KR940023568U - 웨이퍼의 뒷면 마주보기 로딩/언로딩 장치 - Google Patents

웨이퍼의 뒷면 마주보기 로딩/언로딩 장치

Info

Publication number
KR940023568U
KR940023568U KR2019930003527U KR930003527U KR940023568U KR 940023568 U KR940023568 U KR 940023568U KR 2019930003527 U KR2019930003527 U KR 2019930003527U KR 930003527 U KR930003527 U KR 930003527U KR 940023568 U KR940023568 U KR 940023568U
Authority
KR
South Korea
Prior art keywords
unloading device
wafer face
back loading
loading
wafer
Prior art date
Application number
KR2019930003527U
Other languages
English (en)
Other versions
KR960007715Y1 (ko
Inventor
손문익
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019930003527U priority Critical patent/KR960007715Y1/ko
Publication of KR940023568U publication Critical patent/KR940023568U/ko
Application granted granted Critical
Publication of KR960007715Y1 publication Critical patent/KR960007715Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019930003527U 1993-03-11 1993-03-11 웨이퍼의 뒷면 마주보기 로딩/언로딩 장치 KR960007715Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930003527U KR960007715Y1 (ko) 1993-03-11 1993-03-11 웨이퍼의 뒷면 마주보기 로딩/언로딩 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930003527U KR960007715Y1 (ko) 1993-03-11 1993-03-11 웨이퍼의 뒷면 마주보기 로딩/언로딩 장치

Publications (2)

Publication Number Publication Date
KR940023568U true KR940023568U (ko) 1994-10-22
KR960007715Y1 KR960007715Y1 (ko) 1996-09-12

Family

ID=19351873

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930003527U KR960007715Y1 (ko) 1993-03-11 1993-03-11 웨이퍼의 뒷면 마주보기 로딩/언로딩 장치

Country Status (1)

Country Link
KR (1) KR960007715Y1 (ko)

Also Published As

Publication number Publication date
KR960007715Y1 (ko) 1996-09-12

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Legal Events

Date Code Title Description
A201 Request for examination
O032 Opposition [utility model]: request for opposition
U123 Submission of document of withdrawal after decision of registration