KR950025881U - 이비알(ebr)장치 - Google Patents

이비알(ebr)장치

Info

Publication number
KR950025881U
KR950025881U KR2019940003815U KR19940003815U KR950025881U KR 950025881 U KR950025881 U KR 950025881U KR 2019940003815 U KR2019940003815 U KR 2019940003815U KR 19940003815 U KR19940003815 U KR 19940003815U KR 950025881 U KR950025881 U KR 950025881U
Authority
KR
South Korea
Prior art keywords
ebr
Prior art date
Application number
KR2019940003815U
Other languages
English (en)
Other versions
KR0107478Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR94003815U priority Critical patent/KR0107478Y1/ko
Publication of KR950025881U publication Critical patent/KR950025881U/ko
Application granted granted Critical
Publication of KR0107478Y1 publication Critical patent/KR0107478Y1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2026—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction
    • G03F7/2028—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction of an edge bead on wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
KR94003815U 1994-02-28 1994-02-28 Ebr apparatus KR0107478Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR94003815U KR0107478Y1 (en) 1994-02-28 1994-02-28 Ebr apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR94003815U KR0107478Y1 (en) 1994-02-28 1994-02-28 Ebr apparatus

Publications (2)

Publication Number Publication Date
KR950025881U true KR950025881U (ko) 1995-09-18
KR0107478Y1 KR0107478Y1 (en) 1997-09-30

Family

ID=19378064

Family Applications (1)

Application Number Title Priority Date Filing Date
KR94003815U KR0107478Y1 (en) 1994-02-28 1994-02-28 Ebr apparatus

Country Status (1)

Country Link
KR (1) KR0107478Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100447012B1 (ko) * 1997-01-24 2004-11-06 동경 엘렉트론 주식회사 기판주변부의도포막제거방법및도포막제거장치

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100934820B1 (ko) * 2007-06-29 2009-12-31 주식회사 하이닉스반도체 반도체 소자의 제조 장치 및 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100447012B1 (ko) * 1997-01-24 2004-11-06 동경 엘렉트론 주식회사 기판주변부의도포막제거방법및도포막제거장치

Also Published As

Publication number Publication date
KR0107478Y1 (en) 1997-09-30

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Legal Events

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A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
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Payment date: 20080619

Year of fee payment: 12

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