KR950012565A - Liquefied Chemical Auto Feeder - Google Patents

Liquefied Chemical Auto Feeder Download PDF

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Publication number
KR950012565A
KR950012565A KR1019930021851A KR930021851A KR950012565A KR 950012565 A KR950012565 A KR 950012565A KR 1019930021851 A KR1019930021851 A KR 1019930021851A KR 930021851 A KR930021851 A KR 930021851A KR 950012565 A KR950012565 A KR 950012565A
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KR
South Korea
Prior art keywords
chemical
liquefied
storage tank
chemicals
supply
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Application number
KR1019930021851A
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Korean (ko)
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KR960014954B1 (en
Inventor
하계수
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문정환
금성일렉트론 주식회사
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Priority to KR1019930021851A priority Critical patent/KR960014954B1/en
Publication of KR950012565A publication Critical patent/KR950012565A/en
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Publication of KR960014954B1 publication Critical patent/KR960014954B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

본 발명은 베이크오븐의 약품수위가 일정레벨 이하로 내려가면 화학약품이 자동으로 공급되게 함으로써 보다 안정된 공정유지에 적합하도록함과 아울러 공급된 약품의 예열 및 테스트에 소요되는 시간적인 손실을 줄이는등 장비 유지관리 시간이 단축에 적합하도록 한 액화 화학약품 자동공급장치에 관한 것으로, 액화 화학약품을 기화시켜 반응로로 공급하는 베이크오븐(1)을 포함하는 베이킹 시스템과, 액화 화학약품을 저장 보관하는 화학약품 보관탱크(10)와, 상기 화학약품 보관탱크(10)의 액화 화학약품을 베이크오븐(1)으로 운반 보충시키는 질소공급라인(20)을 구비한 것에 있어서, 질소공급라인(20) 및 화학약품 보관탱크(10), 그 화학약품 보관탱크(10)와 베이크오븐(1)을 연결하는 배관중에 에어밸브(AV7)(AV8)(AV9)를 착설하고, 베이크오븐(1)내의 약품 수위를 감지하여 화학약품 공급신호 및 공급차단신호를 송출하는 수위감지수단과, 상기 수위감지수단과 인터페이스된 마이크로 프로레서(40)와, 상기 마이크로 프로세서(40)의 신호를 받아 액화 화학약품공급 제어용 에어밸브(AV7)(AV8)(AV9)를 구동시키는 솔레노이드 밸브(SV7)(SV8)(SV9)를 가지는 컨트롤러(50)를 포함하여 구성한 것이다.The present invention allows the chemicals to be automatically supplied when the chemical level of the bake oven is lowered below a certain level, so that it is suitable for maintaining a more stable process and reduces the time loss required for preheating and testing the supplied chemicals. The present invention relates to a liquefied chemical automatic supply device suitable for shortening of maintenance time, and to a baking system including a bake oven (1) for vaporizing liquefied chemical and supplying it to a reactor, and a chemical for storing and storing liquefied chemical. In the chemical storage tank 10 and the nitrogen supply line 20 for transporting and supplementing the liquefied chemicals of the chemical storage tank 10 to the baking oven (1), the nitrogen supply line 20 and the chemical Air valves AV7, AV8 and AV9 are installed in the pipes connecting the chemical storage tank 10, the chemical storage tank 10 and the bake oven 1, and the chemicals in the bake oven 1 are installed. Level detection means for detecting the water level and sending out the chemical supply signal and supply shutoff signal, the micro processor 40 interfaced with the water level detection means, and receiving the signal from the micro processor 40 for liquefied chemical supply control It is comprised including the controller 50 which has the solenoid valve SV7 (SV8) and SV9 which drive air valve AV7 (AV8) AV9.

Description

액화 화학약품 자동 공급장치Liquefied Chemical Auto Feeder

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도는 본 발명에 의한 액화 화학약품 자동 공급장치의 계통도.2 is a schematic diagram of a liquefied chemical automatic supply device according to the present invention.

Claims (4)

