KR950025862A - Exposure mask formation method - Google Patents

Exposure mask formation method Download PDF

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Publication number
KR950025862A
KR950025862A KR1019940003450A KR19940003450A KR950025862A KR 950025862 A KR950025862 A KR 950025862A KR 1019940003450 A KR1019940003450 A KR 1019940003450A KR 19940003450 A KR19940003450 A KR 19940003450A KR 950025862 A KR950025862 A KR 950025862A
Authority
KR
South Korea
Prior art keywords
exposure mask
measurement mark
mask
forming
mask pattern
Prior art date
Application number
KR1019940003450A
Other languages
Korean (ko)
Inventor
황준
Original Assignee
김주용
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김주용, 현대전자산업 주식회사 filed Critical 김주용
Priority to KR1019940003450A priority Critical patent/KR950025862A/en
Publication of KR950025862A publication Critical patent/KR950025862A/en

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

본 발명은 노광마스크 형성방법에 관한 것으로, 노광마스크의 중앙에 마스크 패턴을 형성한 다음, 중첩정확도와 CD를 측정할 수 있도록 형성된 측정마크를 상기 마스크 패턴 밖의 마스크 패턴 대각선 상에 정사각형 형태로 형성함으로써, 중첩정확도 및 CD를 정확히 측정하여 노광마스크 제작 오차를 줄임으로써 반도체소자의 신뢰도 및 수율을 향상시키는 기술이다.The present invention relates to a method for forming an exposure mask, by forming a mask pattern in the center of the exposure mask, and then forming a measurement mark formed to measure overlapping accuracy and CD in a square shape on a mask pattern diagonal outside the mask pattern. This technology improves the reliability and yield of semiconductor devices by accurately measuring overlapping accuracy and CD and reducing the exposure mask fabrication error.

Description

노광마스크 형성방법Exposure mask formation method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2A도 및 제2B도는 본 발명의 실시예에 의한 측정마크 및 노광마스크를 도시한 평면도.2A and 2B are plan views showing measurement marks and exposure masks according to embodiments of the present invention.

Claims (4)

일정크기의 정사각형의 형태로 좌·우 상단 및 하단에 중첩정확도를 측정하기 위한 크롬패턴이 구비되는 것을 특징으로하는 측정마크.Measurement mark, characterized in that the chrome pattern for measuring the accuracy of the superimposition on the upper left and lower right and the bottom in the form of a square of a certain size. 제1항에 있어서, 상기 측정마크는 가로, 세로 각각 100㎛정도의 크기로 형성되는 것을 특징으로 하는 측정마크.According to claim 1, wherein the measurement mark is a measurement mark, characterized in that formed in the size of about 100㎛ horizontally, vertically. 노광마스크 상부 중앙에 웨이퍼에 패턴을 형성할 마스크 패턴을 형성하고 상기 마스크 패턴 밖의 대각선상에 측정마크의 대각선을 일치시켜 형성하는 네 개의 측정마크가 상호간에 정사각형을 이루도록 측정마크를 형성하는 노광마스크 형성방법.An exposure mask is formed to form a mask pattern for forming a pattern on the wafer in the center of the exposure mask, and to form a measurement mark such that four measurement marks formed by matching diagonal lines of measurement marks on a diagonal outside the mask pattern form a square with each other. Way. 제3항에 있어서, 상기 측정마크는 중첩정확도 및 CD를 측정할 수 있도록 형성하는 것을 특징으로 하는 노광마스크 형성방법.The method of claim 3, wherein the measurement mark is formed to measure overlapping accuracy and CD. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940003450A 1994-02-25 1994-02-25 Exposure mask formation method KR950025862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940003450A KR950025862A (en) 1994-02-25 1994-02-25 Exposure mask formation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940003450A KR950025862A (en) 1994-02-25 1994-02-25 Exposure mask formation method

Publications (1)

Publication Number Publication Date
KR950025862A true KR950025862A (en) 1995-09-18

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940003450A KR950025862A (en) 1994-02-25 1994-02-25 Exposure mask formation method

Country Status (1)

Country Link
KR (1) KR950025862A (en)

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