is based on the initial application.