KR950003660A - 변속 기구, 변속 기구를 구비한 위치 설정 장치 및, 위치 설정 장치를 구비한 리도그래픽 장치 - Google Patents

변속 기구, 변속 기구를 구비한 위치 설정 장치 및, 위치 설정 장치를 구비한 리도그래픽 장치 Download PDF

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Publication number
KR950003660A
KR950003660A KR1019930013759A KR930013759A KR950003660A KR 950003660 A KR950003660 A KR 950003660A KR 1019930013759 A KR1019930013759 A KR 1019930013759A KR 930013759 A KR930013759 A KR 930013759A KR 950003660 A KR950003660 A KR 950003660A
Authority
KR
South Korea
Prior art keywords
coupling member
transmission mechanism
positioning device
threading
axis direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1019930013759A
Other languages
English (en)
Korean (ko)
Inventor
제라르두스 보우베르 아드리아누스
베른하드 스펄링 프랭크
Original Assignee
제이지에이롤프스
엔브이필립스 글로아이람펜파 브리켄
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 제이지에이롤프스, 엔브이필립스 글로아이람펜파 브리켄 filed Critical 제이지에이롤프스
Publication of KR950003660A publication Critical patent/KR950003660A/ko
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H15/00—Gearings for conveying rotary motion with variable gear ratio, or for reversing rotary motion, by friction between rotary members
    • F16H15/01—Gearings for conveying rotary motion with variable gear ratio, or for reversing rotary motion, by friction between rotary members characterised by the use of a magnetisable powder or liquid as friction medium between the rotary members
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K49/00—Dynamo-electric clutches; Dynamo-electric brakes
    • H02K49/10—Dynamo-electric clutches; Dynamo-electric brakes of the permanent-magnet type
    • H02K49/102—Magnetic gearings, i.e. assembly of gears, linear or rotary, by which motion is magnetically transferred without physical contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/08—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for interconverting rotary motion and reciprocating motion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H2025/2062—Arrangements for driving the actuator
    • F16H2025/2075—Coaxial drive motors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S74/00—Machine element or mechanism
    • Y10S74/04—Magnetic gearing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/19—Gearing
    • Y10T74/19642—Directly cooperating gears
    • Y10T74/19698—Spiral
    • Y10T74/19702—Screw and nut
    • Y10T74/19712—Threadless
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20341—Power elements as controlling elements
    • Y10T74/20354—Planar surface with orthogonal movement only

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Transmission Devices (AREA)
  • Dynamo-Electric Clutches, Dynamo-Electric Brakes (AREA)
KR1019930013759A 1992-08-12 1993-07-21 변속 기구, 변속 기구를 구비한 위치 설정 장치 및, 위치 설정 장치를 구비한 리도그래픽 장치 Ceased KR950003660A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP92202483 1992-08-12
EP92202483.1 1992-08-12

Publications (1)

Publication Number Publication Date
KR950003660A true KR950003660A (ko) 1995-02-17

Family

ID=8210844

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930013759A Ceased KR950003660A (ko) 1992-08-12 1993-07-21 변속 기구, 변속 기구를 구비한 위치 설정 장치 및, 위치 설정 장치를 구비한 리도그래픽 장치

Country Status (5)

Country Link
US (1) US5456134A (https=)
JP (1) JPH06201012A (https=)
KR (1) KR950003660A (https=)
DE (1) DE69306192T2 (https=)
TW (1) TW235275B (https=)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100190595B1 (ko) * 1994-04-05 1999-06-01 다카다 요시유키 전기 액추에이터
DE19527005A1 (de) * 1994-09-26 1996-03-28 Koyo Machine Ind Co Ltd Magnetische Bewegungsspindeleinrichtung
US5634390A (en) * 1994-11-19 1997-06-03 Ckd Corporation Rotary actuator
EP0903003B1 (en) * 1996-04-30 2005-03-30 Foster-Miller, Inc. Rotary torque-to-axial force energy conversion apparatus
JPH1131615A (ja) * 1997-05-12 1999-02-02 Sumitomo Special Metals Co Ltd 磁気ねじ
US6129704A (en) * 1997-06-12 2000-10-10 Schneider (Usa) Inc. Perfusion balloon catheter having a magnetically driven impeller
JPH11300557A (ja) * 1998-04-15 1999-11-02 Thk Co Ltd 移動テーブル装置
US6279490B1 (en) * 1999-10-08 2001-08-28 Etec Systems, Inc. Epicyclic stage
US6778052B1 (en) * 2000-05-05 2004-08-17 Obschestvo S Ogranichennoy Otvetsvennostu <Laboratorii Amfora> Contactless magnetic spiral gear and variants thereof
DE10040277C2 (de) * 2000-08-14 2003-08-28 Lat Suhl Ag Kreuztisch zur Bereitstellung von Bewegungen in einem zweidimensionalen Koordinatensystem
EP1588825A1 (en) * 2002-12-12 2005-10-26 A.K. Technical Laboratory, Inc., Elongation drive device of stretch rod in stretch blow molding machine and bottom-type lifting drive device
US20080309088A1 (en) * 2005-04-19 2008-12-18 Emmanuel Agamloh Methods and Apparatus for Power Generation
US20100117366A1 (en) * 2007-03-02 2010-05-13 Kenneth Rhinefrank Methods and apparatus for power generation
US20090251258A1 (en) * 2008-04-08 2009-10-08 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Magnetic helical screw drive
US9010205B2 (en) * 2011-01-20 2015-04-21 Pacific Bearing Company Linear slide having integral carriage and nut assembly
WO2016204953A1 (en) 2015-06-16 2016-12-22 Skytran Inc. Magnetic linear drive device and system
US11598400B2 (en) 2020-11-19 2023-03-07 Pacific Bearing Corporation Nut with flexible fingers and self-aligning members
US20240235359A1 (en) * 2021-04-14 2024-07-11 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E. V. Magnetically coupled drive arrangement

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7003056A (https=) * 1970-03-04 1971-09-07
JPS5449458A (en) * 1978-09-04 1979-04-18 Toshiba Corp Feed apparatus
SU1219850A1 (ru) * 1983-02-15 1986-03-23 Всесоюзный научно-исследовательский институт электромеханики Магнитна винтова передача
NL8601095A (nl) * 1986-04-29 1987-11-16 Philips Nv Positioneerinrichting.
JP2777131B2 (ja) * 1987-11-09 1998-07-16 旭精工株式会社 回転運動を直線運動に変換する機構
US4995277A (en) * 1988-05-31 1991-02-26 Ken Yanagisawa Two dimensional drive system
SU1620743A1 (ru) * 1988-09-29 1991-01-15 Московский Институт Электронного Машиностроения Винтова магнитна передача
NL8902471A (nl) * 1989-10-05 1991-05-01 Philips Nv Tweetraps positioneerinrichting.
JPH0552248A (ja) * 1990-12-10 1993-03-02 Ebara Corp 送りねじ機構

Also Published As

Publication number Publication date
DE69306192D1 (de) 1997-01-09
JPH06201012A (ja) 1994-07-19
DE69306192T2 (de) 1997-05-28
US5456134A (en) 1995-10-10
TW235275B (https=) 1994-12-01

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