KR950004789U - 변형 조명기구 - Google Patents

변형 조명기구

Info

Publication number
KR950004789U
KR950004789U KR2019930013094U KR930013094U KR950004789U KR 950004789 U KR950004789 U KR 950004789U KR 2019930013094 U KR2019930013094 U KR 2019930013094U KR 930013094 U KR930013094 U KR 930013094U KR 950004789 U KR950004789 U KR 950004789U
Authority
KR
South Korea
Prior art keywords
transform
lighting fixtures
fixtures
lighting
transform lighting
Prior art date
Application number
KR2019930013094U
Other languages
English (en)
Other versions
KR960004100Y1 (ko
Inventor
배상만
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019930013094U priority Critical patent/KR960004100Y1/ko
Publication of KR950004789U publication Critical patent/KR950004789U/ko
Application granted granted Critical
Publication of KR960004100Y1 publication Critical patent/KR960004100Y1/ko

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058Mask illumination systems
    • G03F7/70091Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR2019930013094U 1993-07-15 1993-07-15 변형 조명기구 KR960004100Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930013094U KR960004100Y1 (ko) 1993-07-15 1993-07-15 변형 조명기구

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930013094U KR960004100Y1 (ko) 1993-07-15 1993-07-15 변형 조명기구

Publications (2)

Publication Number Publication Date
KR950004789U true KR950004789U (ko) 1995-02-18
KR960004100Y1 KR960004100Y1 (ko) 1996-05-21

Family

ID=19359154

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930013094U KR960004100Y1 (ko) 1993-07-15 1993-07-15 변형 조명기구

Country Status (1)

Country Link
KR (1) KR960004100Y1 (ko)

Also Published As

Publication number Publication date
KR960004100Y1 (ko) 1996-05-21

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Legal Events

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