KR950004789U - 변형 조명기구 - Google Patents
변형 조명기구Info
- Publication number
- KR950004789U KR950004789U KR2019930013094U KR930013094U KR950004789U KR 950004789 U KR950004789 U KR 950004789U KR 2019930013094 U KR2019930013094 U KR 2019930013094U KR 930013094 U KR930013094 U KR 930013094U KR 950004789 U KR950004789 U KR 950004789U
- Authority
- KR
- South Korea
- Prior art keywords
- transform
- lighting fixtures
- fixtures
- lighting
- transform lighting
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930013094U KR960004100Y1 (ko) | 1993-07-15 | 1993-07-15 | 변형 조명기구 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930013094U KR960004100Y1 (ko) | 1993-07-15 | 1993-07-15 | 변형 조명기구 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950004789U true KR950004789U (ko) | 1995-02-18 |
KR960004100Y1 KR960004100Y1 (ko) | 1996-05-21 |
Family
ID=19359154
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019930013094U KR960004100Y1 (ko) | 1993-07-15 | 1993-07-15 | 변형 조명기구 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960004100Y1 (ko) |
-
1993
- 1993-07-15 KR KR2019930013094U patent/KR960004100Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR960004100Y1 (ko) | 1996-05-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20080425 Year of fee payment: 13 |
|
EXPY | Expiration of term |