KR950001981A - Substrate Transfer Method and Substrate Transfer Device of Substrate Processing Equipment - Google Patents
Substrate Transfer Method and Substrate Transfer Device of Substrate Processing Equipment Download PDFInfo
- Publication number
- KR950001981A KR950001981A KR1019940012977A KR19940012977A KR950001981A KR 950001981 A KR950001981 A KR 950001981A KR 1019940012977 A KR1019940012977 A KR 1019940012977A KR 19940012977 A KR19940012977 A KR 19940012977A KR 950001981 A KR950001981 A KR 950001981A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- processing
- board
- processed
- substrate transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 58
- 238000000034 method Methods 0.000 title claims abstract description 12
- 230000000737 periodic effect Effects 0.000 claims 1
- 238000011282 treatment Methods 0.000 claims 1
- 230000007246 mechanism Effects 0.000 abstract 4
- 238000005728 strengthening Methods 0.000 abstract 1
- 230000007723 transport mechanism Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
장치를 대형화시키지 않고 처리능력을 높일 수 있는 기판처리장치에서 기판의 반송방법을 제공한다.Provided is a substrate transfer method in a substrate processing apparatus capable of increasing processing capacity without increasing the size of the apparatus.
제 1 의 기판 반송기구가 인댁서(ID), 자외선 조사유니트(UV), 스핀 스크래버(SS1), 핫 플레이트(HP1), 쿨 플레이트(CP1), 밀착강화 유니트(AP1), 쿨 플레이트(CP2) 순서로, 또 주기(T)로 피처리 기판을 반송한다. 또한, 제 2 의 기판 반송기구가 제 1 의 기판 반송기구와 같이 해서 피처리 기판을 반송하는 결국 동일의 반송순서로 또 주기로 피러치 기판을 반송한다. 단, 양 기판 반송기구의 간섭을 방지하기 위해 각 기판 반송수단에 의해 행해지는 피처리 기판의 반송처리는 교대로 반송주기보다도 짧은 시간만큼 어긋난 상태에서 행해진다. 이렇게 해서 이 주기 사이에 2매의 기판에 대해서 일련의 기판처리가 시행된다.The first substrate transfer mechanism is the indenter (ID), the ultraviolet irradiation unit (UV), the spin scrubber (SS1), the hot plate (HP1), the cool plate (CP1), the adhesion strengthening unit (AP1), and the cool plate (CP2). ) And to-be-processed substrate in cycle T. Moreover, the 2nd board | substrate conveyance mechanism conveys a to-be-processed board | substrate in the same conveyance order, and also in a cycle as a 1st board | substrate conveyance mechanism conveys a to-be-processed board | substrate similarly. However, in order to prevent the interference of both board | substrate conveyance mechanisms, the conveyance process of the to-be-processed board | substrate performed by each board | substrate conveyance means alternately performs in the state shift | deviated by the time shorter than a conveyance period. In this way, a series of substrate processing is performed for two substrates between these cycles.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제 1 도는 본 발명에 관한 기판의 반송방법을 적용할 수 있는 기판처리장치의 일예를 나타내는 측면도, 제 2 도는 제 1 도를 상방에서 본 평면배치도, 제 3 도는 제1도의 I-I위치에서 (-X)방향으로 본 측면구조도, 제 4 도는 제 3 도의 기판반송기구의 사시도.1 is a side view showing an example of a substrate processing apparatus to which the substrate transfer method according to the present invention can be applied, FIG. 2 is a planar layout view of FIG. 1 from above, and FIG. 4 is a perspective view of the substrate transport mechanism of FIG.
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP93-168604 | 1993-06-14 | ||
JP5168604A JPH077065A (en) | 1993-06-14 | 1993-06-14 | Substrate carrying method of substrate treating apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950001981A true KR950001981A (en) | 1995-01-04 |
KR0146907B1 KR0146907B1 (en) | 1998-11-02 |
Family
ID=15871145
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940012977A Expired - Fee Related KR0146907B1 (en) | 1993-06-14 | 1994-06-09 | Method and apparatus for transporting substrates within a substrate processing apparatus |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH077065A (en) |
KR (1) | KR0146907B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100729906B1 (en) * | 2000-05-25 | 2007-06-18 | 동경 엘렉트론 주식회사 | Substrate processing apparatus and substrate processing method |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100706381B1 (en) * | 1999-06-03 | 2007-04-10 | 동경 엘렉트론 주식회사 | Board Transfer Device |
-
1993
- 1993-06-14 JP JP5168604A patent/JPH077065A/en active Pending
-
1994
- 1994-06-09 KR KR1019940012977A patent/KR0146907B1/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100729906B1 (en) * | 2000-05-25 | 2007-06-18 | 동경 엘렉트론 주식회사 | Substrate processing apparatus and substrate processing method |
Also Published As
Publication number | Publication date |
---|---|
JPH077065A (en) | 1995-01-10 |
KR0146907B1 (en) | 1998-11-02 |
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