KR950015665U - 웨이퍼 수직 장착이 가능한 보트 정렬장치 - Google Patents

웨이퍼 수직 장착이 가능한 보트 정렬장치

Info

Publication number
KR950015665U
KR950015665U KR2019930025226U KR930025226U KR950015665U KR 950015665 U KR950015665 U KR 950015665U KR 2019930025226 U KR2019930025226 U KR 2019930025226U KR 930025226 U KR930025226 U KR 930025226U KR 950015665 U KR950015665 U KR 950015665U
Authority
KR
South Korea
Prior art keywords
alignment device
wafer mounting
vertical wafer
boat alignment
boat
Prior art date
Application number
KR2019930025226U
Other languages
English (en)
Other versions
KR970002639Y1 (ko
Inventor
김용표
김용선
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019930025226U priority Critical patent/KR970002639Y1/ko
Publication of KR950015665U publication Critical patent/KR950015665U/ko
Application granted granted Critical
Publication of KR970002639Y1 publication Critical patent/KR970002639Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • H01L21/67316—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
KR2019930025226U 1993-11-26 1993-11-26 웨이퍼 수직 장착이 가능한 보트 정렬장치 KR970002639Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930025226U KR970002639Y1 (ko) 1993-11-26 1993-11-26 웨이퍼 수직 장착이 가능한 보트 정렬장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930025226U KR970002639Y1 (ko) 1993-11-26 1993-11-26 웨이퍼 수직 장착이 가능한 보트 정렬장치

Publications (2)

Publication Number Publication Date
KR950015665U true KR950015665U (ko) 1995-06-19
KR970002639Y1 KR970002639Y1 (ko) 1997-03-28

Family

ID=19368900

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930025226U KR970002639Y1 (ko) 1993-11-26 1993-11-26 웨이퍼 수직 장착이 가능한 보트 정렬장치

Country Status (1)

Country Link
KR (1) KR970002639Y1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108039336A (zh) * 2017-11-23 2018-05-15 中国电子科技集团公司第五十五研究所 一种石墨舟对中装置
CN114853320A (zh) * 2022-05-03 2022-08-05 浙江奥博石英科技股份有限公司 一种槽棒插片石英舟加工设备

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108039336A (zh) * 2017-11-23 2018-05-15 中国电子科技集团公司第五十五研究所 一种石墨舟对中装置
CN108039336B (zh) * 2017-11-23 2024-02-20 中国电子科技集团公司第五十五研究所 一种石墨舟对中装置
CN114853320A (zh) * 2022-05-03 2022-08-05 浙江奥博石英科技股份有限公司 一种槽棒插片石英舟加工设备
CN114853320B (zh) * 2022-05-03 2024-02-06 浙江奥博石英科技股份有限公司 一种槽棒插片石英舟加工设备

Also Published As

Publication number Publication date
KR970002639Y1 (ko) 1997-03-28

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