KR950014989A - Photoresist coating method - Google Patents
Photoresist coating method Download PDFInfo
- Publication number
- KR950014989A KR950014989A KR1019930023919A KR930023919A KR950014989A KR 950014989 A KR950014989 A KR 950014989A KR 1019930023919 A KR1019930023919 A KR 1019930023919A KR 930023919 A KR930023919 A KR 930023919A KR 950014989 A KR950014989 A KR 950014989A
- Authority
- KR
- South Korea
- Prior art keywords
- photoresist
- reflectance
- coating method
- photoresist coating
- thickness
- Prior art date
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- Application Of Or Painting With Fluid Materials (AREA)
Abstract
본 발명은 반도체 제조공정중 포토레지스트를 도포하는 방법에 관한 것으로, 포토레지스트의 도포 두께에 따른 반사율(Reflectance)을 고려하여 포토레지스트를 도포하되, 반사율이 최저일 때 현상속도가 빠른 포토레지스트는 최저 반사율을 갖는 두께로 도포하고, 반사율이 최고일때 현상속도가 빠른 포토레지스트는 최고 반사율을 갖는 두께로 도포하여 현상속도를 향상시킬 수 있는 포토레지스트를 도포하는 방법에 관해 기술된다.The present invention relates to a method for applying a photoresist during the semiconductor manufacturing process, the photoresist is applied in consideration of the reflectance (Reflectance) according to the coating thickness of the photoresist, the fastest photoresist when the reflectance is the lowest A method of applying a photoresist that can be applied at a thickness having a reflectance, and a photoresist having a high development speed when the reflectance is the highest, can be applied at a thickness having the highest reflectance to improve the development speed.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930023919A KR950014989A (en) | 1993-11-11 | 1993-11-11 | Photoresist coating method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930023919A KR950014989A (en) | 1993-11-11 | 1993-11-11 | Photoresist coating method |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950014989A true KR950014989A (en) | 1995-06-16 |
Family
ID=66824936
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930023919A KR950014989A (en) | 1993-11-11 | 1993-11-11 | Photoresist coating method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950014989A (en) |
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1993
- 1993-11-11 KR KR1019930023919A patent/KR950014989A/en not_active Application Discontinuation
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