KR950023943U - 반도체 박막증착장치의 오픈캡 - Google Patents

반도체 박막증착장치의 오픈캡

Info

Publication number
KR950023943U
KR950023943U KR2019940001438U KR19940001438U KR950023943U KR 950023943 U KR950023943 U KR 950023943U KR 2019940001438 U KR2019940001438 U KR 2019940001438U KR 19940001438 U KR19940001438 U KR 19940001438U KR 950023943 U KR950023943 U KR 950023943U
Authority
KR
South Korea
Prior art keywords
thin film
film deposition
semiconductor thin
deposition device
open cap
Prior art date
Application number
KR2019940001438U
Other languages
English (en)
Other versions
KR200169672Y1 (ko
Inventor
박태현
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019940001438U priority Critical patent/KR200169672Y1/ko
Publication of KR950023943U publication Critical patent/KR950023943U/ko
Application granted granted Critical
Publication of KR200169672Y1 publication Critical patent/KR200169672Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
KR2019940001438U 1994-01-26 1994-01-26 반도체 박막증착장치의 오픈캡 KR200169672Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940001438U KR200169672Y1 (ko) 1994-01-26 1994-01-26 반도체 박막증착장치의 오픈캡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940001438U KR200169672Y1 (ko) 1994-01-26 1994-01-26 반도체 박막증착장치의 오픈캡

Publications (2)

Publication Number Publication Date
KR950023943U true KR950023943U (ko) 1995-08-23
KR200169672Y1 KR200169672Y1 (ko) 2000-02-01

Family

ID=19376309

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940001438U KR200169672Y1 (ko) 1994-01-26 1994-01-26 반도체 박막증착장치의 오픈캡

Country Status (1)

Country Link
KR (1) KR200169672Y1 (ko)

Also Published As

Publication number Publication date
KR200169672Y1 (ko) 2000-02-01

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20051021

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee