KR950010183U - 석영튜브와 공정챔버의 실링 장치 - Google Patents

석영튜브와 공정챔버의 실링 장치

Info

Publication number
KR950010183U
KR950010183U KR2019930018626U KR930018626U KR950010183U KR 950010183 U KR950010183 U KR 950010183U KR 2019930018626 U KR2019930018626 U KR 2019930018626U KR 930018626 U KR930018626 U KR 930018626U KR 950010183 U KR950010183 U KR 950010183U
Authority
KR
South Korea
Prior art keywords
sealing device
process chamber
quartz tube
quartz
tube
Prior art date
Application number
KR2019930018626U
Other languages
English (en)
Other versions
KR960008665Y1 (ko
Inventor
이상윤
이청대
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019930018626U priority Critical patent/KR960008665Y1/ko
Publication of KR950010183U publication Critical patent/KR950010183U/ko
Application granted granted Critical
Publication of KR960008665Y1 publication Critical patent/KR960008665Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32513—Sealing means, e.g. sealing between different parts of the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
KR2019930018626U 1993-09-16 1993-09-16 석영튜브와 공정챔버의 실링 장치 KR960008665Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930018626U KR960008665Y1 (ko) 1993-09-16 1993-09-16 석영튜브와 공정챔버의 실링 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930018626U KR960008665Y1 (ko) 1993-09-16 1993-09-16 석영튜브와 공정챔버의 실링 장치

Publications (2)

Publication Number Publication Date
KR950010183U true KR950010183U (ko) 1995-04-24
KR960008665Y1 KR960008665Y1 (ko) 1996-10-07

Family

ID=19363644

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930018626U KR960008665Y1 (ko) 1993-09-16 1993-09-16 석영튜브와 공정챔버의 실링 장치

Country Status (1)

Country Link
KR (1) KR960008665Y1 (ko)

Also Published As

Publication number Publication date
KR960008665Y1 (ko) 1996-10-07

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