액화 화학약품을 기화시켜 반응로로 공급되는 베이크 오븐(1)을 포함하는 베이킹 시스템과, 액화 화학약품을 저장 보관하는 화학약품 보관탱크(10)와, 상기 화학약품 보관탱크(10)의 액화 화학약품을 베이크 오븐(1)으로 운반 보충시키는 질소공급라인(20)을 구비한 것에 있어서, 질소공급라인(20) 및 화학약품 보관탱크(10), 그 화학약품 보관탱크(10)와 베이크 오븐(1)을 연결하는 배관중에 에어밸브(AV7)(AV8)(AV9)를 착설하고, 베이크 오븐(1)내의 약품 수위를 감지하여 화학약품 공급신호 및 공급차단신호를 송출하는 수위 감지수단과, 상기 수위감지수단과 인터페이스된 마이크로 프로세서(40)와, 상기 마이크로 프로세서(40)의 신호를 받아 액화 화학약품 공급 제어용 에어밸브(AV7)(AV8)(AV9)를 구동시키는 솔레노이드 밸브(SV7)(SV8)(SV9)를 가지는 컨트롤러(50)를 포함하여 구성한 것을 특징으로 하는 액화 화학약품 자동 공급장치.A baking system including a baking oven (1) which vaporizes liquefied chemicals and supplies them to a reactor, a chemical storage tank (10) for storing and storing liquefied chemicals, and a liquefaction chemical of the chemical storage tank (10). A nitrogen supply line 20 for transporting and replenishing chemicals to the baking oven 1, the nitrogen supply line 20 and the chemical storage tank 10, the chemical storage tank 10 and the baking oven ( 1) an air valve (AV7) (AV8) (AV9) is installed in the piping connecting the water level detection means for detecting the chemical level in the baking oven (1) to send a chemical supply signal and supply cutoff signal, and The microprocessor 40 interfaced with the water level sensing means, and the solenoid valve SV7 (SV8) for driving the liquefied chemical supply control air valves AV7, AV8 and AV9 in response to a signal from the microprocessor 40. Includes a controller 50 having (SV9) Liquefied chemicals, auto supply, characterized in that configured over. 제1항에 있어서, 상기 수위감지수단은 베이크 오븐(1)의 측벽 상, 하부에 각각 설치되어 화학약품의 최대수위 및 최소수위를 감지하는 하이레벨센서(31) 및 로우레벨센서(32)로 구성됨을 특징으로 하는 액화 화학약품 자동 공급장치.The high level sensor 31 and the low level sensor 32 of claim 1, wherein the water level detecting means is installed on the lower side and the lower side of the baking oven 1 to detect the maximum level and the minimum level of the chemical. Automated supply of liquefied chemical, characterized in that configured. 제2항에 있어서, 하이레벨센서(31) 및 로우레벨센서(32)의 설치간격을 작게하여 소량의 화학약품이 수시로 공급되도록 구성한 것을 특징으로 하는 액화 화학약품 자동 공급장치.3. The automatic supply of liquefied chemicals according to claim 2, wherein a small amount of chemicals are supplied from time to time by reducing the installation interval of the high level sensor (31) and the low level sensor (32). 제1항에 있어서, 상기 화학약품 보관탱크(10)의 하부에는 그 탱크(10)내의 잔여 화학약품 무게를 측정하기 위한 중량계(61)가 설치되고, 이 중량계(61)의 신호에 따라 경보음을 발하는 웨이트 알람(62)이 마이크로 프로세서(50)에 설치되어 화학약품 보관탱크의 교환시기를 용이하게 알 수 있도록 구성된 것을 특징으로 하는 액화 화학약품 자동 공급장치.According to claim 1, wherein the lower part of the chemical storage tank 10 is provided with a weight scale 61 for measuring the weight of the remaining chemical in the tank 10, according to the signal of the weight scale 61 Weight alarm (62) that emits an alarm sound is installed in the microprocessor (50), the automatic supply of liquefied chemical, characterized in that configured to easily know the replacement time of the chemical storage tank. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019930021851A 1993-10-20 1993-10-20 Liquefied chemicals supplying apparatus KR960014954B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019930021851A KR960014954B1 (en) 1993-10-20 1993-10-20 Liquefied chemicals supplying apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019930021851A KR960014954B1 (en) 1993-10-20 1993-10-20 Liquefied chemicals supplying apparatus

Publications (2)

Publication Number Publication Date
KR950012565A true KR950012565A (en) 1995-05-16
KR960014954B1 KR960014954B1 (en) 1996-10-23

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Application Number Title Priority Date Filing Date
KR1019930021851A KR960014954B1 (en) 1993-10-20 1993-10-20 Liquefied chemicals supplying apparatus

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100872427B1 (en) * 2002-07-02 2008-12-08 엘지전자 주식회사 Fueltank turnover displayer of fuel cell and method thereof
KR100881177B1 (en) * 2001-04-02 2009-02-02 지이 베츠 인코포레이티드 Dual solid chemical feed system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100881177B1 (en) * 2001-04-02 2009-02-02 지이 베츠 인코포레이티드 Dual solid chemical feed system
KR100872427B1 (en) * 2002-07-02 2008-12-08 엘지전자 주식회사 Fueltank turnover displayer of fuel cell and method thereof

Also Published As

Publication number Publication date
KR960014954B1 (en) 1996-10-23

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