KR950015556A - Natural Oxide Growth Inhibition Method - Google Patents
Natural Oxide Growth Inhibition Method Download PDFInfo
- Publication number
- KR950015556A KR950015556A KR1019930023350A KR930023350A KR950015556A KR 950015556 A KR950015556 A KR 950015556A KR 1019930023350 A KR1019930023350 A KR 1019930023350A KR 930023350 A KR930023350 A KR 930023350A KR 950015556 A KR950015556 A KR 950015556A
- Authority
- KR
- South Korea
- Prior art keywords
- growth
- oxide film
- natural oxide
- film
- growth inhibition
- Prior art date
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- Formation Of Insulating Films (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
본 발명은 반도체 소자의 제조공정 중 화학기상증착장비를 이웅한 증착막 형성시 자연적으로 형성되어 소자특성 저하의 한 원인이 되는 자연산화막의 성장을 억제하는 자연산하막 성장억제 방법에 관한 것으로, 증착막 형성 전 대기시 온도를 상온으로 함으로써 종래 튜브에 대기시의 높은 온도로 인해 빠른 속도로 성장되 던 자연산화막의 성장을 감소시켜 특히, 콘택형성을 위한 다결정실리콘막 증착시 적용될 경우 콘택저항을 크게 감소시키는 효과를 얻을 수 있다.The present invention relates to a method for suppressing the growth of a native oxide film which is naturally formed during the formation of a deposited film formed by chemical vapor deposition equipment during the manufacturing process of a semiconductor device, and which suppresses the growth of a native oxide film which is a cause of deterioration of device characteristics. By reducing the temperature of all the air at room temperature, the growth of the natural oxide film, which was grown at a rapid rate due to the high temperature of the air in the conventional tube, greatly reduces the contact resistance, especially when applied to the deposition of a polysilicon film for forming a contact. The effect can be obtained.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930023350A KR950015556A (en) | 1993-11-04 | 1993-11-04 | Natural Oxide Growth Inhibition Method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930023350A KR950015556A (en) | 1993-11-04 | 1993-11-04 | Natural Oxide Growth Inhibition Method |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950015556A true KR950015556A (en) | 1995-06-17 |
Family
ID=66825320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930023350A KR950015556A (en) | 1993-11-04 | 1993-11-04 | Natural Oxide Growth Inhibition Method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950015556A (en) |
-
1993
- 1993-11-04 KR KR1019930023350A patent/KR950015556A/en not_active Application Discontinuation
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