KR950004417A - How to form an alignment mark - Google Patents
How to form an alignment mark Download PDFInfo
- Publication number
- KR950004417A KR950004417A KR1019930012448A KR930012448A KR950004417A KR 950004417 A KR950004417 A KR 950004417A KR 1019930012448 A KR1019930012448 A KR 1019930012448A KR 930012448 A KR930012448 A KR 930012448A KR 950004417 A KR950004417 A KR 950004417A
- Authority
- KR
- South Korea
- Prior art keywords
- alignment mark
- alignment
- symmetry
- improving
- shape
- Prior art date
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
본 발명은 반도체 웨이퍼의 스크라이브라인 상에 단면도 형태가 음각형태인 모양을 갖고 계속되는 공정에 대응하여 모양의 대칭성이 유지되도록 소정의 크기를 갖게 얼라인먼트 마크를 형성하는 것을 특징으로 하는 반사율이 심한 기판에서의 얼라인먼트 마크 형성 방법에 관한 것으로, 반사율이 심한 기판에서 양호한 검출신호를 얻을 수 있고, 얼라인먼트 마크의 대칭성이 유지되므로 정확한 얼라인먼트 마크의 위치를 감지하여 얼라인먼트의 정확도를 향상시키므로서 반도체소자의 고집적화 및 신뢰도를 향상시키는 효과가 있다.According to the present invention, an alignment mark having a predetermined size is formed on a scribe line of a semiconductor wafer to have a predetermined cross-sectional shape and a symmetry of shape in response to a subsequent process. The present invention relates to a method for forming an alignment mark, which provides a good detection signal on a substrate with high reflectance and maintains the alignment mark symmetry, thereby improving the accuracy of alignment by detecting the exact position of the alignment mark, thereby improving the integration accuracy and reliability of the semiconductor device. It is effective to improve.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제3도는 본 발명에 따른 얼라인먼트 마크 단면도, 제4도는 얼라인먼트 마크를 검출하는 원리를 나타내는 개념도, 제5도는 검출기의 모니터상에 나타나는 검출 신호 그래프.3 is a cross-sectional view of an alignment mark according to the present invention, FIG. 4 is a conceptual diagram showing a principle of detecting alignment marks, and FIG.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930012448A KR950004417A (en) | 1993-07-02 | 1993-07-02 | How to form an alignment mark |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930012448A KR950004417A (en) | 1993-07-02 | 1993-07-02 | How to form an alignment mark |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950004417A true KR950004417A (en) | 1995-02-18 |
Family
ID=67143185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930012448A KR950004417A (en) | 1993-07-02 | 1993-07-02 | How to form an alignment mark |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950004417A (en) |
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1993
- 1993-07-02 KR KR1019930012448A patent/KR950004417A/en not_active Application Discontinuation
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WITN | Withdrawal due to no request for examination |